Abstract: Provided are: a support frame (1) for pellicle that has both low dust generation property and high light resistance, and further has an ion elution amount which is reduced to the utmost limit to an extent that haze is not generated even when a short wavelength laser is used for an exposure light source, a pellicle (8) using the support frame for pellicle, and a method for efficiently manufacturing the support frame for pellicle. A support frame for pellicle which comprises a frame member (2) comprising aluminum or aluminum alloy, an anodized film (4) formed on the surface of the frame member, and a fluororesin coating layer (6) formed on the surface of the anodized film.

Abstract: Provided are: a support frame (1) for pellicle that has both low dust generation property and high light resistance, and further has an ion elution amount which is reduced to the utmost limit to an extent that haze is not generated even when a short wavelength laser is used for an exposure light source, a pellicle (8) using the support frame for pellicle, and a method for efficiently manufacturing the support frame for pellicle. A support frame for pellicle which comprises a frame member (2) comprising aluminum or aluminum alloy, an anodized film (4) formed on the surface of the frame member, and a fluororesin coating layer (6) formed on the surface of the anodized film.

Abstract: A pellicle support frame is provided with a frame body made of aluminum alloy and has a pellicle film bonded to the upper surface of the frame body and a transparent substrate bonded to the lower surface of the frame body. Within the frame body, a plurality of hollow portions are provided to be lined up in the circumferential direction of the frame body, and a through-hole which leads from the outer peripheral surface to the inner peripheral surface of the frame body is formed between two adjacent hollow portions. This configuration makes it possible to prevent strain from arising in the support frame and the transparent substrate after the support frame is bonded to the transparent substrate.

Abstract: A pellicle support frame includes a frame body made of aluminum alloy. The frame body has a top surface onto which a pellicle film is bonded and also has an underside surface onto which a transparent substrate is bonded. The frame body has a height not less than 1 mm and not more than 6 mm in a top-underside direction. Grooves are formed on the top surface and the underside surface of the frame body. The grooves each have a depth not less than 0.2 mm. The structure described above makes it possible to machine the support frame more easily and also to prevent deformation of the transparent substrate when the support frame is bonded to the transparent substrate.

Abstract: A pellicle support frame is provided with a frame body made of aluminum alloy and has a pellicle film bonded to the upper surface of the frame body and a transparent substrate bonded to the lower surface of the frame body. Within the frame body, a plurality of hollow portions are provided to be lined up in the circumferential direction of the frame body, and a through-hole which leads from the outer peripheral surface to the inner peripheral surface of the frame body is formed between two adjacent hollow portions. This configuration makes it possible to prevent strain from arising in the support frame and the transparent substrate after the support frame is bonded to the transparent substrate.