Patents by Inventor Nobuyuki Kohda

Nobuyuki Kohda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for measuring liquid immersion lithography soluble fraction in organic film
    Patent number: 7924400
    Abstract: A method for measuring a liquid immersion lithography soluble fraction in an organic film including a mounting step of mounting a droplet of a liquid immersion medium for liquid immersion lithography on a surface of an organic film formed on a substrate; and a transfer step of transferring a component in the organic film into the droplet.
    Type: Grant
    Filed: September 25, 2006
    Date of Patent: April 12, 2011
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Nobuyuki Kohda, Masaaki Yoshida, Takayuki Yajima, Hiromitsu Tsuji
  • METHOD FOR MEASURING LIQUID IMMERSION LITHOGRAPHY SOLUBLE FRACTION IN ORGANIC FILM
    Publication number: 20090268173
    Abstract: A method for measuring a liquid immersion lithography soluble fraction in an organic film including a mounting step of mounting a droplet of a liquid immersion medium for liquid immersion lithography on a surface of an organic film formed on a substrate and a transfer step of transferring a component in the organic film into the droplet.
    Type: Application
    Filed: September 25, 2006
    Publication date: October 29, 2009
    Inventors: Nobuyuki Kohda, Masaaki Yoshida, Takayuki Yajima, Hiromitsu Tsuji