Patents by Inventor Norbert Arnold

Norbert Arnold has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180228825
    Abstract: The invention relates to the use of a compound of formula (I), or a composition containing the compound, as glutaminyl cyclase (QC) inhibitor and to methods of preparation.
    Type: Application
    Filed: September 15, 2016
    Publication date: August 16, 2018
    Applicants: Hochschule Anhalt, Leibniz-Institut Für Pflanzenbiochemie (IPB)
    Inventors: Stephanie Hielscher-Michael, Carola Griehl, Hans-Ulrich Demuth, Stephan Schilling, Ludger Wessjohann, Norbert Arnold
  • Patent number: 9490257
    Abstract: After forming a recessed conductive material portion over a deep trench capacitor located in a lower portion of a deep trench embedded in a substrate, a hard mask layer is formed over a top semiconductor layer of the substrate and the recessed conductive material portion such that the hard mask layer completely fills the deep trench. Next, the hard mask layer, the top semiconductor layer and the recessed conductive material portion are patterned to form a laterally contacting pair of a semiconductor fin and a conductive strap structure over the deep trench capacitor as well as a dielectric cap embedded in the deep trench. The dielectric cap vertically contacts a lower portion of the conductive strap structure and laterally surrounds a portion of an upper portion of the conductive strap structure that is not in contact with the semiconductor fin.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: November 8, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Norbert Arnold
  • Publication number: 20160181252
    Abstract: After forming a recessed conductive material portion over a deep trench capacitor located in a lower portion of a deep trench embedded in a substrate, a hard mask layer is formed over a top semiconductor layer of the substrate and the recessed conductive material portion such that the hard mask layer completely fills the deep trench. Next, the hard mask layer, the top semiconductor layer and the recessed conductive material portion are patterned to form a laterally contacting pair of a semiconductor fin and a conductive strap structure over the deep trench capacitor as well as a dielectric cap embedded in the deep trench. The dielectric cap vertically contacts a lower portion of the conductive strap structure and laterally surrounds a portion of an upper portion of the conductive strap structure that is not in contact with the semiconductor fin.
    Type: Application
    Filed: December 18, 2014
    Publication date: June 23, 2016
    Applicant: GLOBALFOUNDRIES INC.
    Inventor: Norbert Arnold
  • Patent number: 9293382
    Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.
    Type: Grant
    Filed: October 24, 2014
    Date of Patent: March 22, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
  • Publication number: 20150041809
    Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.
    Type: Application
    Filed: October 24, 2014
    Publication date: February 12, 2015
    Inventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
  • Patent number: 8927989
    Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: January 6, 2015
    Assignee: International Business Machines Corporation
    Inventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
  • Publication number: 20140145191
    Abstract: A method including forming a first test structure and a second test structure in electrical contact with an inner buried plate and an outer buried plate, respectively, where the first and second test structures each comprise a deep trench filled with a conductive material, and measuring the voltage of the inner buried plate and the outer buried plate immediately after the formation of a deep trench isolation structure, where the inner buried plate and the outer buried plate are positioned on opposite sides of the deep trench isolation structure.
    Type: Application
    Filed: November 28, 2012
    Publication date: May 29, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Norbert Arnold, Jin Liu, Brian W. Messenger, Oliver D. Patterson
  • Patent number: 8648115
    Abstract: The present invention relates to the use of compounds of general formula (I) or of a salt thereof as anti-oomycetes and to a method for combating plant pathogens using said compounds.
    Type: Grant
    Filed: May 26, 2010
    Date of Patent: February 11, 2014
    Assignees: BASF SE, Leibniz-Institute Fuer Pflanzenbiochemie
    Inventors: Norbert Arnold, Axel Teichert, Sabine Rosahl, Bernhard Westermann, Ludger Wessjohann, Lennart Eschen-Lippold, Tobias Draeger
  • Publication number: 20120129938
    Abstract: The present invention relates to the use of compounds of general formula (I) or of a salt thereof as anti-oomycetes and to a method for combating plant pathogens using said compounds.
    Type: Application
    Filed: May 26, 2010
    Publication date: May 24, 2012
    Inventors: Norbert Arnold, Axel Teichert, Sabine Rosahl, Bernhard Westermann, Ludger Wessjohann, Lennart Eschen-Lippold, Tobias Draeger
  • Patent number: 7015092
    Abstract: Methods and devices that provide improved isolation and alignment of gate conductors or gate contacts of vertical transistors in deep trench memory cells. A method for forming a vertical gate contact of a vertical transistor includes an oxide spacer formation process that prevents defects, such as shorts caused by voids filled with polysilicon, resulting from etching processes that are performed during fabrication of a vertical transistor, and enables formation of well-defined contact plugs for gate contacts, providing improved alignment structures.
    Type: Grant
    Filed: December 18, 2003
    Date of Patent: March 21, 2006
    Assignee: Infineon Technologies North America Corp.
    Inventors: Venkatachalam C. Jaiprakash, Norbert Arnold
  • Patent number: 7015145
    Abstract: A method for fabricating a buried strap forms a dielectric collar along sidewalls of a trench. The trench is formed in a substrate. The trench is filled with a conductive material and the conductive material is recessed in the trench to expose a portion of the collar. A masking layer is deposited in the trench over the exposed portion of the collar. A portion of the masking layer is removed over one side of the collar and a portion of the collar is etched on the one side. A buried strap is formed on the conductive material, which connects to the substrate on the one side.
