Patents by Inventor Noriaki Koyama
Noriaki Koyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11822319Abstract: A semiconductor system shares information on a semiconductor manufacturing apparatus between first and second semiconductor manufacturing apparatuses through direct communication. The first semiconductor manufacturing apparatus includes a first acquisition unit acquiring first information on the first semiconductor manufacturing apparatus, a first storage unit storing the acquired first information, and a first communication unit sending the stored first information to the second semiconductor manufacturing apparatus.Type: GrantFiled: September 9, 2020Date of Patent: November 21, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Noriaki Koyama, Kazushi Shoji, Motokatsu Miyazaki
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Publication number: 20230196247Abstract: A communication apparatus includes a business data storage unit which stores business data representative of a conducting history; an attribute imparting unit which generates attribute data representative of a conducting condition of the business in the first company; an attribute data storage unit which stores the attribute data corresponding to the first company; an attribute data disclosing unit which discloses the attribute data to a second company; an improvement proposal input unit which inputs therein information relating to an improvement proposal of the business for the first company; an improvement proposal disclosing unit which discloses the information relating to the improvement proposal to the first company; an improvement proposal acceptance receiver which receives a response of acceptance of the improvement proposal from the first company; and a proposal target disclosing unit which discloses information relating to the first company to the second company.Type: ApplicationFiled: February 13, 2023Publication date: June 22, 2023Applicants: KABUSHIKI KAISHA TOSHIBA, Toshiba Digital Solutions CorporationInventors: Masaru SUZUKI, Noriaki KOYAMA, Go FUJINO, Yoshimasa NIRASAWA, Yoshikata TOBITA, Hidekazu MIYAKE, Satoshi SONOH, Kentaro FURIHATA
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Patent number: 11567485Abstract: A substrate processing system includes: an acquiring unit configured to acquire process data of each step when each step included in a predetermined process is executed under different control conditions; an extracting unit configured to divide each step into a first section in which the process data fluctuates and a second section in which the process data is converged, and extract first data belonging to the first section and second data belonging to the second section from the process data; and a monitoring unit configured to monitor the process data by comparing one or both of an evaluation value that evaluates the first data and an evaluation value that evaluates the second data with corresponding upper and lower limit values.Type: GrantFiled: July 2, 2020Date of Patent: January 31, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Nobutoshi Terasawa, Noriaki Koyama, Tomonori Yamashita, Takazumi Tanaka, Takehiro Kinoshita, Fumiaki Nagai, Eiji Kikama
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Publication number: 20210043459Abstract: A semiconductor system shares information on a semiconductor manufacturing apparatus between first and second semiconductor manufacturing apparatuses through direct communication. The first semiconductor manufacturing apparatus includes a first acquisition unit acquiring first information on the first semiconductor manufacturing apparatus, a first storage unit storing the acquired first information, and a first communication unit sending the stored first information to the second semiconductor manufacturing apparatus.Type: ApplicationFiled: September 9, 2020Publication date: February 11, 2021Inventors: Noriaki Koyama, Kazushi Shoji, Motokatsu Miyazaki
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Publication number: 20210011468Abstract: A substrate processing system includes: an acquiring unit configured to acquire process data of each step when each step included in a predetermined process is executed under different control conditions; an extracting unit configured to divide each step into a first section in which the process data fluctuates and a second section in which the process data is converged, and extract first data belonging to the first section and second data belonging to the second section from the process data; and a monitoring unit configured to monitor the process data by comparing one or both of an evaluation value that evaluates the first data and an evaluation value that evaluates the second data with corresponding upper and lower limit values.Type: ApplicationFiled: July 2, 2020Publication date: January 14, 2021Inventors: Nobutoshi TERASAWA, Noriaki KOYAMA, Tomonori YAMASHITA, Takazumi TANAKA, Takehiro KINOSHITA, Fumiaki NAGAI, Eiji KIKAMA
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Patent number: 10734291Abstract: Disclosed is an abnormality detection apparatus including: a collection unit that collects state information indicating a state of each part of a semiconductor manufacturing apparatus in a predetermined cycle; a storage unit that stores the state information collected by the collection unit as a log for each predetermined unit; an arithmetic unit that generates a monitoring band for monitoring the state of each part of the semiconductor manufacturing apparatus, based on the log; and a determination unit that determines whether the state of each part of the semiconductor manufacturing apparatus is abnormal, based on the state information and the monitoring band.Type: GrantFiled: November 1, 2017Date of Patent: August 4, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Noriaki Koyama, Kazushi Shoji, Motokatsu Miyazaki
