Patents by Inventor Norbert Arnold
Norbert Arnold has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180228825Abstract: The invention relates to the use of a compound of formula (I), or a composition containing the compound, as glutaminyl cyclase (QC) inhibitor and to methods of preparation.Type: ApplicationFiled: September 15, 2016Publication date: August 16, 2018Applicants: Hochschule Anhalt, Leibniz-Institut Für Pflanzenbiochemie (IPB)Inventors: Stephanie Hielscher-Michael, Carola Griehl, Hans-Ulrich Demuth, Stephan Schilling, Ludger Wessjohann, Norbert Arnold
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Patent number: 9490257Abstract: After forming a recessed conductive material portion over a deep trench capacitor located in a lower portion of a deep trench embedded in a substrate, a hard mask layer is formed over a top semiconductor layer of the substrate and the recessed conductive material portion such that the hard mask layer completely fills the deep trench. Next, the hard mask layer, the top semiconductor layer and the recessed conductive material portion are patterned to form a laterally contacting pair of a semiconductor fin and a conductive strap structure over the deep trench capacitor as well as a dielectric cap embedded in the deep trench. The dielectric cap vertically contacts a lower portion of the conductive strap structure and laterally surrounds a portion of an upper portion of the conductive strap structure that is not in contact with the semiconductor fin.Type: GrantFiled: December 18, 2014Date of Patent: November 8, 2016Assignee: GLOBALFOUNDRIES INC.Inventor: Norbert Arnold
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Publication number: 20160181252Abstract: After forming a recessed conductive material portion over a deep trench capacitor located in a lower portion of a deep trench embedded in a substrate, a hard mask layer is formed over a top semiconductor layer of the substrate and the recessed conductive material portion such that the hard mask layer completely fills the deep trench. Next, the hard mask layer, the top semiconductor layer and the recessed conductive material portion are patterned to form a laterally contacting pair of a semiconductor fin and a conductive strap structure over the deep trench capacitor as well as a dielectric cap embedded in the deep trench. The dielectric cap vertically contacts a lower portion of the conductive strap structure and laterally surrounds a portion of an upper portion of the conductive strap structure that is not in contact with the semiconductor fin.Type: ApplicationFiled: December 18, 2014Publication date: June 23, 2016Applicant: GLOBALFOUNDRIES INC.Inventor: Norbert Arnold
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Patent number: 9293382Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.Type: GrantFiled: October 24, 2014Date of Patent: March 22, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
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Publication number: 20150041809Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.Type: ApplicationFiled: October 24, 2014Publication date: February 12, 2015Inventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
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Patent number: 8927989Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.Type: GrantFiled: November 28, 2012Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
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Publication number: 20140145191Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.Type: ApplicationFiled: November 28, 2012Publication date: May 29, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
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Patent number: 8648115Abstract: The present invention relates to the use of compounds of general formula (I) or of a salt thereof as anti-oomycetes and to a method for combating plant pathogens using said compounds.Type: GrantFiled: May 26, 2010Date of Patent: February 11, 2014Assignees: BASF SE, Leibniz-Institute Fuer PflanzenbiochemieInventors: Norbert Arnold, Axel Teichert, Sabine Rosahl, Bernhard Westermann, Ludger Wessjohann, Lennart Eschen-Lippold, Tobias Draeger
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Publication number: 20120129938Abstract: The present invention relates to the use of compounds of general formula (I) or of a salt thereof as anti-oomycetes and to a method for combating plant pathogens using said compounds.Type: ApplicationFiled: May 26, 2010Publication date: May 24, 2012Inventors: Norbert Arnold, Axel Teichert, Sabine Rosahl, Bernhard Westermann, Ludger Wessjohann, Lennart Eschen-Lippold, Tobias Draeger
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Patent number: 7015092Abstract: Methods and devices that provide improved isolation and alignment of gate conductors or gate contacts of vertical transistors in deep trench memory cells. A method for forming a vertical gate contact of a vertical transistor includes an oxide spacer formation process that prevents defects, such as shorts caused by voids filled with polysilicon, resulting from etching processes that are performed during fabrication of a vertical transistor, and enables formation of well-defined contact plugs for gate contacts, providing improved alignment structures.Type: GrantFiled: December 18, 2003Date of Patent: March 21, 2006Assignee: Infineon Technologies North America Corp.Inventors: Venkatachalam C. Jaiprakash, Norbert Arnold
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Patent number: 7015145Abstract: A method for fabricating a buried strap forms a dielectric collar along sidewalls of a trench. The trench is formed in a substrate. The trench is filled with a conductive material and the conductive material is recessed in the trench to expose a portion of the collar. A masking layer is deposited in the trench over the exposed portion of the collar. A portion of the masking layer is removed over one side of the collar and a portion of the collar is etched on the one side. A buried strap is formed on the conductive material, which connects to the substrate on the one side.Type: GrantFiled: January 8, 2001Date of Patent: March 21, 2006Assignee: Infineon Technologies AGInventors: Venkatachalam C. Jaiprakash, Norbert Arnold
