Patents by Inventor Nobukazu Ikeda
Nobukazu Ikeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7945414Abstract: A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.Type: GrantFiled: August 28, 2006Date of Patent: May 17, 2011Assignee: Fujikin IncorporatedInventors: Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata, Katsuyuki Sugita, Atsushi Matsumoto
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Publication number: 20110108138Abstract: A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.Type: ApplicationFiled: February 18, 2009Publication date: May 12, 2011Applicant: FUJIKIN INCORPORATEDInventors: Katsuyuki Sugita, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Takatoshi Nakatani
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Publication number: 20110100483Abstract: An energy-saving, downsized gas supply apparatus equipped with a vaporizer is provided, wherein the gas supply apparatus is capable of stably and easily performing highly accurate gas flow rate control without requiring rigorous temperature control on the vaporizer side. The present invention pertains to a gas supply apparatus equipped with a vaporizer that includes (a) a liquid receiving tank; (b) a vaporizer that vaporizes liquid; (c) a high-temperature type pressure type flow rate control device that adjusts a flow rate of a vaporized gas; and (d) heating devices that heat the vaporizer, the high-temperature type pressure type flow rate control device, and desired portions of pipe passages connected to the vaporizer and the high-temperature type pressure type flow rate control device.Type: ApplicationFiled: February 17, 2009Publication date: May 5, 2011Applicant: FUJIKIN INCORPORATEDInventors: Atsushi Nagata, Masaaki Nagase, Atsushi Hidaka, Kaoru Hirata, Atsushi Matsumoto, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda
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Patent number: 7935385Abstract: The object of the present invention is to form a chromium-oxide film excellent in corrosion resistance without containing an oxide film of other metal onto the optional metallic material. The chromium-oxide passivation film excellent in corrosion resistance without containing the oxide film of other metal can be formed inexpensively and in a short time, and a fluid supplying system for supplying fluid hard in corrosivity in safety is able to be provided. This invention comprises a step of forming the passivation film consisting of a chromium oxide by giving heat treatment in an oxidizing atmosphere after coating chromium on metallic material of which surface roughness (Ra) of a coat surface is not more than 1.Type: GrantFiled: August 21, 2003Date of Patent: May 3, 2011Assignees: Fujikin, Inc.Inventors: Tadahiro Ohmi, Yasuyuki Shirai, Nobukazu Ikeda, Eiji Ideta, Akihiro Morimoto, Tetsutaro Ogushi, Takehisa Konishi
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Publication number: 20110094596Abstract: The present-invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A a total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1, bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2, pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2, sensor measuring pressure inside branch supply line GL1, and another sensor measuring pressure inside branch supply line GL2.Type: ApplicationFiled: June 10, 2004Publication date: April 28, 2011Applicants: FUJIKIN INCORPORATED, TOKYO ELECTRON LTD.Inventors: Kazuhiko Sugiyama, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Toyomi Uenoyama
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Patent number: 7926509Abstract: Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.Type: GrantFiled: July 18, 2005Date of Patent: April 19, 2011Assignees: Fujikin Incorporated, Tokyo Electron Ltd.Inventors: Tadahiro Ohmi, Kazuhiko Sugiyama, Kenetu Mizusawa, Eiji Takahashi, Tomio Uno, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase
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Publication number: 20110042595Abstract: A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.Type: ApplicationFiled: August 6, 2010Publication date: February 24, 2011Applicant: FUJIKIN INCORPORATEDInventors: Atsushi MATSUMOTO, Kaoru HIRATA, Ryousuke DOHI, Nobukazu IKEDA, Kouji NISHINO
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Patent number: 7849869Abstract: The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps? of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps? which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.Type: GrantFiled: January 13, 2005Date of Patent: December 14, 2010Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Kouji Nishino, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Ryutaro Nishimura
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Patent number: 7841628Abstract: A rectangular parallelepipedal joint for use in fluid control apparatus comprises in its entirety two divided members which are a grooved connecting member having a groove in its center and provided in portions thereof on respective opposite sides of the groove with bolt holes each having a stepped portion for receiving therein a joint attaching bolt without permitting the head thereof to project from the joint and with female screw portions for respective male screw members to be screwed in for attaching an apparatus component; and a flat rectangular parallelepipedal communication member fitting in the groove of the connecting member and provided only with a U-shaped communication channel. The connecting member is made of stainless steel, while the communication member is made of polyamide 6. A positioning protrusion is formed on a bottom face defining the groove of the connecting member and is fitted in a positioning recessed portion formed in the bottom surface of the communication member.Type: GrantFiled: December 1, 2006Date of Patent: November 30, 2010Assignee: Fujikin IncorporatedInventors: Ichiro Tokuda, Michio Yamaji, Kenji Tsubota, Tsutomu Shinohara, Nobukazu Ikeda
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Publication number: 20100294964Abstract: A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.Type: ApplicationFiled: November 13, 2006Publication date: November 25, 2010Applicant: FUJIKIN INCORPORATEDInventors: Atsushi Matsumoto, Kaoru Hirata, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino
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Patent number: 7815872Abstract: A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.Type: GrantFiled: July 4, 2005Date of Patent: October 19, 2010Assignee: Fujikin IncorporatedInventors: Toshirou Nariai, Kouji Kawada, Keiji Hirao, Yukio Minami, Akihiro Morimoto, Nobukazu Ikeda
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Patent number: 7798167Abstract: A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.Type: GrantFiled: April 6, 2006Date of Patent: September 21, 2010Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Akniobu Teramoto, Tomio Uno, Ryousuke Dohi, Kouji Nishino, Osamu Nakamura, Atsushi Matsumoto, Masaaki Nagase, Nobukazu Ikeda