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Patent number: 10199386Abstract: According to one embodiment, a semiconductor memory device includes a substrate; a first stacked body; a second stacked body being larger in number of stacked layers than the first stacked body, the second stacked body including a plurality of electrode layers separately stacked each other; a third stacked body being smaller in number of stacked layers than the first stacked body. The first stacked body includes a plurality of first layers separately stacked each other, and a plurality of second layers provided between the first layers. The third stacked body includes a third layer including a same material as the material of the first layers, and a fourth layer including a same material as the material of the second layers.Type: GrantFiled: February 22, 2016Date of Patent: February 5, 2019Assignee: TOSHIBA MEMORY CORPORATIONInventors: Takashi Terada, Hisashi Kato, Noriaki Koyama
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Publication number: 20180138096Abstract: Disclosed is an abnormality detection apparatus including: a collection unit that collects state information indicating a state of each part of a semiconductor manufacturing apparatus in a predetermined cycle; a storage unit that stores the state information collected by the collection unit as a log for each predetermined unit; an arithmetic unit that generates a monitoring band for monitoring the state of each part of the semiconductor manufacturing apparatus, based on the log; and a determination unit that determines whether the state of each part of the semiconductor manufacturing apparatus is abnormal, based on the state information and the monitoring band.Type: ApplicationFiled: November 1, 2017Publication date: May 17, 2018Inventors: Noriaki Koyama, Kazushi Shoji, Motokatsu Miyazaki
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Publication number: 20180040484Abstract: A semiconductor system shares information on a semiconductor manufacturing apparatus between first and second semiconductor manufacturing apparatuses through direct communication. The first semiconductor manufacturing apparatus includes a first acquisition unit acquiring first information on the first semiconductor manufacturing apparatus, a first storage unit storing the acquired first information, and a first communication unit sending the stored first information to the second semiconductor manufacturing apparatus.Type: ApplicationFiled: July 28, 2017Publication date: February 8, 2018Inventors: Noriaki Koyama, Kazushi Shoji, Motokatsu Miyazaki
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Patent number: 9703284Abstract: There is provided a group management system including one or more manufacturing devices and one or more server devices. Each of the manufacturing devices includes a manufacturing device display unit configured to display information on the specified process, an acquiring unit configured to acquire information of respective parts of each of the manufacturing devices and an acquired information transmitting unit configured to transmit the acquired information to the server devices. Each of the server devices includes a storage unit configured to store the information transmitted from the acquired information transmitting unit, an analysis unit configured to analyze the stored information and a server device display unit configured to display the stored information and the analyzed information. Each of the manufacturing devices further includes a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit.Type: GrantFiled: August 8, 2014Date of Patent: July 11, 2017Assignee: TOKYO ELECTRON LIMITEDInventor: Noriaki Koyama
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Publication number: 20170025423Abstract: According to one embodiment, a semiconductor memory device includes a substrate; a first stacked body; a second stacked body being larger in number of stacked layers than the first stacked body, the second stacked body including a plurality of electrode layers separately stacked each other; a third stacked body being smaller in number of stacked layers than the first stacked body. The first stacked body includes a plurality of first layers separately stacked each other, and a plurality of second layers provided between the first layers. The third stacked body includes a third layer including a same material as the material of the first layers, and a fourth layer including a same material as the material of the second layers.Type: ApplicationFiled: February 22, 2016Publication date: January 26, 2017Applicant: Kabushiki Kaisha ToshibaInventors: Takashi TERADA, Hisashi Kato, Noriaki Koyama
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Publication number: 20150045942Abstract: There is provided a group management system including one or more manufacturing devices and one or more server devices. Each of the manufacturing devices includes a manufacturing device display unit configured to display information on the specified process, an acquiring unit configured to acquire information of respective parts of each of the manufacturing devices and an acquired information transmitting unit configured to transmit the acquired information to the server devices. Each of the server devices includes a storage unit configured to store the information transmitted from the acquired information transmitting unit, an analysis unit configured to analyze the stored information and a server device display unit configured to display the stored information and the analyzed information. Each of the manufacturing devices further includes a remote operation function unit configured to directly operate the server device display unit from the manufacturing device display unit.Type: ApplicationFiled: August 8, 2014Publication date: February 12, 2015Inventor: Noriaki KOYAMA
