Patents by Inventor Norbert Lenck

Norbert Lenck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for cleaning in particular of disc-shaped oxide substrates
    Patent number: 4960141
    Abstract: A method and a device for cleaning in particular of oxide substrates is proposed, the substrates being extracted from a quantity of extremely pure water after pre-cleaning. The temperature of the substrate and the extraction velocity from the water are so selected that a water film extending from the water surface runs off evenly.
    Type: Grant
    Filed: September 27, 1988
    Date of Patent: October 2, 1990
    Assignee: Nukem GmbH
    Inventors: Norbert Lenck, Jorg Worner