Patents by Inventor Nobuyoshi Natsuaki
Nobuyoshi Natsuaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7799690Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: June 13, 2007Date of Patent: September 21, 2010Assignee: Renesas Electronics CorporationInventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Publication number: 20080045027Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of oxide film and uniformity in thickness of the oxide film.Type: ApplicationFiled: June 13, 2007Publication date: February 21, 2008Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 7250376Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: May 19, 2005Date of Patent: July 31, 2007Assignee: Renesas Technology Corp.Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 7122469Abstract: With a view to preventing the oxidation of a metal film at the time of light oxidation treatment after gate patterning and at the same time to making it possible to control the reproducibility of oxide film formation and homogeneity of oxide film thickness at gate side-wall end portions, in a gate processing step using a poly-metal, a gate electrode is formed by patterning a gate electrode material which has been deposited over a semiconductor wafer 1A having a gate oxide film formed thereon and has a poly-metal structure and then, the principal surface of the semiconductor wafer 1A heated to a predetermined temperature or vicinity thereof is supplied with a hydrogen gas which contains water at a low concentration, the water having been formed from hydrogen and oxygen by a catalytic action, to selectively oxidize the principal surface of the semiconductor wafer 1A, whereby the profile of the side-wall end portions of the gate electrode is improvedType: GrantFiled: August 4, 2005Date of Patent: October 17, 2006Assignee: Hitachi, Ltd.Inventors: Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki
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Patent number: 7053007Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: May 19, 2005Date of Patent: May 30, 2006Assignee: Renesas Technology Corp.Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 7008880Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: February 10, 2004Date of Patent: March 7, 2006Assignee: Renesas Technology Corp.Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 6987069Abstract: With a view to preventing the oxidation of a metal film at the time of light oxidation treatment after gate patterning and at the same time to making it possible to control the reproducibility of oxide film formation and homogeneity of oxide film thickness at gate side-wall end portions, in a gate processing step using a poly-metal, a gate electrode is formed by patterning a gate electrode material which has been deposited over a semiconductor wafer 1A having a gate oxide film formed thereon and has a poly-metal structure and then, the principal surface of the semiconductor wafer 1A heated to a predetermined temperature or vicinity thereof is supplied with a hydrogen gas which contains water at a low concentration, the water having been formed from hydrogen and oxygen by a catalytic action, to selectively oxidize the principal surface of the semiconductor wafer 1A, whereby the profile of the side-wall end portions of the gate electrode is improved.Type: GrantFiled: April 12, 2004Date of Patent: January 17, 2006Assignee: Hitachi, Ltd.Inventors: Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki
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Publication number: 20050266630Abstract: With a view to preventing the oxidation of a metal film at the time of light oxidation treatment after gate patterning and at the same time to making it possible to control the reproducibility of oxide film formation and homogeneity of oxide film thickness at gate side-wall end portions, in a gate processing step using a poly-metal, a gate electrode is formed by patterning a gate electrode material which has been deposited over a semiconductor wafer 1A having a gate oxide film formed thereon and has a poly-metal structure and then, the principal surface of the semiconductor wafer 1A heated to a predetermined temperature or vicinity thereof is supplied with a hydrogen gas which contains water at a low concentration, the water having been formed from hydrogen and oxygen by a catalytic action, to selectively oxidize the principal surface of the semiconductor wafer 1A, whereby the profile of the side-wall end portions of the gate electrode is improvedType: ApplicationFiled: August 4, 2005Publication date: December 1, 2005Inventors: Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki