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Publication number: 20050136631Abstract: Methods and devices that provide improved isolation and alignment of gate conductors or gate contacts of vertical transistors in deep trench memory cells. A method for forming a vertical gate contact of a vertical transistor includes an oxide spacer formation process that prevents defects, such as shorts caused by voids filled with polysilicon, resulting from etching processes that are performed during fabrication of a vertical transistor, and enables formation of well-defined contact plugs for gate contacts, providing improved alignment structures.Type: ApplicationFiled: December 18, 2003Publication date: June 23, 2005Inventors: Venkatachalam Jaiprakash, Norbert Arnold
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Patent number: 6884676Abstract: A memory cell is formed in a memory cell array comprised of a plurality of memory cells arranged in rows and columns. A deep trench structure is formed within a semiconductor substrate and includes at least one conducting region. A patterned bit line structure is formed atop of, and electrically isolated from, the insulating region of the deep trench structure and atop of, but contacting at least part of, regions of the semiconductor substrate. Exposed portions of the semiconductor substrate are etched to form at least one isolation trench adjoining the deep trench structure using the patterned bit line structure as an etch mask. The isolation trench is filled with a dielectric material. A contact region to the conducting region of the deep trench structure is formed within the dielectric material of the isolation trench and is electrically isolated from the bit line structure.Type: GrantFiled: May 28, 2003Date of Patent: April 26, 2005Assignee: Infineon Technologies AGInventors: Norbert Arnold, Venkatachalam C. Jaiprakash
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Patent number: 6849496Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.Type: GrantFiled: July 11, 2003Date of Patent: February 1, 2005Assignee: Infineon Technologies AGInventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold
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Publication number: 20040256651Abstract: A Top Oxide Method is used to form an oxide layer over an array of vertical transistors as in a trench dynamic random access memory (DRAM) array with vertically stacked access metal oxide semiconductor field effect transistors (MOSFETs). The Top Oxide is formed by first forming the vertical devices with the pad nitride remaining in place. Once the devices have been formed and the gate polysilicon has been planarized down to the surface of the pad nitride, the pad nitride is stripped away leaving the tops of the gate polysilicon plugs extending above the active silicon surface. This pattern of polysilicon plugs defines the pattern over which the Top Oxide is deposited. The deposited Top Oxide fills the regions between and on top of the polysilicon plugs. The Top Oxide is then planarized back to the tops of the polysilicon plugs so contacts can be made between the passing interconnects and the gates of the vertical devices.Type: ApplicationFiled: July 22, 2004Publication date: December 23, 2004Applicants: Infineon Technologies AG, International Business Machines CorporationInventors: Thomas W. Dyer, Andreas Knorr, Laertis Economikos, Scott Halle, Rajeev Malik, Norbert Arnold
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Publication number: 20040238868Abstract: A memory cell is formed in a memory cell array comprised of a plurality of memory cells arranged in rows and columns. A deep trench structure is formed within a semiconductor substrate and includes at least one conducting region. A patterned bit line structure is formed atop of, and electrically isolated from, the insulating region of the deep trench structure and atop of, but contacting at least part of, regions of the semiconductor substrate. Exposed portions of the semiconductor substrate are etched to form at least one isolation trench adjoining the deep trench structure using the patterned bit line structure as an etch mask. The isolation trench is filled with a dielectric material. A contact region to the conducting region of the deep trench structure is formed within the dielectric material of the isolation trench and is electrically isolated from the bit line structure.Type: ApplicationFiled: May 28, 2003Publication date: December 2, 2004Applicant: Infineon Technologies North America Corp.Inventors: Norbert Arnold, Venkatachalam C. Jaiprakash
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Publication number: 20040029346Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.Type: ApplicationFiled: July 11, 2003Publication date: February 12, 2004Inventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold
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Patent number: 6621112Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.Type: GrantFiled: December 6, 2000Date of Patent: September 16, 2003Assignee: Infineon Technologies AGInventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold
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Publication number: 20020090824Abstract: A method for fabricating a buried strap forms a dielectric collar along sidewalls of a trench. The trench is formed in a substrate. The trench is filled with a conductive material and the conductive material is recessed in the trench to expose a portion of the collar. A masking layer is deposited in the trench over the exposed portion of the collar. A portion of the masking layer is removed over one side of the collar and a portion of the collar is etched on the one side. A buried strap is formed on the conductive material, which connects to the substrate on the one side.Type: ApplicationFiled: January 8, 2001Publication date: July 11, 2002Inventors: V.C. Jaiprakash, Norbert Arnold
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Publication number: 20020066917Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.Type: ApplicationFiled: December 6, 2000Publication date: June 6, 2002Inventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold