Abstract: A motion guide device is formed of: a track member including a base portion extending along a longitudinal direction, and a pair of wall portions erected from both edges of the base portion in a width direction, and having rolling element rolling grooves formed along a longitudinal direction; and a moving member which is assembled in a movable manner along the longitudinal direction between the wall portions, and to which a pair of guide members are assembled, load rolling element rolling grooves which correspond to the rolling element rolling grooves being formed in the guide members, wherein at least either one of the guide members is equipped with a biasing member on a surface of the guide member on a side opposite to a surface of the guide member on which the load rolling element rolling groove is formed.

Abstract: An actuator includes a track member provided with a base extending along a longitudinal direction and a pair of walls erected from opposite ends of the base in a width direction, with rolling-element rolling grooves formed along the longitudinal direction; and a moving member assembled movably along the longitudinal direction between the walls, with respective load rolling-element rolling grooves corresponding to the rolling-element rolling grooves being formed in the moving members; and a screw shaft passed through a through-hole formed in the moving member, with a screw rolling-element rolling groove formed in the screw shaft, the screw rolling-element rolling groove being spiral in shape, wherein the moving member has the nut member attached to the through-hole, with the screw load rolling-element rolling groove corresponding to the screw rolling-element rolling groove formed in the nut, the nut member is assembled via a flange member which includes a lubricant supply device.

Abstract: A motion guide apparatus ensures that a retaining portion retains a rolling element. A rolling element retainer having retaining portions that prevent a rolling element from falling out of a movable body, the retaining portions extending along a loaded rolling element rolling portion, is incorporated in the movable body of the motion guide apparatus. End plates are formed integrally with the retaining portions. Fall prevention portions to reduce the widths of openings between the retaining portions are provided to center parts of the retaining portions in a length direction thereof. The fall prevention portions are padding portions integrated with the retaining portions, the padding portions rising in such a manner as to reduce the widths of the openings, and/or projections integrated with the retaining portions, the projections touching the movable body in such a manner that the center parts of the retaining portions bend toward a track member.

Abstract: A motion guide apparatus ensures that a retaining portion retains a rolling element. A rolling element retainer having retaining portions that prevent a rolling element from falling out of a movable body, the retaining portions extending along a loaded rolling element rolling portion, is incorporated in the movable body of the motion guide apparatus. End plates are formed integrally with the retaining portions. Fall prevention portions to reduce the widths of openings between the retaining portions are provided to center parts of the retaining portions in a length direction thereof. The fall prevention portions are padding portions integrated with the retaining portions, the padding portions rising in such a manner as to reduce the widths of the openings, and/or projections integrated with the retaining portions, the projections touching the movable body in such a manner that the center parts of the retaining portions bend toward a track member.

Abstract: An actuator includes a track member provided with a base extending along a longitudinal direction and a pair of walls erected from opposite ends of the base in a width direction, with rolling-element rolling grooves formed along the longitudinal direction; and a moving member assembled movably along the longitudinal direction between the walls, with respective load rolling-element rolling grooves corresponding to the rolling-element rolling grooves being formed in the moving members; and a screw shaft passed through a through-hole formed in the moving member, with a screw rolling-element rolling groove formed in the screw shaft, the screw rolling-element rolling groove being spiral in shape, wherein the moving member has the nut member attached to the through-hole, with the screw load rolling-element rolling groove corresponding to the screw rolling-element rolling groove formed in the nut, the nut member is assembled via a flange member which includes a lubricant supply device.

Abstract: A motion guide device is formed of: a track member including a base portion extending along a longitudinal direction, and a pair of wall portions erected from both edges of the base portion in a width direction, and having rolling element rolling grooves formed along a longitudinal direction; and a moving member which is assembled in a movable manner along the longitudinal direction between the wall portions, and to which a pair of guide members are assembled, load rolling element rolling grooves which correspond to the rolling element rolling grooves being formed in the guide members, wherein at least either one of the guide members is equipped with a biasing member on a surface of the guide member on a side opposite to a surface of the guide member on which the load rolling element rolling groove is formed.

Abstract: This slewing bearing includes: an inner ring having an inner-ring-side rolling-element rolling surface on an outer peripheral surface; an outer ring having an ring-side rolling-element rolling surface on an inner peripheral surface, and being arranged outside the inner ring such that the outer-ring-side rolling-element rolling surface faces the inner-ring-side rolling-element rolling surface; and a plurality of rolling elements rollably disposed on a rolling-element rolling passage formed by the inner-ring-side rolling-element rolling surface and the outer-ring-side rolling-element rolling surface. The inner ring or the outer ring is configured to have combination of a press-worked part having a contour shape formed by pressing work, and a removal-processed part including at least the inner-ring-side rolling-element rolling surface or the outer-ring-side rolling-element rolling surface formed by removal processing.

Abstract: A motion guide apparatus ensures that a retaining portion retains a rolling element. A rolling element retainer having retaining portions that prevent a rolling element from falling out of a movable body, the retaining portions extending along a loaded rolling element rolling portion, is incorporated in the movable body of the motion guide apparatus. End plates are formed integrally with the retaining portions. Fall prevention portions to reduce the widths of openings between the retaining portions are provided to center parts of the retaining portions in a length direction thereof. The fall prevention portions are padding portions integrated with the retaining portions, the padding portions rising in such a manner as to reduce the widths of the openings, and/or projections integrated with the retaining portions, the projections touching the movable body in such a manner that the center parts of the retaining portions bend toward a track member.

Abstract: To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.

