Abstract: A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a beam portion on which a detection element for applying changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed, one end of the beam portion being connected to the top part of the support portion; a suspended weight connected to the other end of the beam portion; and a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the upper end face of the support portion, a conductor lead that is connected to the pad passes. Overswing of the weight is limited by means of the stopper substrate.

Abstract: A structure with superior shock resistance is proposed for a parasol-type acceleration sensor. The acceleration sensor comprises a support portion the lower end of which is fixed to a substrate; a beam portion on which a detection element for applying changes to an output signal in correspondence with strain caused by acceleration acting on the detection element is formed, one end of the beam portion being connected to the top part of the support portion; a suspended weight connected to the other end of the beam portion; and a stopper substrate with a window portion through which, in order to guide an output signal of the detection element via a pad that is formed on the upper end face of the support portion, a conductor lead that is connected to the pad passes. Overswing of the weight is limited by means of the stopper substrate.

Abstract: An acceleration sensor with reduced noise that resolves the problem of stress arising from a difference in thermal expansion coefficients is provided.

Abstract: An angular velocity sensor is manufactured by simple method and has reduced size and height, and includesa base portion formed by piezoelectric single crystal and having length in the Y-axis direction and thickness in Z-axis direction; and four beams each having length in Y-axis direction vertical to the X- and Z-axis directions that are arranged side by side in X-axis direction and formed by piezoelectric single crystal integrally with the base portion, wherein four beams are grouped in two pairs with one in each pair used as drive beam and the other a counterbalance, the drive beams are provided with drive electrodes adapted to oscillate the beams in the X-axis direction and Y-axis sensing electrodes adapted to detect the rotation angle applied around the Y-axis, and the other beams serving as counterbalances are provided with X-axis sensing electrodes adapted to detect the rotation angle applied around the X-axis.