Abstract: An actuator (10) includes a guide apparatus (30) that guides a rod 11 in a Y-axis direction. The guide apparatus (30) includes a slider (31), a rail (60) formed of a steel material, and balls (rolling elements) formed of a steel material. The slider (31) is supported by the rail (60) through the balls. Accordingly, even if torque originating from a rotation of the output shaft of a motor unit (20) is applied to the slider (31) through a ball screw shaft (71), the slider (31) does not move around the output shaft with respect to the rail (60). Hence, torque originating from the rotation of the output shaft is not likely to be transmitted to the rod (11) through the guide apparatus (30), thereby suppressing an occurrence of the wobbling of the leading end of the rod (11). In addition, a reduction of the work precision of the actuator (10) is preventable.

Abstract: An actuator (10) includes a guide apparatus (30) that guides a rod 11 in a Y-axis direction. The guide apparatus (30) includes a slider (31), a rail (60) formed of a steel material, and balls (rolling elements) formed of a steel material. The slider (31) is supported by the rail (60) through the balls. Accordingly, even if torque originating from a rotation of the output shaft of a motor unit (20) is applied to the slider (31) through a ball screw shaft (71), the slider (31) does not move around the output shaft with respect to the rail (60). Hence, torque originating from the rotation of the output shaft is not likely to be transmitted to the rod (11) through the guide apparatus (30), thereby suppressing an occurrence of the wobbling of the leading end of the rod (11). In addition, a reduction of the work precision of the actuator (10) is preventable.

Abstract: An apparatus for recycling a grinding slurry capable of effectively removing unwanted components at a reduced cost. Slurry used in a grinding treatment is at first recovered as recovery slurry. The recovery slurry is then recycled so as to obtain recycled slurry. One or more cyclone separators are provided and used for sizing the used slurry to obtain slurry particles having a predetermined particle size. The slurry having the predetermined particle size is supplied as recovery slurry. When the recovery slurry is recycled to produce recycled slurry, one or more supersonic wave generators are used for irradiating supersonic waves to the recovery slurry.

Abstract: An apparatus for recycling a grinding slurry capable of effectively removing unwanted components at a reduced cost. Slurry used in a grinding treatment is at first recovered as recovery slurry. The recovery slurry is then recycled so as to obtain recycled slurry. One or more cyclone separators are provided and used for sizing the used slurry to obtain slurry particles having a predetermined particle size. The slurry having the predetermined particle size is supplied as recovery slurry. When the recovery slurry is recycled to produce recycled slurry, one or more supersonic wave generators are used for irradiating supersonic waves to the recovery slurry.