Patents by Inventor Noel Smith

Noel Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8530006
    Abstract: A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.
    Type: Grant
    Filed: September 7, 2010
    Date of Patent: September 10, 2013
    Assignee: FEI Company
    Inventors: Clive D. Chandler, Noel Smith
  • Publication number: 20130134855
    Abstract: An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
    Type: Application
    Filed: November 30, 2011
    Publication date: May 30, 2013
    Applicant: FEI Company
    Inventors: Sean Kellogg, Anthony Graupera, N. William Parker, Andrew B. Wells, Mark W. Utlaut, Walter Skoczylas, Gregory A. Schwind, Shouyin Zhang, Noel Smith
  • Patent number: 8405054
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: March 26, 2013
    Assignee: FEI Company
    Inventors: Noel Smith, Clive D. Chandler, Mark W. Utlaut, Paul P. Tesch, Dave Tuggle
  • Publication number: 20120319000
    Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
    Type: Application
    Filed: April 2, 2012
    Publication date: December 20, 2012
    Applicant: FEI COMPANY
    Inventors: John Keller, Noel Smith, Roderick Boswell, Lawrence Scipioni, Christine Charles, Orson Sutherland
  • Publication number: 20120280136
    Abstract: An inductively coupled plasma source for a focused charged particle beam system includes a dielectric liquid that insulates and cools the plasma chamber. A flow restrictor at an electrical potential that is a large fraction of the plasma potential reducing arcing because the voltage drop in the gas occurs primarily at relative high pressure.
    Type: Application
    Filed: January 18, 2012
    Publication date: November 8, 2012
    Applicant: FEI COMPANY
    Inventors: Shouyin Zhang, Noel Smith, Walter Skoczylas
  • Patent number: 8303833
    Abstract: A method for fabrication of microscopic structures that uses a beam process, such as beam-induced decomposition of a precursor, to deposit a mask in a precise pattern and then a selective, plasma beam is applied, comprising the steps of first creating a protective mask upon surface portions of a substrate using a beam process such as an electron beam, focused ion beam (FIB), or laser process, and secondly etching unmasked substrate portions using a selective plasma beam etch process. Optionally, a third step comprising the removal of the protective mask may be performed with a second, materially oppositely selective plasma beam process.
    Type: Grant
    Filed: June 21, 2007
    Date of Patent: November 6, 2012
    Assignee: FEI Company
    Inventors: Milos Toth, Noel Smith
  • Publication number: 20120171402
    Abstract: A process for the coating of surfaces of a metallic component to be formed by contacting the surfaces of the metallic component prior to forming operation with an aqueous composition containing 80% by weight of at least one organic film-forming ionomeric polymer or copolymer, whereby the total organic polymeric material has an average acid number in the range from 20 to 300, optionally at least one further organic film-forming polymer different from the organic film-forming ionomeric polymer or copolymer; optionally a neutralizing agent; a low temperature corrosion inhibiting cross-linking agent and water. The pH of the aqueous composition at the beginning of the coating process is in the range from 6 to 10.5.
    Type: Application
    Filed: March 7, 2012
    Publication date: July 5, 2012
    Inventors: Noel SMITH, Heribert DOMES
  • Publication number: 20120107625
    Abstract: The invention relates to a composition for applying a clear or translucent and colorless or nearly colorless emissive coating especially for cool roofing on a metallic surface comprising in a dispersion a) 50 to 300 g/L of at least one of clear or translucent organic polymeric substances of a binder, and b) 30 to 300 g/L of sheet silicate pigments having a TE value for the thermal emissivity of at least 0.40, having a particle size distribution of which d50 is in the range of 0.3 to 80 ?m and having been comminuted, disintegrated, exfoliated or any combination of these to thin particles. There is further on provided a process for applying a clear or translucent and colorless or nearly colorless emissive coating especially for cool roofing on a metallic surface wherein a composition of the invention is applied on a metallic surface, wherein the coating is dried and wherein the dried coating has a coating weight in the range of from 0.2 to 2000 g/m2.
    Type: Application
    Filed: November 3, 2010
    Publication date: May 3, 2012
    Inventors: Noel SMITH, Charles J. Gruszka, Aaron Thompson, Michael Deemer
  • Patent number: 8168957
    Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
    Type: Grant
    Filed: February 11, 2010
    Date of Patent: May 1, 2012
    Assignee: FEI Company
    Inventors: John Keller, Noel Smith, Roderick Boswell, Lawrence Scipioni, Christine Charles, Orson Sutherland
  • Publication number: 20120080407
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Application
    Filed: October 4, 2011
    Publication date: April 5, 2012
    Applicant: FEI COMPANY
    Inventors: Noel Smith, Clive D. Chandler, Mark Utlaut, Paul P. Tesch, Dave Tuggle
  • Patent number: 8087379
    Abstract: A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.