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Patent number: 6962880Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: February 10, 2004Date of Patent: November 8, 2005Assignee: Renesas Technology Corp.Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 6962881Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: February 10, 2004Date of Patent: November 8, 2005Assignee: Renesas Technology Corp.Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Publication number: 20050227501Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: ApplicationFiled: May 19, 2005Publication date: October 13, 2005Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Publication number: 20050208731Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: ApplicationFiled: May 19, 2005Publication date: September 22, 2005Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 6855642Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: GrantFiled: April 28, 2003Date of Patent: February 15, 2005Assignee: Renesas Technology Corp.Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Publication number: 20040198067Abstract: With a view to preventing the oxidation of a metal film at the time of light oxidation treatment after gate patterning and at the same time to making it possible to control the reproducibility of oxide film formation and homogeneity of oxide film thickness at gate side-wall end portions, in a gate processing step using a poly-metal, a gate electrode is formed by patterning a gate electrode material which has been deposited over a semiconductor wafer 1A having a gate oxide film formed thereon and has a poly-metal structure and then, the principal surface of the semiconductor wafer 1A heated to a predetermined temperature or vicinity thereof is supplied with a hydrogen gas which contains water at a low concentration, the water having been formed from hydrogen and oxygen by a catalytic action, to selectively oxidize the principal surface of the semiconductor wafer 1A, whereby the profile of the side-wall end portions of the gate electrode is improved.Type: ApplicationFiled: April 12, 2004Publication date: October 7, 2004Inventors: Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki
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Patent number: 6784116Abstract: With a view to preventing the oxidation of a metal film at the time of light oxidation treatment after gate patterning and at the same time to making it possible to control the reproducibility of oxide film formation and homogeneity of oxide film thickness at gate side-wall end portions, in a gate processing step using a poly-metal, a gate electrode is formed by patterning a gate electrode material which has been deposited over a semiconductor wafer 1A having a gate oxide film formed thereon and has a poly-metal structure and then, the principal surface of the semiconductor wafer 1A heated to a predetermined temperature or vicinity thereof is supplied with a hydrogen gas which contains water at a low concentration, the water having been formed from hydrogen and oxygen by a catalytic action, to selectively oxidize the principal surface of the semiconductor wafer 1A, whereby the profile of the side-wall end portions of the gate electrode is improved.Type: GrantFiled: January 31, 2003Date of Patent: August 31, 2004Assignee: Hitachi, Ltd.Inventors: Yoshikazu Tanabe, Isamu Asano, Makoto Yoshida, Naoki Yamamoto, Masayoshi Saito, Nobuyoshi Natsuaki
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Publication number: 20040161945Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: ApplicationFiled: February 10, 2004Publication date: August 19, 2004Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Publication number: 20040157468Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: ApplicationFiled: February 10, 2004Publication date: August 12, 2004Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Publication number: 20040157467Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide film.Type: ApplicationFiled: February 10, 2004Publication date: August 12, 2004Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki
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Patent number: 6723665Abstract: In a gas-phase treating process of a semiconductor wafer using hydrogen, there is provided a technique for safely eliminating the hydrogen in an exhaust gas discharged from a gas-phase treating apparatus. The profile at the end portions of the side walls of gate electrodes of a poly-metal structure is improved by forming the gate electrodes over a semiconductor wafer IA having a gate oxide film and then by supplying the semiconductor wafer 1A with a hydrogen gas containing a low concentration of water, as generated from hydrogen and oxygen by catalytic action, to oxidize the principal face of the semiconductor wafer 1A selectively. After this, the hydrogen in the exhaust gas, as discharged from an oxidizing furnace, is completely converted into water by causing it to react with oxygen by a catalytic method.Type: GrantFiled: April 2, 2003Date of Patent: April 20, 2004Assignees: Renesas Technology Corp., Hitachi Tokyo Electronics Co., Ltd.Inventors: Yoshikazu Tanabe, Toshiaki Nagahama, Nobuyoshi Natsuaki, Yasuhiko Nakatsuka
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Publication number: 20030219995Abstract: A method for fabricating a semiconductor integrated circuit device of the invention comprises feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer, and forming a thin oxide film serving as a gate insulating film of an MOS transistor and having a thickness of 5 nm or below on the main surface of the semiconductor wafer at an oxide film-growing rate sufficient to ensure fidelity in formation of an oxide film and uniformity in thickness of the oxide filmType: ApplicationFiled: April 28, 2003Publication date: November 27, 2003Inventors: Yoshikazu Tanabe, Satoshi Sakai, Nobuyoshi Natsuaki