Patents by Inventor Nobuyuki Iijima

Nobuyuki Iijima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11088006
    Abstract: An electrostatic chuck includes a platform, a power feed pin, a tubular insulator, an adhesive layer, and a first primer. The platform includes an electrode. The power feed pin contacts the electrode. The tubular insulator is provided around the power feed pin. The adhesive layer bonds the platform and the tubular insulator together. The first primer is provided on a surface of the tubular insulator facing toward the adhesive layer.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: August 10, 2021
    Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Takamasa Yoshikawa, Hiroharu Yanagisawa, Nobuyuki Iijima
  • Publication number: 20200395236
    Abstract: A substrate fixing apparatus includes: a base plate; an electrostatic adsorption member that adsorbs and retains a substrate; a support member that is disposed on the base plate to support the electrostatic adsorption member; and an adhesive layer that adhesively bonds the electrostatic adsorption member to the base plate. The support member directly contacts the base plate and the electrostatic adsorption member. An elastic modulus of the support member is higher than an elastic modulus of the adhesive layer.
    Type: Application
    Filed: June 9, 2020
    Publication date: December 17, 2020
    Inventors: Nobuyuki Iijima, Hiroharu Yanagisawa, Yuichi Nakamura, Ryuji Takahashi
  • Publication number: 20200176282
    Abstract: A substrate fixing device includes a baseplate, an insulating layer over the baseplate, and an electrostatic chuck on the insulating layer. The insulating layer includes a heating element and a metal layer. The metal layer has a higher thermal conductivity than the insulating layer and is positioned closer to the electrostatic chuck than the heating element.
    Type: Application
    Filed: November 22, 2019
    Publication date: June 4, 2020
    Inventors: Nobuyuki IIJIMA, Hiroyuki ASAKAWA, Keiichi TAKEMOTO, Yoichi HARAYAMA
  • Publication number: 20190385883
    Abstract: An electrostatic chuck includes a platform, a power feed pin, a tubular insulator, an adhesive layer, and a first primer. The platform includes an electrode. The power feed pin contacts the electrode. The tubular insulator is provided around the power feed pin. The adhesive layer bonds the platform and the tubular insulator together. The first primer is provided on a surface of the tubular insulator facing toward the adhesive layer.
    Type: Application
    Filed: June 4, 2019
    Publication date: December 19, 2019
    Inventors: Takamasa Yoshikawa, Hiroharu Yanagisawa, Nobuyuki Iijima
  • Publication number: 20040089038
    Abstract: A main body has a drive unit and a bar. When the drive unit is driven, the bar is inserted into frames. Accordingly, an inner panel and an outer panel are fixed.
    Type: Application
    Filed: November 13, 2002
    Publication date: May 13, 2004
    Applicant: Yumekobo Inc.
    Inventor: Nobuyuki Iijima
  • Patent number: 4825359
    Abstract: A data processing system for array computation including a global memory, a control processor unit for executing microprograms preloaded from the global memory in a local memory of the processor unit, and an array processor unit controlled by the instructions generated by the control processor unit from the microprograms for executing array computations with an array of data preloaded from the global memory into a local array memory, the selected architecture of the array processor unit being dynamically reconfigurable to best meet array computation to be performed, and to provide reduced overhead operations.
    Type: Grant
    Filed: August 18, 1983
    Date of Patent: April 25, 1989
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Takahide Ohkami, Nobuyuki Iijima, Teijiro Sakamoto, Toshiyuki Hirai