    Type: Grant
    Filed: August 24, 2005
    Date of Patent: January 3, 2012
    Assignee: FEI Company
    Inventors: Clive D. Chandler, Noel Smith
  • Patent number: 8076650
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Grant
    Filed: July 16, 2007
    Date of Patent: December 13, 2011
    Assignee: FEI Company
    Inventors: Noel Smith, Clive D. Chandler, Mark Utlaut, Paul P. Tesch, Dave Tuggle
  • Publication number: 20110214276
    Abstract: An oxygen storage cylinder is stored in an interior cabin of an aircraft by providing a generally cylindrical envelope of flexible material receiving the cylinder therein and securing the envelope to a fixed seat frame. Circumferential straps are secured to a cylindrical wall portion of the envelope at spaced apart positions along the length thereof for securing the envelope and cylinder therein to an elongate frame member of the seat frame. End straps secured to intersecting frame members prevent longitudinal sliding of the envelope and cylinder therein relative to the elongate frame member of the fixed seat frame. The envelope protects the cylinder from direct contact with the frame to prevent friction or vibration damage to the cylinder while fixing the position of the cylinder in the interior cabin for the safety of surrounding passengers in the event of turbulence.
    Type: Application
    Filed: March 1, 2011
    Publication date: September 8, 2011
    Inventor: Sydney Noel Smith
  • Publication number: 20110163068
    Abstract: A multibeam system in which a charged particle beam and one or more additional beams can be directed to the target within a single vacuum chamber. A first beam colunm preferably produces a beam for rapid processing, and a second beam column produces a beam for more precise processing. A third beam column can be used to produce a beam useful for forming an image of the sample while producing little or no change in the sample.
    Type: Application
    Filed: January 9, 2009
    Publication date: July 7, 2011
    Inventors: Mark Utlaut, Noel Smith, Paul P. Tesch, Tom Miller, David H. Narum, David Tuggle, Lawrence Scipioni
  • Publication number: 20110117748
    Abstract: A method of localized plasma processing improves processing speed and reduces work piece damage compared to charged particle beam deposition and etching. In one embodiment, a plasma jet exits a plasma generating chamber and activates a reactive gas. A jet of plasma and reactive gas impacts and processes the work piece. Because the plasma and the ions in the reactive gas can have low kinetic energy, there can be little or no surface damage. This is particularly useful for deposition processes. When it is desired to etch material, the reactive ions can be more energetic to enhance etching.
    Type: Application
    Filed: September 7, 2010
    Publication date: May 19, 2011
    Applicant: FEI COMPANY
    Inventors: Clive D. Chandler, Noel Smith
  • Publication number: 20100294648
    Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
    Type: Application
    Filed: February 11, 2010
    Publication date: November 25, 2010
    Applicant: FEI COMPANY
    Inventors: John Keller, Noel Smith, Roderick Boswell, Lawrence Scipioni, Christine Charles, Orson Sutherland
  • Patent number: 7684768
    Abstract: A self-powered current loop transmitter transmits a process variable over a wireless link, deriving operating power from the current which drives the loop. A storage capacitor is connected across the system input terminals through a switch to provide the operating power for the system components.
    Type: Grant
    Filed: June 19, 2007
    Date of Patent: March 23, 2010
    Inventors: Otto P. Fest, Noel Smith
  • Patent number: 7670455
    Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: March 2, 2010
    Assignee: FEI Company
    Inventors: John Keller, Noel Smith, Roderick Boswell, Lawrence Scipioni, Christine Charles, Orson Sutherland
  • Publication number: 20090309018
    Abstract: The present invention provides a plasma ion beam system that includes multiple gas sources and that can be used for performing multiple operations using different ion species to create or alter submicron features of a work piece. The system preferably uses an inductively coupled, magnetically enhanced ion beam source, suitable in conjunction with probe-forming optics sources to produce ion beams of a wide variety of ions without substantial kinetic energy oscillations induced by the source, thereby permitting formation of a high resolution beam.
    Type: Application
    Filed: July 16, 2007
    Publication date: December 17, 2009
    Applicant: Fei Company
    Inventors: Noel Smith, Clive D. Chandler, Mark W. Utlaut, Paul P. Tesch, Dave Tuggle
  • Patent number: D683135
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: May 28, 2013
    Inventor: Kelly Noel Smith