Patents by Inventor Noel Einstein Abarra

Noel Einstein Abarra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Magnetron unit, magnetron sputtering apparatus, and method of manufacturing electronic device
    Patent number: 7785449
    Abstract: A magnetron unit includes a plurality of first magnet elements each including first magnets which have the same polarity and are provided on two end portions of a yoke plate made of a magnetic material and a second magnet which has a polarity different from that of the first magnets and is provided on a middle portion of the yoke plate, a base plate on which a moving unit is placed to make each of the plurality of first magnet elements move in one direction, and a second magnet element which includes yoke plates made of a magnetic material and fixed to two end portions respectively, of the base plate, a magnet which has the same polarity as that of the second magnet and is placed on the yoke plate and a magnet which has the same polarity as that of the first magnet and is placed on the magnet.
    Type: Grant
    Filed: June 3, 2009
    Date of Patent: August 31, 2010
    Assignee: Canon Anelva Corporation
    Inventors: Tetsuya Endo, Noel Einstein Abarra
  • MAGNETRON UNIT, MAGNETRON SPUTTERING APPARATUS, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
    Publication number: 20090236219
    Abstract: A magnetron unit includes a plurality of first magnet elements each including first magnets which have the same polarity and are provided on two end portions of a yoke plate made of a magnetic material and a second magnet which has a polarity different from that of the first magnets and is provided on a middle portion of the yoke plate, a base plate on which a moving unit is placed to make each of the plurality of first magnet elements move in one direction, and a second magnet element which includes yoke plates made of a magnetic material and fixed to two end portions respectively, of the base plate, a magnet which has the same polarity as that of the second magnet and is placed on the yoke plate and a magnet which has the same polarity as that of the first magnet and is placed on the magnet.
    Type: Application
    Filed: June 3, 2009
    Publication date: September 24, 2009
    Applicant: CANON ANELVA CORPORATION
    Inventors: Tetsuya Endo, Noel Einstein Abarra