Patents by Inventor Noel James Leeson

Noel James Leeson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal activation of fluorine for use in a semiconductor chamber
    Patent number: 6818566
    Abstract: A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.
    Type: Grant
    Filed: October 18, 2002
    Date of Patent: November 16, 2004
    Assignee: The BOC Group, Inc.
    Inventors: Noel James Leeson, Graham Hodgson, Peter Harold Buckley, Richard A. Hogle
  • Thermal activation of fluorine for use in a semiconductor chamber
    Publication number: 20040077162
    Abstract: A method and system for thermally activating a oxidizing cleaning gas for use in a semiconductor process chamber cleaning process. The oxidizing cleaning gas is thermally activated by reacting the oxidizing cleaning gas with heated inert gas. The resulting thermally activated oxidizing cleaning gas does not readily deactivate, thus providing enhanced cleaning capabilities.
    Type: Application
    Filed: October 18, 2002
    Publication date: April 22, 2004
    Inventors: Noel James Leeson, Graham Hodgson, Peter Harold Buckley, Richard A. Hogle