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Publication number: 20140096007Abstract: According to one embodiment, an information processing apparatus includes an image storing processor, a slide show transmitter and a comment receiver. The image storing processor receives an image from clients and stores first images including the received image. The slide show transmitter generates a slide show including second images of the first images and transmits the slide show including the second images in a first order to a first client. The comment receiver receives from the first client comments associated with images of the second images. The slide show transmitter alters the slide show such that the slide show includes the second images in a second order based on the comments and transmits the altered slide show to a second client.Type: ApplicationFiled: July 5, 2013Publication date: April 3, 2014Inventors: Ryunosuke Itoh, Isao Kiji, Tetsuya Gotou, Chizuko Shimamura, Katsunori Yokode, Takashi Harada, Noriaki Koyama
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Patent number: 8355808Abstract: It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing unType: GrantFiled: April 24, 2007Date of Patent: January 15, 2013Assignee: Tokyo Electron LimitedInventors: Takumi Inokawa, Noriaki Koyama
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Patent number: 8327398Abstract: A data distribution apparatus includes a data file configured to store video data and advertisement data to be provided to a receiving terminal of a Video on Demand service; a video distributing unit configured to distribute video data in accordance with a distribution request from the receiving terminal; a video presentation confirming unit configured to confirm a presentation state of the video data at the receiving terminal; an advertisement distribution determining unit configured to determine distribution of advertisement data to the receiving terminal when it is confirmed that the video data to be distributed by the video distributing unit is being called; and an advertisement distributing unit configured to distribute the advertisement data.Type: GrantFiled: September 21, 2006Date of Patent: December 4, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Miwako Doi, Tetsuro Muranaga, Noriaki Koyama, Tetsuya Gotou, Hideki Tsutsui
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Publication number: 20120169505Abstract: A life estimating method for a heater wire utilizes data obtained during a period (e.g., a temperature rising period), in which a sign of disconnection of the heater wire is likely to be seen. This method includes detecting a maximum magnitude value of electric power supplied to the heater wire during the temperature rising period for elevating the temperature to a heating temperature prior to providing a heating process to a wafer or wafers. The method further includes obtaining an index indicative of a magnitude of the amplitude of the electric power, and giving notice that the heater wire is approaching the end of its life when the indexes respectively indicate that the electric power magnitude and the amplitude magnitude exceed threshold values respectively.Type: ApplicationFiled: January 13, 2012Publication date: July 5, 2012Applicant: TOKYO ELECTRON LIMITEDInventors: Nobutoshi TERASAWA, Minoru Obata, Noriaki Koyama
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Patent number: 8190283Abstract: A server device includes: an abnormality information output unit for storing a plurality of measurement information, which is time sequential information related to information measured in a plurality of manufacturing apparatuses, having manufacturing apparatus identifiers and time information, and storing at least one set of abnormality information indicating an abnormality and one or more measurement information, and outputting one or more abnormality information; a chart composing unit for composing one or more charts from one or more measurement information in pair with one or more abnormality information corresponding to an abnormality information instruction when the instruction, which is an instruction for one or more abnormality information among the one or more abnormality information outputted by the abnormality information output unit, is received; and an output unit for outputting the one or more charts composed by the chart composing unit, so that abnormality analysis can be carried out easily anType: GrantFiled: April 24, 2007Date of Patent: May 29, 2012Assignee: Tokyo Electron LimitedInventors: Takumi Inokawa, Noriaki Koyama
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Patent number: 8121799Abstract: A method of estimating the life of a heater wire, including the steps of: detecting a maximum value of electric power supplied to the heater wire during a temperature rising period during which a temperature is elevated to a preset heating temperature, obtaining an index indicative of the amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the electric power and the index indicative of the of amplitude of the electric power exceed threshold values respectively provided thereto.Type: GrantFiled: April 15, 2008Date of Patent: February 21, 2012Assignee: Tokyo Electron LimitedInventors: Nobutoshi Terasawa, Minoru Obata, Noriaki Koyama
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Patent number: 8055391Abstract: A server device constituting a group management system includes one or more manufacturing apparatuses for performing a preset process on a target substrate, and the server device includes a measurement information storage unit for storing therein one or more measurement information; an instruction receiving unit for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.Type: GrantFiled: July 9, 2007Date of Patent: November 8, 2011Assignee: Tokyo Electron LimitedInventors: Masashi Takahashi, Minoru Obata, Noriaki Koyama
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Patent number: 7974729Abstract: A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.Type: GrantFiled: July 9, 2007Date of Patent: July 5, 2011Assignee: Tokyo Electron LimitedInventors: Masashi Takahashi, Minoru Obata, Noriaki Koyama