Patents by Inventor Noh Jung Kwak

Noh Jung Kwak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming a contact hole of a semiconductor device
    Patent number: 5940730
    Abstract: The present invention relates to a method of forming a contact hole of a semiconductor device, and discloses a method of forming a contact hole of a semiconductor device which can remove an oxide film formed on the bottom of the contact hole, and make the edge portions of the entrance to the contact hole and reduce the topology of the contact hole by performing high frequency plasma etching processes in two stage in which the condition of pressure and electric power are different.
    Type: Grant
    Filed: December 20, 1996
    Date of Patent: August 17, 1999
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Noh Jung Kwak, Choon Hwan Kim