Patents by Inventor Norbert Hubig

Norbert Hubig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for holding measurement instruments
    Patent number: 7126692
    Abstract: A device for holding measurement instruments (2), in particular interferometers, is formed from a plurality of structure elements (4, 5, 6, 7) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion ?. The structure elements (4) on which the measurement instruments (2) are arranged are secured between at least two structure side parts (5) in such a way that the thermal expansions of the structure side parts (5) and of the connections (3) have no effect in the measurement direction of the measurement instruments (2).
    Type: Grant
    Filed: December 15, 2003
    Date of Patent: October 24, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Guenter Maul, Norbert Hubig
  • Device for holding measurement instruments
    Publication number: 20040146336
    Abstract: A device for holding measurement instruments (2), in particular interferometers, is formed from a plurality of structure elements (4, 5, 6, 7) connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion &agr;. The structure elements (4) on which the measurement instruments (2) are arranged are secured between at least two structure side parts (5) in such a way that the thermal expansions of the structure side parts (5) and of the connections (3) have no effect in the measurement direction of the measurement instruments (2).
    Type: Application
    Filed: December 15, 2003
    Publication date: July 29, 2004
    Applicant: Carl Zeiss SMT AG
    Inventors: Guenter Maul, Norbert Hubig