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Publication number: 20100229976Abstract: A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.Type: ApplicationFiled: June 13, 2007Publication date: September 16, 2010Applicant: Fujikin IncorporatedInventors: Kaoru Hirata, Yohei Sawada, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda
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Publication number: 20100207044Abstract: In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.Type: ApplicationFiled: August 21, 2007Publication date: August 19, 2010Applicant: Fujikin IncorporatedInventors: Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda, Yohei Sewada
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Publication number: 20100192854Abstract: A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control system disposed on an inlet side of the main gas supply line so a flow of carrier gas is supplied to the main gas supply line; a pressure control system disposed on an inlet side of the vent gas supply line, a carrier gas having a predetermined pressure is supplied to the vent gas supply line while the pressure control system performs a pressure adjustment, a gas pressure of the main gas supply line detected downstream from an orifice of the pressure type flow-rate control system and a gas pressure of the vent gas supply line are compared, and the gas pressure of the vent gas supply line is adjusted so a difference therebetween becomes zero.Type: ApplicationFiled: July 17, 2008Publication date: August 5, 2010Applicant: FUJIKIN INCORPORATEDInventors: Kouji Nishino, Ryousuke Dohi, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Nobukazu Ikeda
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Publication number: 20100139775Abstract: A pressure type flow control device enabling a reduction in size and an installation cost by accurately controlling the flow of a fluid in a wide flow range. Specifically, the flow of the fluid flowing in an orifice (8) is calculated as Qc=KP1 (K is a proportionality factor) or Qc=KP2m(P1?P2)n (K is a proportionality factor and m and n are constants) by using a pressure P1 on the upstream side of the orifice and a pressure P2 on the downstream side of the orifice. A fluid passage between the downstream side of the control valve of the flow control device and a fluid feed pipe is formed of at least two or more fluid passages positioned parallel with each other. Orifices with different fluid flow characteristics are interposed in the fluid passages positioned parallel with each other. For the control of the fluid in a small flow area, the fluid in the small flow area is allowed to flow to one orifice.Type: ApplicationFiled: June 22, 2006Publication date: June 10, 2010Applicants: FUJIKIN INCORPORATED, NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY, TOKYO ELECTRON LTD.Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
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Publication number: 20100143239Abstract: The method for parallel operation of moisture generating reactors according to the present invention operates so that an orifice, provided with an orifice hole having a predetermined opening diameter, is disposed on a mixed-gas inlet side of each of a plurality of moisture generating reactors connected in parallel with each other, and mixed gas G consisting of hydrogen and oxygen is supplied from a mixer to each of the moisture generating reactors through each orifice, and the flows of moisture generated by the moisture generating reactors are combined, and the resulting combined moisture is supplied to an apparatus that uses high-purity water. Thus, a need to increase the amount of high-purity water supply is met by allowing a plurality of moisture generating reactors to perform a parallel water generating operation by branching off a mixed gas consisting of H2 and O2 by using a simple orifice construction.Type: ApplicationFiled: April 17, 2007Publication date: June 10, 2010Applicant: FUJIKIN INCORPORATEDInventors: Yukio Minami, Keiji Hirao, Masaharu Taguchi, Toshiro Nariai, Koji Kawada, Akihiro Morimoto, Nobukazu Ikeda
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Publication number: 20100127196Abstract: Stable flow control is made possible even under high-temperature environments by relieving tensional force applied to a piezoelectric element when a piezoelectric actuator is retracted. Thus, a piezoelectric driven control valve includes: a body having a valve seat; a metal diaphragm to contact with and separate from the valve seat; an actuator box supported ascendably and descendably on the body; a split base fixed to the body; a disc spring pressing and urging the actuator box downward to bring the metal diaphragm into contact with the valve seat; and a piezoelectric actuator housed inside the actuator box and that extends upward with application of voltage to press the actuator box upward against the elastic force of the disc spring, and a precompression mechanism, for applying a compression force constantly to piezoelectric elements in the piezoelectric actuator, provided between the split base and the piezoelectric actuator.Type: ApplicationFiled: March 13, 2008Publication date: May 27, 2010Applicant: FUJIKIN INCORPORATEDInventors: Yohei Sawada, Kaoru Hirata, Ryosuke Doho, Kouji Nishino, Nobukazu Ikeda
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Patent number: 7673649Abstract: The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance. With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S4, which is hermetically fitted to the lower vacuum jacket S5 and with its lower face made open.Type: GrantFiled: January 13, 2005Date of Patent: March 9, 2010Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Yukio Minami, Kenji Tubota, Tsutomu Shinohara, Michio Yamaji, Nobukazu Ikeda, Akihiro Morimoto, Koji Kawada, Toshio Nariai
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Patent number: 7669455Abstract: The invention provides an automatic zero point correction device that includes a pressure sensor, wherein output from the sensor is outputted and the sensor output is inputted to a time-varying zero point drift correction means of the sensor; a sensor output judgement means of the time-varying zero point drift correction means, wherein the sensor output judgement means operates to make a judgement determining whether the sensor output is larger than a set value; and operating condition judgement means of the time-varying zero point drift correction means, wherein the operating condition judgement means judges operating conditions of the sensor, wherein the time-varying zero point drift correction means operates to cancel time-varying zero point drift of the sensor when the sensor output judgement means determines sensor output is larger than the set value and the operating condition judgement means determines operating conditions of the sensor are within previously set operating conditions.Type: GrantFiled: June 10, 2004Date of Patent: March 2, 2010Assignees: Fujikin IncorporatedInventors: Tadahiro Ohmi, Kazuhiko Sugiyama, Shoichi Hino, Eiji Takahashi, Makoto Saegusa, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Toyomi Uenoyama, Katsuyuki Sugita