Abstract: The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as semiconductor wafers, pellicles, or the like. The present invention: facilitates a regular cleaning operation, can be used also for a storage case of a complicated shape, does not require a large scale equipment or an expensive equipment to facilitate an environmental countermeasure, and provides high cleaning effect. The method of cleaning a storage case polluted by adhesion of a foreign substance of an organic material, an ionic foreign substances or an ionic crystal foreign substance physically absorbed, comprises a step of placing the storage case still in air flow of cleaned air or an inert gas in a temperature range from room temperature to 80° C. for desorbing and removing the foreign substance adhered to the storage case.

Abstract: The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as semiconductor wafers, pellicles, or the like. The present invention: facilitates a regular cleaning operation, can be used also for a storage case of a complicated shape, does not require a large scale equipment or an expensive equipment to facilitate an environmental countermeasure, and provides high cleaning effect. The method of cleaning a storage case polluted by adhesion of a foreign substance of an organic material, an ionic foreign substances or an ionic crystal foreign substance physically absorbed, comprises a step of placing the storage case still in air flow of cleaned air or an inert gas in a temperature range from room temperature to 80° C. for desorbing and removing the foreign substance adhered to the storage case.

Abstract: A variable-discharge high pressure pump capable of facilitating the manufacturing and providing sufficient lubrication. The pump comprises a cam shaft provided with a cam surface by which a tappet displaces in accordance with the cam surface, a plunger connected to the tappet to reciprocate in accordance with the reciprocation of the tappet and accommodated in a cylindrical cylinder. Also included are a cylinder head having a contact surface brought into contact with one end surface of the cylinder. The cylinder head has a small-diameter recess portion made in the contact surface to be coupled to the cylinder and constitutes a pump chamber in conjunction with a head portion of the plunger.

Abstract: A check valve and a seating valve incur less deformation of a seat, providing good sealing performance.

Abstract: A watch movement mounting structure for fixing a watch movement in a watch case having a case body including a radially extending annular shoulder and a radially inwardly extending annular projection contiguous with the annular shoulder, which structure comprises a flexible annular support member including an annular wall adapted to rest on the annular shoulder of said case body, a plurality of circumferentially spaced, inwardly directed flange segments each of which extends upwardly of the annular wall to retain the watch movement, and a plurality of circumferentially spaced, outwardly directed flange segments each of which extends downwardly of the annular wall and adapted to engage the annular projection of the case body, whereby said watch movement is fixed in place in said case body and the axial displacement of the watch movement is prevented.