Patents by Inventor Norbert Kappel

Norbert Kappel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Side alignment mark
    Patent number: 6534159
    Abstract: An apparatus in accordance with this invention includes an alignment mark that is formed in a substrate. The alignment mark extends across a dice line so that, upon dicing the substrate, the mark is exposed in the substrate's side edge. The mark is formed at a predetermined distance from a position at which a feature is desired to be formed on the substrate's side edge using a mask. Accordingly, the mark is a positional reference that can be used for highly accurate placement of the feature on the side surface of the substrate with the mask. Preferably, the mark is formed of metal or other material enhanced to a size that is readily detectable by an alignment system with which the mark is to be used. The invention also includes methods for making the alignment mark.
    Type: Grant
    Filed: September 10, 1999
    Date of Patent: March 18, 2003
    Assignee: Ultratech Stepper, Inc.
    Inventors: Thomas H Newman, Norbert Kappel
  • Method of making a side alignment mark
    Patent number: 5956564
    Abstract: An apparatus in accordance with this invention includes an alignment mark that is formed in a substrate. The alignment mark extends across a dice line so that, upon dicing the substrate, the mark is exposed in the substrate's side edge. The mark is formed at a predetermined distance from a position at which a feature is desired to be formed on the substrate's side edge using a mask. Accordingly, the mark is a positional reference that can be used for highly accurate placement of the feature on the side surface of the substrate with the mask. Preferably, the mark is formed of metal or other material enhanced to a size that is readily detectable by an alignment system with which the mark is to be used. The invention also includes methods for making the alignment mark.
    Type: Grant
    Filed: June 3, 1997
    Date of Patent: September 21, 1999
    Assignee: Ultratech Stepper, Inc.
    Inventors: Thomas H Newman, Norbert Kappel