Patents by Inventor Nobuo Fujisaki

Nobuo Fujisaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for inspecting a substrate
    Patent number: 6707546
    Abstract: An apparatus for inspecting a substrate includes a substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.
    Type: Grant
    Filed: October 25, 2001
    Date of Patent: March 16, 2004
    Assignee: Olympus Optical Co., Ltd.
    Inventors: Hiroyuki Okahira, Yuzo Nakamura, Terumasa Morita, Nobuo Fujisaki
  • Apparatus for inspecting a substrate
    Patent number: 6671041
    Abstract: The apparatus for inspecting a substrate of the present invention comprises substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions, for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.
    Type: Grant
    Filed: January 24, 2001
    Date of Patent: December 30, 2003
    Assignee: Olympus Optical Co., Ltd.
    Inventors: Hiroyuki Okahira, Yuzo Nakamura, Terumasa Morita, Nobuo Fujisaki
  • Apparatus for inspecting a substrate
    Publication number: 20020057429
    Abstract: The apparatus for inspecting a substrate of the present invention comprises substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions, for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.
    Type: Application
    Filed: October 25, 2001
    Publication date: May 16, 2002
    Applicant: Olympus Optical Co., Ltd.
    Inventors: Hiroyuki Okahira, Yuzo Nakamura, Terumasa Morita, Nobuo Fujisaki
  • Apparatus for inspecting a substrate
    Patent number: 6362884
    Abstract: An apparatus for inspecting a substrate includes a substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions, for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.
    Type: Grant
    Filed: September 22, 1998
    Date of Patent: March 26, 2002
    Assignee: Olympus Optical Co., Ltd.
    Inventors: Hiroyuki Okahira, Yuzo Nakamura, Terumasa Morita, Nobuo Fujisaki
  • Apparatus for inspecting a substrate
    Publication number: 20010002862
    Abstract: The apparatus for inspecting a substrate of the present invention comprises substrate holding member for holding a substrate to be inspected, a driving mechanism for raising the substrate holding member to a predetermined angle or less, a position coordinate detecting section provided at side edge of the substrate in at least two directions, for detecting coordinates of a defect present in the substrate, an observation system supporting section provided for supporting a micro observation system and moving on the surface of the substrate, and a controlling section for controlling of the movement of the micro observation system of the observation system supporting section to correspond to a defect present in the substrate, on the basis of the position coordinates of the defect detected by the position coordinate detecting section.
    Type: Application
    Filed: January 24, 2001
    Publication date: June 7, 2001
    Inventors: Hiroyuki Okahira, Yuzo Nakamura, Terumasa Morita, Nobuo Fujisaki