    Type: Grant
    Filed: January 8, 2001
    Date of Patent: March 21, 2006
    Assignee: Infineon Technologies AG
    Inventors: Venkatachalam C. Jaiprakash, Norbert Arnold
  • Publication number: 20050136631
    Abstract: Methods and devices that provide improved isolation and alignment of gate conductors or gate contacts of vertical transistors in deep trench memory cells. A method for forming a vertical gate contact of a vertical transistor includes an oxide spacer formation process that prevents defects, such as shorts caused by voids filled with polysilicon, resulting from etching processes that are performed during fabrication of a vertical transistor, and enables formation of well-defined contact plugs for gate contacts, providing improved alignment structures.
    Type: Application
    Filed: December 18, 2003
    Publication date: June 23, 2005
    Inventors: Venkatachalam Jaiprakash, Norbert Arnold
  • Patent number: 6884676
    Abstract: A memory cell is formed in a memory cell array comprised of a plurality of memory cells arranged in rows and columns. A deep trench structure is formed within a semiconductor substrate and includes at least one conducting region. A patterned bit line structure is formed atop of, and electrically isolated from, the insulating region of the deep trench structure and atop of, but contacting at least part of, regions of the semiconductor substrate. Exposed portions of the semiconductor substrate are etched to form at least one isolation trench adjoining the deep trench structure using the patterned bit line structure as an etch mask. The isolation trench is filled with a dielectric material. A contact region to the conducting region of the deep trench structure is formed within the dielectric material of the isolation trench and is electrically isolated from the bit line structure.
    Type: Grant
    Filed: May 28, 2003
    Date of Patent: April 26, 2005
    Assignee: Infineon Technologies AG
    Inventors: Norbert Arnold, Venkatachalam C. Jaiprakash
  • Patent number: 6849496
    Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.
    Type: Grant
    Filed: July 11, 2003
    Date of Patent: February 1, 2005
    Assignee: Infineon Technologies AG
    Inventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold
  • Publication number: 20040256651
    Abstract: A Top Oxide Method is used to form an oxide layer over an array of vertical transistors as in a trench dynamic random access memory (DRAM) array with vertically stacked access metal oxide semiconductor field effect transistors (MOSFETs). The Top Oxide is formed by first forming the vertical devices with the pad nitride remaining in place. Once the devices have been formed and the gate polysilicon has been planarized down to the surface of the pad nitride, the pad nitride is stripped away leaving the tops of the gate polysilicon plugs extending above the active silicon surface. This pattern of polysilicon plugs defines the pattern over which the Top Oxide is deposited. The deposited Top Oxide fills the regions between and on top of the polysilicon plugs. The Top Oxide is then planarized back to the tops of the polysilicon plugs so contacts can be made between the passing interconnects and the gates of the vertical devices.
    Type: Application
    Filed: July 22, 2004
    Publication date: December 23, 2004
    Applicants: Infineon Technologies AG, International Business Machines Corporation
    Inventors: Thomas W. Dyer, Andreas Knorr, Laertis Economikos, Scott Halle, Rajeev Malik, Norbert Arnold
  • Publication number: 20040238868
    Abstract: A memory cell is formed in a memory cell array comprised of a plurality of memory cells arranged in rows and columns. A deep trench structure is formed within a semiconductor substrate and includes at least one conducting region. A patterned bit line structure is formed atop of, and electrically isolated from, the insulating region of the deep trench structure and atop of, but contacting at least part of, regions of the semiconductor substrate. Exposed portions of the semiconductor substrate are etched to form at least one isolation trench adjoining the deep trench structure using the patterned bit line structure as an etch mask. The isolation trench is filled with a dielectric material. A contact region to the conducting region of the deep trench structure is formed within the dielectric material of the isolation trench and is electrically isolated from the bit line structure.
    Type: Application
    Filed: May 28, 2003
    Publication date: December 2, 2004
    Applicant: Infineon Technologies North America Corp.
    Inventors: Norbert Arnold, Venkatachalam C. Jaiprakash
  • Publication number: 20040029346
    Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.
    Type: Application
    Filed: July 11, 2003
    Publication date: February 12, 2004
    Inventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold
  • Patent number: 6621112
    Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.
    Type: Grant
    Filed: December 6, 2000
    Date of Patent: September 16, 2003
    Assignee: Infineon Technologies AG
    Inventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold
  • Publication number: 20020090824
    Abstract: A method for fabricating a buried strap forms a dielectric collar along sidewalls of a trench. The trench is formed in a substrate. The trench is filled with a conductive material and the conductive material is recessed in the trench to expose a portion of the collar. A masking layer is deposited in the trench over the exposed portion of the collar. A portion of the masking layer is removed over one side of the collar and a portion of the collar is etched on the one side. A buried strap is formed on the conductive material, which connects to the substrate on the one side.
    Type: Application
    Filed: January 8, 2001
    Publication date: July 11, 2002
    Inventors: V.C. Jaiprakash, Norbert Arnold
  • Publication number: 20020066917
    Abstract: A semiconductor Dynamic Random Access Memory (DRAM) cell is fabricated using a vertical access transistor and a storage capacitor formed in a vertical trench. A Shallow Trench Isolation (STI) region is used as a masking region to confine the channel region of the access transistor, the first and second output regions of the access transistor, and a strap region connecting the second output region to the storage capacitor, to a narrow portion of the trench. The so confined second output region of the access transistor has reduced leakage to similar second output regions of adjacent memory cells. Adjacent memory cells can then be placed closer to one another without an increase in leakage and cross-talk between adjacent memory cells.
    Type: Application
    Filed: December 6, 2000
    Publication date: June 6, 2002
    Inventors: Venkatachalam C. Jaiprakash, Mihel Seitz, Norbert Arnold