Patents by Inventor Norbertus Koster

Norbertus Koster has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional body
    Publication number: 20070143032
    Abstract: There is provided an apparatus that includes a film that undergoes a chemical reaction when exposed to a species. The chemical reaction causes an alteration of a physical property of the film as an indicator of the species.
    Type: Application
    Filed: September 15, 2006
    Publication date: June 21, 2007
    Inventors: Fokko Wieringa, Norbertus Koster, Roland Van Vliet, Marco Wedowski, Nadyeh Shariloo, Thomas Stein
  • Lithographic projection apparatus, device manufacturing method and device manufactured thereby
    Publication number: 20050112508
    Abstract: In-situ cleaning of optical components for use in a lithographic projection apparatus can be carried out by irradiating a space within the apparatus containing the optical component with UV or EUV radiation having a wavelength of less than 250 nm, in the presence of molecular oxygen. Generally, the space will be purged with an ozoneless purge gas which contains a small amount of molecular oxygen in addition to the usual purge gas composition. The technique can also be used in an evacuated space by introducing a low pressure of molecular oxygen into the space.
    Type: Application
    Filed: October 27, 2004
    Publication date: May 26, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Willem Van Schaik, Bastiaan Mertens, Hans Meiling, Norbertus Koster