Abstract: A structured data management system which provides services concerning a structured electronic data object. In this system, a structured data storage unit stores a plurality of structured data objects associated with each other. Each structured data object can be represented as a tree structure constructed by a plurality of data elements, or nodes. Further, the individual nodes of a tree structure are associated with their respective process scripts. Through an input/output interface unit, a message addressed to a certain destination node arrives. Upon receipt of the message, a structured data processing unit identifies the destination node by tracing the tree structure of a particular structured data object where the destination node resides. The structured data processing unit then executes a process script associated with the destination node being identified.

Abstract: A structured data management system capable of easily changing the definition of a logical structure and controlling semantics described in data adapted to the defined structure as intended by persons who have defined the logical structure. A contents model defines an internal structure of a contents description. The contents description describes data to be managed according to the contents model. An operation description is coupled to the contents model and manipulates data in the contents description depending on the structure of the data in the contents description. The operation description functions to define semantics of each element of the structure defined by the contents model. An operation description executing unit executes the operation description coupled to the contents model. A structure managing unit verifies and manages the structure of the contents description according to the contents model.

Abstract: A continuous semiconductor substrate processing system is operated by a system control structure in accordance with a predetermined processing program. A wafer conveying mechanism conveys wafers to and from each of plural process stations, each of which performs a corresponding process step on semiconductor wafers, to and from a stocker and to and from an inspection unit. Carriers, movable by manual or mechanical structure other than the wafer conveying mechanism, provide for alternative conveying of wafers to and from each of the process stations, the stocker and the inspection station.