Abstract: A semiconductor device includes a semiconductor substrate; a first insulating film and a second insulating film provided above the semiconductor substrate; a low-k film provided between the first insulating film and the second insulating film; an element formation region in which elements included in an electric circuit are formed in the semiconductor substrate; a scribe region provided around the element formation region; a cut portion provided on the outer periphery of the scribe region; and a groove formed between the cut portion and the element formation region, wherein the groove penetrates through the low-k film.

Abstract: An apparatus comprising a multilevel wiring structure comprising aluminum interconnections. The aluminum interconnections comprise a first portion, a second portion, and a third portion, where the second portion is between the first portion and the third portion. The third portion comprises a greater width in a lateral direction than a width in the lateral direction of the second portion. A memory device comprising a memory array comprising memory cells and a control logic component electrically connected to the memory array. At least one of the memory cells comprises a multilevel wiring structure comprising interconnect structures, where the interconnect structures comprise a first portion, a second portion adjacent to the first portion, and a third portion adjacent to the second portion. The third portion comprises a greater width in a lateral direction than a width in the lateral direction of the second portion. Related apparatus, memory devices, and methods are also disclosed.

Abstract: According to one or more embodiments, a method of manufacturing a semiconductor device including a plurality of main circuit regions arranged in a matrix and a scribe region provided between the main circuit regions is provided. The method includes: forming a first insulating film; forming a low-k film; forming a plurality of penetrating portions penetrating through the low-k film; and forming a second insulating film under low-coverage film-forming conditions to form cavities in the plurality of through-holes.

Abstract: A semiconductor device includes a main circuit region; and a scribe region surrounding the main circuit region; wherein the main circuit region and the scribe region comprises first and second insulating films and a low-k film formed therebetween; and wherein the low-k film of the scribe region includes a plurality of cavities lining along a border between the main circuit region and the scribe region.

Abstract: A semiconductor device includes a semiconductor substrate; a first insulating film and a second insulating film provided above the semiconductor substrate; a low-k film provided between the first insulating film and the second insulating film; an element formation region in which elements included in an electric circuit are formed in the semiconductor substrate; a scribe region provided around the element formation region; a cut portion provided on the outer periphery of the scribe region; and a groove formed between the cut portion and the element formation region, wherein the groove penetrates through the low-k film.

Abstract: A semiconductor device includes a main circuit region; and a scribe region surrounding the main circuit region; wherein the main circuit region and the scribe region comprises first and second insulating films and a low-k film formed therebetween; and wherein the low-k film of the scribe region includes a plurality of cavities lining along a border between. the main circuit region and the scribe region.

Abstract: An apparatus comprising a multilevel wiring structure comprising aluminum interconnections. The aluminum interconnections comprise a first portion, a second portion, and a third portion, where the second portion is between the first portion and the third portion. The third portion comprises a greater width in a lateral direction than a width in the lateral direction of the second portion. A memory device comprising a memory array comprising memory cells and a control logic component electrically connected to the memory array. At least one of the memory cells comprises a multilevel wiring structure comprising interconnect structures, where the interconnect structures comprise a first portion, a second portion adjacent to the first portion, and a third portion adjacent to the second portion. The third portion comprises a greater width in a lateral direction than a width in the lateral direction of the second portion. Related apparatus, memory devices, and methods are also disclosed.

Abstract: A vehicle stop position setting apparatus is provided which includes a target route calculator (102) configured to calculate a target route for a subject vehicle and a vehicle stop position detector (101) configured to detect a vehicle stop position in a particular situation. The vehicle stop position is present on the target route calculated by the target route calculator (102). The vehicle stop position setting apparatus further includes a vehicle stop position setting unit (103) configured to, when the vehicle stop position in the particular situation is detected by the vehicle stop position detector (101), set a target vehicle stop position for the subject vehicle to be in a vehicle attitude that conforms to the particular situation.

Abstract: A drive planning processor plans a driving operation plan for a subject vehicle traveling on a route. The drive planning processor determines an action for each of a plurality of events which the subject vehicle encounters in a time-series manner when traveling on a first route and plans a series of driving operation plan for a scene which the subject vehicle encounters using content of each action determined for each of the plurality of events.

Abstract: A determination processor, when determining a driving action of a subject vehicle traveling on a route, determines a scene which the subject vehicle encounters. The determination processor extracts a plurality of events which the subject vehicle encounters when traveling on a first route, and rearranges the extracted plurality of events in the order of encounters with the subject vehicle.

Abstract: A determination processor, when determining a driving action of a subject vehicle traveling on a route, determines a scene which the subject vehicle encounters. The determination processor extracts a plurality of events which the subject vehicle encounters when traveling on a first route, and rearranges the extracted plurality of events in the order of encounters with the subject vehicle.

