Patents by Inventor Nobuyuki Zumoto

Nobuyuki Zumoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical machining apparatus
    Patent number: 5223693
    Abstract: An optical machining apparatus for irradiating light from a light source onto a source to be machined to form a grooves in the surface. The apparatus uses a mask disposed in the path of light from the light source. The mask includes reflective parts for reflecting the light from the light source. The reflective parts are on a first surface of the mask. The mask also includes a reflection member for returning the light reflected at the reflective parts of the mask toward the mask.
    Type: Grant
    Filed: February 25, 1991
    Date of Patent: June 29, 1993
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Nobuyuki Zumoto, Toshinori Yagi, Yasuhito Myoi, Yoshie Uchiyama, Masaaki Tanaka, Teruo Miyamoto, Masao Izumo
  • Thin film forming apparatus
    Patent number: 4986214
    Abstract: A thin film forming apparatus of the present invention comprises: a reaction chamber for receiving therein a substrate and a thin film forming gas; an ultraviolet laser beam oscillator for generating an ultraviolet laser beam for causing dissociation of the thin film forming gas to thereby form a thin film over the surface of the substrate; and a plasma generator for generating ions for controlling growth of a thin film.
    Type: Grant
    Filed: December 16, 1987
    Date of Patent: January 22, 1991
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Nobuyuki Zumoto, Toru Takahama, Susumu Hoshinouchi, Noriko Morita
  • Electron-beam exposure apparatus
    Patent number: 4879473
    Abstract: An electron-beam exposure apparatus having a correction function for correcting deflection distortion. The correction function is carried out by the provision of a correcting device including an analog correction unit 35 and a digital correction unit having a memory unit 10 for storing correction data other than data that can be expressed by a cubic function. The capacity of such a memory unit can be made smaller than that of conventional apparatuses.
    Type: Grant
    Filed: September 23, 1988
    Date of Patent: November 7, 1989
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Nobuyuki Zumoto, Masahiko Sakamoto, Susumu Hoshinouchi