Abstract: A substrate processing system includes a substrate processing apparatus, an input/output apparatus, a first control apparatus installed with first software, configured to control the substrate processing apparatus based on a first signal output from the input/output apparatus, and configured to acquire a second signal output from the substrate processing apparatus, a second control apparatus installed with second software, and configured to perform same calculation processing as that of the first control apparatus, and not configured to control the substrate processing apparatus, a first distributor configured to distribute the first signal to the second control apparatus, and a second distributor configured to distribute the second signal to the second control apparatus. The second control apparatus outputs a third signal based on the first signal and the second signal.

Abstract: To provide a steering device capable of highly precisely controlling turning angles of steered wheels without changing a layout of members. Provided is a steering device (10A) including: a center arm (26) having one end portion configured to swing in a right-and-left direction with respect to a vehicle body (BD) in synchronism with rotation of a steering shaft (22); a rod member (40A), which is coupled to the one end of the center arm (26), and is configured to move in the right-and-left direction, to thereby change turning angles of steered wheels (WR and WL); and a rod-member drive device (50) configured to linearly move the rod member (40A) in the right-and-left direction through use of a driving force source. The rod member (40A) is supported such that movement of the rod member (40A) in the right-and-left direction of the vehicle body (BD) is allowed, but movement of the rod member (40A) in a front-and-rear direction and an up-and-down direction of the vehicle body (BD) is restricted.

Abstract: To provide a steering device capable of highly precisely controlling turning angles of steered wheels without changing a layout of members. Provided is a steering device (10A) including: a center arm (26) having one end portion configured to swing in a right-and-left direction with respect to a vehicle body (BD) in synchronism with rotation of a steering shaft (22); a rod member (40A), which is coupled to the one end of the center arm (26), and is configured to move in the right-and-left direction, to thereby change turning angles of steered wheels (WR and WL); and a rod-member drive device (50) configured to linearly move the rod member (40A) in the right-and-left direction through use of a driving force source. The rod member (40A) is supported such that movement of the rod member (40A) in the right-and-left direction of the vehicle body (BD) is allowed, but movement of the rod member (40A) in a front-and-rear direction and an up-and-down direction of the vehicle body (BD) is restricted.

Abstract: Targeting mass production, the present invention provides an advanced method of manufacturing pure niobium plate end-group components from pure niobium plate material for superconducting high frequency accelerator cavity by means of innovative shear-blanking followed by innovative forging procedures, wherein the invention is to convert the procedure/production method from the conventional machining or waterjet cutting followed by the conventional cold forging to the whole press-forming The invention gives the drastic effects on cost-effectiveness and press-performance.

Abstract: Targeting mass production, the present invention provides an advanced method of manufacturing pure niobium plate end-group components from pure niobium plate material for superconducting high frequency accelerator cavity by means of innovative shear-blanking followed by innovative forging procedures, wherein the invention is to convert the procedure/production method from the conventional machining or waterjet cutting followed by the conventional cold forging to the whole press-forming The invention gives the drastic effects on cost-effectiveness and press-performance.

Abstract: End-group components for superconducting accelerator cavity used in acceleration of charged particles are manufactured by subjecting pure niobium sheet materials to press forming composed mainly of flat-bottomed cylindrical drawing, preferably by simultaneously conducting control of slide velocity and/or its motion and control of tool die temperature and/or its distribution/gradient in the above press forming, further preferably by dynamically controlling blank holding force in accordance with the variation of flange area, flange thickness and deformed characteristics of niobium sheet materials during the press forming, more preferably by preparing an anisotropically shaped blank instead of a circular blank by use of servo press forming machine, servo-die cushion temperature control equipment, water-soluble solid coating type lubricant, and a tooling die.

Abstract: End-group components for superconducting accelerator cavity used in acceleration of charged particles are manufactured by subjecting pure niobium sheet materials to press forming composed mainly of flat-bottomed cylindrical drawing, preferably by simultaneously conducting control of slide velocity and/or its motion and control of tool die temperature and/or its distribution/gradient in the above press forming, further preferably by dynamically controlling blank holding force in accordance with the variation of flange area, flange thickness and deformed characteristics of niobium sheet materials during the press forming, more preferably by preparing an anisotropically shaped blank instead of a circular blank by use of servo press forming machine, servo-die cushion temperature control equipment, water-soluble solid coating type lubricant, and a tooling die.

Abstract: Providing a half precast slab even in a case where the thickness of the slab in the site condition is too thick to apply conventional precast construction techniques. A half precast slab including a plurality of floor concrete form members and, each floor concrete form member being provided with: a bottom slab of a long length, in response to the floor concrete form member; a pair of side walls installed upright along each longitudinal edge of the bottom slab, in response to the floor concrete form member; thereby, each floor concrete form member is arranged so as to be parallel to each other and be tightly connected to the adjacent floor concrete form member, along the direction perpendicular to the longitudinal direction of each floor concrete form member; the height of the side walls other than the side walls on the most outer edge sides of the whole floor concrete form members is set at a common height that is smaller than the height of the side walls on the most outer edge sides.