Abstract: A drive planning processor plans a driving operation plan for a subject vehicle traveling on a route. The drive planning processor determines an action for each of a plurality of events which the subject vehicle encounters in a time-series manner when traveling on a first route and plans a series of driving operation plan for a scene which the subject vehicle encounters using content of each action determined for each of the plurality of events.

Abstract: A vehicle stop position setting apparatus is provided which includes a target route calculator (102) configured to calculate a target route for a subject vehicle and a vehicle stop position detector (101) configured to detect a vehicle stop position in a particular situation. The vehicle stop position is present on the target route calculated by the target route calculator (102). The vehicle stop position setting apparatus further includes a vehicle stop position setting unit (103) configured to, when the vehicle stop position in the particular situation is detected by the vehicle stop position detector (101), set a target vehicle stop position for the subject vehicle to be in a vehicle attitude that conforms to the particular situation.

Abstract: A vehicle braking control device includes a control unit that, when a characteristic representing the relationship between an estimated amount of fluid consumed by braking, which is estimated based on the amount a brake pedal is operated, and an actual master-cylinder pressure detected by a master-cylinder pressure detection unit is different from that of a preset characteristic in a reference map indicating representing the relationship between the amount of fluid consumed by braking and the master cylinder pressure, corrects a target value of a degree of relative displacement between an input member and an assist member by a target relative displacement-amount correction unit in a direction in which the difference between characteristics is reduced.

Abstract: A vehicle brake control system includes a regenerative braking control component, a frictional braking control component, a calculating component and a controlling component. The regenerative braking control component controls a regenerative braking device to provide a regenerative braking torque. The frictional braking control component controls a frictional braking device to provide a frictional braking torque. The calculating component calculates a regenerative braking torque filter processing value based on a fluctuation frequency of the regenerative braking torque. The controlling component, during a first condition, operates a motorized power assist control device based on the regenerative braking torque filter processing value, instead of the regenerative braking torque, to moderate the frictional braking torque, such that the regenerative braking torque and the moderated frictional braking torque provide a target braking torque based on a braking operation.

Abstract: A vehicle braking control device includes a control unit that, when a characteristic representing the relationship between an estimated amount of fluid consumed by braking, which is estimated based on the amount a brake pedal is operated, and an actual master-cylinder pressure detected by a master-cylinder pressure detection unit is different from that of a preset characteristic in a reference map indicating representing the relationship between the amount of fluid consumed by braking and the master cylinder pressure, corrects a target value of a degree of relative displacement between an input member and an assist member by a target relative displacement-amount correction unit in a direction in which the difference between characteristics is reduced.

Abstract: A vehicle brake control system has a braking detector and a braking controller. The braking detector determines whether a braking operation in a vehicle is within an initial braking stage based on a control condition of a frictional braking system. The braking controller performs initial braking stage control during the initial braking stage by controlling a regenerative braking system to provide a limited braking torque and the frictional braking system to provide a supplemental braking torque, the combination of which provides a target braking torque. The braking controller performs subsequent braking control when the initial braking stage ends to provide an increased regenerative braking torque and a lower supplemental braking torque as the target braking torque.

Abstract: A vehicle brake control system includes a regenerative braking control component, a frictional braking control component, a calculating component and a controlling component. The regenerative braking control component controls a regenerative braking device to provide a regenerative braking torque. The frictional braking control component controls a frictional braking device to provide a frictional braking torque. The calculating component calculates a regenerative braking torque filter processing value based on a fluctuation frequency of the regenerative braking torque. The controlling component, during a first condition, operates a motorized power assist control device based on the regenerative braking torque filter processing value, instead of the regenerative braking torque, to moderate the frictional braking torque, such that the regenerative braking torque and the moderated frictional braking torque provide a target braking torque based on a braking operation.

Abstract: A vehicle brake control system has a braking detector and a braking controller. The braking detector determines whether a braking operation in a vehicle is within an initial braking stage based on a control condition of a frictional braking system. The braking controller performs initial braking stage control during the initial braking stage by controlling a regenerative braking system to provide a limited braking torque and the frictional braking system to provide a supplemental braking torque, the combination of which provides a target braking torque. The braking controller performs subsequent braking control when the initial braking stage ends to provide an increased regenerative braking torque and a lower supplemental braking torque as the target braking torque.

Abstract: A semiconductor device includes a lower-layer substrate, a fuse above the lower-layer substrate and blown by radiation with light, a silicon oxide film on the fuse and on an exposed portion of the surface of the lower-layer substrate, and a silicon nitride film on the silicon oxide film. The portion of the silicon oxide film on the surface of the lower-layer substrate is thicker than the fuse, and the silicon oxide film has an opening opposite the fuse.