Patents by Inventor Nobutaka Omata

Nobutaka Omata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN
    Publication number: 20180304320
    Abstract: A substrate processing apparatus includes a substrate processing part 3 and a washing unit 40. The washing unit 40 includes a main body 43 having a liquid supplying port 41 and a liquid jetting port 42, a flow channel 44 formed between the liquid supplying port 41 and the liquid jetting port 42, and a valve 45 provided in the flow channel 44. In the washing unit 40, when the valve 45 is opened, the flow channel 44 is opened, thereby causing the liquid jetting port 42 to jet liquid, and when the valve 45 is closed, the flow channel 44 is closed, thereby causing the liquid jetting port 42 to stop jetting liquid. The flow channel 44 is provided with a water-hammer reducing mechanism 48 that operates to reduce damage to the flow channel 44 caused by a water hammer phenomenon when the valve 45 is closed.
    Type: Application
    Filed: June 27, 2018
    Publication date: October 25, 2018
    Inventors: Hiroshi Aono, Hideo Aizawa, Tadakazu Sone, Kenji Shinkai, Nobutaka Omata
  • SUBSTRATE PROCESSING APPARATUS AND HAND SHOWER GUN
    Publication number: 20160256900
    Abstract: A substrate processing apparatus includes a substrate processing part 3 and a washing unit 40. The washing unit 40 includes a main body 43 having a liquid supplying port 41 and a liquid jetting port 42, a flow channel 44 formed between the liquid supplying port 41 and the liquid jetting port 42, and a valve 45 provided in the flow channel 44. In the washing unit 40, when the valve 45 is opened, the flow channel 44 is opened, thereby causing the liquid jetting port 42 to jet liquid, and when the valve 45 is closed, the flow channel 44 is closed, thereby causing the liquid jetting port 42 to stop jetting liquid. The flow channel 44 is provided with a water-hammer reducing mechanism 48 that operates to reduce damage to the flow channel 44 caused by a water hammer phenomenon when the valve 45 is closed.
    Type: Application
    Filed: March 3, 2016
    Publication date: September 8, 2016
    Inventors: Hiroshi Aono, Hideo Aizawa, Tadakazu Sone, Kenji Shinkai, Nobutaka Omata