Abstract: A seismic isolator includes a lower guide rail 4 having grooves on the side surfaces thereof and fitted to an upper surface of a lower plate 1, an upper guide rail 6 having grooves on the side surfaces thereof and fitted to a lower surface of an upper plate in a direction criss-crossing the lower guide rail 4, a block body 9 clamping at its lower part the lower guide rail 4 and clamping at its upper part the upper guide rail 6, a large number of rollers interposed between the lower guide rail 4 and the block body 9 and between the upper guide rail 6 and the block body 9, a large number of balls interposed between grooves of the side surfaces of the lower guide rail 4 and the block body 9 and between grooves of the side surfaces of the upper guide rail 6 and the block body 9 and a flexible member 22 fitted between the lower surface of the upper plate and the upper surface of the lower plate 1.

Abstract: A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported in suspension by support members, with its apparatus mounting surface disposed at a low level. The support members are supported by stationary members through vertically extendible and contractible first air springs. Horizontally extendible and contractible second air springs are disposed between the stationary members and the apparatus table. The first and second air springs serve to mitigate vertical and horizontal vibrations of the apparatus table, respectively.

Abstract: A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.