Abstract: Providing a half precast slab even in a case where the thickness of the slab in the site condition is too thick to apply conventional precast construction techniques. A half precast slab including a plurality of floor concrete form members and, each floor concrete form member being provided with: a bottom slab of a long length, in response to the floor concrete form member; a pair of side walls installed upright along each longitudinal edge of the bottom slab, in response to the floor concrete form member; thereby, each floor concrete form member is arranged so as to be parallel to each other and be tightly connected to the adjacent floor concrete form member, along the direction perpendicular to the longitudinal direction of each floor concrete form member; the height of the side walls other than the side walls on the most outer edge sides of the whole floor concrete form members is set at a common height that is smaller than the height of the side walls on the most outer edge sides.

Abstract: Providing a half precast slab even in a case where the thickness of the slab in the site condition is too thick to apply conventional precast construction techniques. A half precast slab including a plurality of floor concrete form members and, each floor concrete form member being provided with: a bottom slab of a long length, in response to the floor concrete form member; a pair of side walls installed upright along each longitudinal edge of the bottom slab, in response to the floor concrete form member; thereby, each floor concrete form member is arranged so as to be parallel to each other and be tightly connected to the adjacent floor concrete form member, along the direction perpendicular to the longitudinal direction of each floor concrete form member; the height of the side walls other than the side walls on the most outer edge sides of the whole floor concrete form members is set at a common height that is smaller than the height of the side walls on the most outer edge sides.

Abstract: An oil pump includes: a rotor 3 for actuating a pump action to suck oil in a suction passage 24 from a suction port 27 to supply oil to a delivery passage by way of a delivery port 19; and a flow control valve for returning an excessive oil from the delivery passage to the suction passage 24 as a returning flow of oil by way of a bypass passage 29 when a flow amount of oil is excessive in the delivery passage. A corrosion-proof member 9 having corrosion resistance is disposed at the position which faces to the returning flow of oil in the inner wall surface of at least one of the suction passage 24 and the bypass passage 29. The corrosion-proof member 9 has a discontinuous shape (for example a V-shape or a U-shape) in a circumferrencial direction of center line P1 in a cross section which intersects the center line P1 at right angles.

Abstract: An electrically driven mechanical servo press machine including a brake and a clutch is arranged such that a motor shaft of a servomotor is connected to a drive shaft or a sleeve of the mechanical servo press machine on a clutch side. With this arrangement, safety in control can be improved.

Abstract: A flow controlling apparatus to control flow rate of working fluid discharged from pump apparatus to a power steering apparatus including a electric variable throttle, a solenoid mechanism and a spool. The solenoid mechanism varies opening degree of the electric variable throttle based on a electric signal from electric controller. The spool slides in accordance with the differential pressure of the variable throttle due to increase of flow rate of working fluid discharged from pump apparatus so as to return excess working fluid to bypass passage connecting to a suction port of pump apparatus. The flow controlling apparatus further comprising means for increase flow rate of bypass flow to bypass passage when rotating speed of the pump apparatus exceed predetermined value.

Abstract: An electric power steering apparatus (11) includes a reduction mechanism (G) for transmitting the rotation of a rotating shaft (28a) of a motor (28) to a ball screw nut (20) while reducing the speed of the rotation. The reduction mechanism includes a drive gear (29), which is coaxially connected to the rotating shaft of the motor, and a driven gear (16a), which is arranged on the outer surface of the ball screw nut. Due to the reduction mechanism, the motor may be inclined relative to a rack shaft (18).

Abstract: An oil pump includes: a rotor 3 for actuating a pump action to suck oil in a suction passage 24 from a suction port 27 to supply oil to a delivery passage by way of a delivery port 19; and a flow control valve for returning an excessive oil from the delivery passage to the suction passage 24 as a returning flow of oil by way of a bypass passage 29 when a flow amount of oil is excessive in the delivery passage. A corrosion-proof member 9 having corrosion resistance is disposed at the position which faces to the returning flow of oil in the inner wall surface of at least one of the suction passage 24 and the bypass passage 29. The corrosion-proof member 9 has a discontinuous shape (for example a V-shape or a U-shape) in a circumferrencial direction of center line P1 in a cross section which intersects the center line P1 at right angles.

Abstract: A flow controlling apparatus to control flow rate of working fluid discharged from pump apparatus to a power steering apparatus including a electric variable throttle, a solenoid mechanism and a spool. The solenoid mechanism varies opening degree of the electric variable throttle based on a electric signal from electric controller. The spool slides in accordance with the differential pressure of the variable throttle due to increase of flow rate of working fluid discharged from pump apparatus so as to return excess working fluid to bypass passage connecting to a suction port of pump apparatus. The flow controlling apparatus further comprising means for increase flow rate of bypass flow to bypass passage when rotating speed of the pump apparatus exceed predetermined value.

Abstract: An electric power steering apparatus (11) includes a reduction mechanism (G) for transmitting the rotation of a rotating shaft (28a) of a motor (28) to a ball screw nut (20) while reducing the speed of the rotation. The reduction mechanism includes a drive gear (29), which is coaxially connected to the rotating shaft of the motor, and a driven gear (16a), which is arranged on the outer surface of the ball screw nut. Due to the reduction mechanism, the motor may be inclined relative to a rack shaft (18).