Patents by Inventor Nobuyoshi Tanno

Nobuyoshi Tanno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
    Patent number: 8755025
    Abstract: A method for exposing a substrate includes holding the substrate on a substrate holding member, irradiating, via a liquid, a light beam to the substrate on the substrate holding member, and removing, after the exposure of the substrate via the liquid, a liquid remained on the substrate before supporting the substrate by a transferring member. The transferring member transfers the exposed substrate from the substrate holding member to outside of the substrate holding member.
    Type: Grant
    Filed: February 2, 2011
    Date of Patent: June 17, 2014
    Assignees: Nikon Corporation, Zao Nikon Co., Ltd.
    Inventors: Nobuyoshi Tanno, Takashi Horiuchi
  • Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
    Publication number: 20110122393
    Abstract: A method for exposing a substrate includes holding the substrate on a substrate holding member, irradiating, via a liquid, a light beam to the substrate on the substrate holding member, and removing, after the exposure of the substrate via the liquid, a liquid remained on the substrate before supporting the substrate by a transferring member. The transferring member transfers the exposed substrate from the substrate holding member to outside of the substrate holding member.
    Type: Application
    Filed: February 2, 2011
    Publication date: May 26, 2011
    Applicants: ZAO NIKON CO., LTD., NIKON CORPORATION
    Inventors: Nobuyoshi Tanno, Takashi Horiuchi
  • Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
    Patent number: 7898645
    Abstract: A substrate transport apparatus, which transports a substrate that has been exposed with an image of a pattern through a projection optical system and a liquid, comprises a substrate support member that supports the substrate, and a liquid removal mechanism that removes the liquid that has adhered to at least one of the substrate support member and at least a portion of the area of the rear surface of the substrate.
    Type: Grant
    Filed: April 6, 2006
    Date of Patent: March 1, 2011
    Assignees: Zao Nikon Co., Ltd., Nikon Corporation
    Inventors: Nobuyoshi Tanno, Takashi Horiuchi
  • Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
    Publication number: 20070052942
    Abstract: A substrate transport apparatus, which transports a substrate that has been exposed with an image of a pattern through a projection optical system and a liquid, comprises a substrate support member that supports the substrate, and a liquid removal mechanism that removes the liquid that has adhered to at least one of the substrate support member and at least a portion of the area of the rear surface of the substrate.
    Type: Application
    Filed: November 3, 2006
    Publication date: March 8, 2007
    Applicants: ZAO NIKON CO., LTD., NIKON CORPORATION
    Inventors: Nobuyoshi Tanno, Takashi Horiuchi
  • Substrate transport apparatus and method, exposure apparatus and exposure method, and device fabricating method
    Publication number: 20060256316
    Abstract: A substrate transport apparatus, which transports a substrate that has been exposed with an image of a pattern through a projection optical system and a liquid, comprises a substrate support member that supports the substrate, and a liquid removal mechanism that removes the liquid that has adhered to at least one of the substrate support member and at least a portion of the area of the rear surface of the substrate.
    Type: Application
    Filed: April 6, 2006
    Publication date: November 16, 2006
    Applicants: ZAO NIKON CO., LTD., NIKON CORPORATION
    Inventors: Nobuyoshi Tanno, Takashi Horiuchi
  • Substrate storage cassette positioning device and method
    Patent number: 6432849
    Abstract: A substrate storage cassette positioning device and method for positioning a substrate storage cassette in a predetermined location on an installation platform, comprising a guide section for guiding the substrate storage cassette into a predetermined location during the positioning of the substrate storage cassette.
    Type: Grant
    Filed: July 31, 2000
    Date of Patent: August 13, 2002
    Assignee: Nikon Corporation
    Inventors: Yutaka Endo, Nobuyoshi Tanno