Abstract: An object is to provide a motion guide apparatus that can facilitate an assembly operation. An end member (4a, 4b) including an inner peripheral side of a direction changing path (2c) is placed on an end surface in a movement direction of a moving member body (3). At least one of a pair of the end members (4a and 4b) includes an opening (21) linking to the inner peripheral side of the direction changing path (2c) to load rolling elements (42) into a circulation path. Opposing surfaces (18) of the pair of the end members (4a and 4b) to the moving member body (3) are formed in flat surfaces. The pair of the end members (4a and 4b) molded integrally with a holding portion (5) is incorporated into the moving member body (3) in a direction orthogonal to the movement direction of the moving member body (3). A lid member (7a, 7b) closes the opening (21) in the end member (4a, 4b).

Abstract: An object is to provide a motion guide apparatus that can facilitate an assembly operation. An end member (4a, 4b) including an inner peripheral side of a direction changing path (2c) is placed on an end surface in a movement direction of a moving member body (3). At least one of a pair of the end members (4a and 4b) includes an opening (21) linking to the inner peripheral side of the direction changing path (2c) to load rolling elements (42) into a circulation path. Opposing surfaces (18) of the pair of the end members (4a and 4b) to the moving member body (3) are formed in flat surfaces. The pair of the end members (4a and 4b) molded integrally with a holding portion (5) is incorporated into the moving member body (3) in a direction orthogonal to the movement direction of the moving member body (3). A lid member (7a, 7b) closes the opening (21) in the end member (4a, 4b).

Abstract: Provided is a motion guide device in which a moving member is equipped with circulation path moldings. With the device, ease of assembly and moldability can be improved. A moving member is provided with circulation path moldings, which have: holding sections that extend along loaded rolling-element rolling sections; return path configuring sections that configure return paths; and a pair of direction-change path inner circumference configuring sections that configure the inner circumferences of a pair of direction-change paths. The circulation path moldings are provided with a first molding in which one direction-change path inner circumference configuring sections is integrally molded with the holding section and a second molding in which the other direction-change path inner circumference configuring section is integrally molded with the return path configuring section. The first molding and the second molding are separate bodies.

Abstract: To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.

Abstract: An optical module including a plurality of laser diodes and outputting optical beams emitted from the laser diodes includes a radiator unit for radiating heat and a case enclosing the optical module. The case has a first attachment surface to which a red laser diode is attached, a second attachment surface to which a green laser diode is attached, and a corner part where the first and second attachment surfaces intersect with each other. The optical module has a first attachment part, for connecting the case to the radiator unit, in the vicinity of the corner part.

Abstract: Provided is a motion guide device in which a moving member is equipped with circulation path moldings. With the device, ease of assembly and moldability can be improved. A moving member is provided with circulation path moldings, which have: holding sections that extend along loaded rolling-element rolling sections; return path configuring sections that configure return paths; and a pair of direction-change path inner circumference configuring sections that configure the inner circumferences of a pair of direction-change paths. The circulation path moldings are provided with a first molding in which one direction-change path inner circumference configuring sections is integrally molded with the holding section and a second molding in which the other direction-change path inner circumference configuring section is integrally molded with the return path configuring section. The first molding and the second molding are separate bodies.

Abstract: A motion guide device has a moving block mounting surface 501 of an end plate 5 formed in a planar shape and a thinned-down portion 52 formed in an opposing moving block mounting surface 502. Moreover, in this motion guide device, a lubrication path 30 includes: a first lubrication path 30a formed extending in a horizontal direction from a surface of side surfaces parallel to a longer direction of a track rail 1 in the end plate 5 to a central portion of the end plate 5; a second lubrication path 30b formed in the central portion of the end plate 5; and a third lubrication path 30c connected to the second lubrication path and formed in a groove shape in the moving block mounting surface 501 of the end plate 5, and, moreover, the first lubrication path 30a is formed in a hollow shape continuous to inside a built-up portion 52a appended to the thinned-down portion 52 of the end plate 5.

Abstract: An optical module including a plurality of laser diodes and outputting optical beams emitted from the laser diodes includes a radiator unit for radiating heat and a case enclosing the optical module. The case has a first attachment surface to which a red laser diode is attached, a second attachment surface to which a green laser diode is attached, and a corner part where the first and second attachment surfaces intersect with each other. The optical module has a first attachment part, for connecting the case to the radiator unit, in the vicinity of the corner part.

Abstract: The invention is a filling method in which liquid is filled and sealed into a liquid sachet package made of a multilayered laminate having at least three layers in which a base material which forms a surface layer, an intermediate layer, and a sealant layer which forms an internal layer are laminated in the above order, including a process of forming a liquid sachet package, a process of filling liquid, and a process of sealing in the opening of the liquid sachet package, in which the intermediate layer is formed using a composition including an ionomer of an ethylene and unsaturated carboxylic acid copolymer, and a filling temperature range obtained using a specific method becomes equal to or more than 30° C. at both a line speed of 20 m/minute and a line speed of 25 m/minute.

Abstract: A motion guide device has a moving block mounting surface 501 of an end plate 5 formed in a planar shape and a thinned-down portion 52 formed in an opposing moving block mounting surface 502. Moreover, in this motion guide device, a lubrication path 30 includes: a first lubrication path 30a formed extending in a horizontal direction from a surface of side surfaces parallel to a longer direction of a track rail 1 in the end plate 5 to a central portion of the end plate 5; a second lubrication path 30b formed in the central portion of the end plate 5; and a third lubrication path 30c connected to the second lubrication path and formed in a groove shape in the moving block mounting surface 501 of the end plate 5, and, moreover, the first lubrication path 30a is formed in a hollow shape continuous to inside a built-up portion 52a appended to the thinned-down portion 52 of the end plate 5.