Patents by Inventor Noriaki Sugita
Noriaki Sugita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240052202Abstract: A polishing composition is provided that can reduce micro-defects on a semiconductor wafer after polishing. A polishing composition includes: an abrasive; a basic compound; a wetting agent; and a non-ionic surfactant, where the surface tension ?ud is not higher than 64 mN/m, and the ratio of the surface tension after dilution with water by a factor of 20, ?d, to the surface tension ?ud, denoted by ?d/?ud, is not lower than 1.10 and not higher than 1.40. Here, the surface tensions ?ud and ?d are measurements at 25° C.Type: ApplicationFiled: November 17, 2021Publication date: February 15, 2024Inventor: Noriaki SUGITA
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Patent number: 10696869Abstract: A polishing composition capable of suppressing surface defects and reducing haze is provided. The polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; a polyalcohol; and an alkali compound. Preferably, the polishing composition further includes a non-ionic surfactant.Type: GrantFiled: October 21, 2016Date of Patent: June 30, 2020Assignee: NITTA HAAS INCORPORATEDInventors: Noriaki Sugita, Shuhei Matsuda, Takayuki Matsushita, Mika Tazuru
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Patent number: 10435588Abstract: A polishing composition that can suppress surface defects and reduce haze is provided. A polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; and an alkali compound, where an average particle size of particles in the polishing composition measured by dynamic light scattering is not more than 55 nm. Preferably, the polishing composition further includes a non-ionic surfactant. Preferably, the polishing composition further includes a polyalcohol.Type: GrantFiled: October 20, 2016Date of Patent: October 8, 2019Assignee: NITTA HAAS INCORPORATEDInventors: Noriaki Sugita, Mika Tazuru, Takayuki Matsushita, Shuhei Matsuda
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Patent number: 10344184Abstract: Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the proportion of the hydroxyethyl cellulose adsorbed to the abrasive grains is 30% or more and 90% or less.Type: GrantFiled: March 30, 2015Date of Patent: July 9, 2019Assignee: NITTA HAAS INCORPORATEDInventors: Masashi Teramoto, Tatsuya Nakauchi, Noriaki Sugita, Shinichi Haba, Akiko Miyamoto
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Patent number: 10249486Abstract: Proposed is a method for polishing a semiconductor substrate including an intermediate polishing step of polishing in such a way that the number of surface defects having heights of less than 3 nm is 45% or more of the total number of the surface defects on the surface of a semiconductor substrate, and a final polishing step of finish-polishing the semiconductor substrate after the intermediate polishing step.Type: GrantFiled: March 30, 2015Date of Patent: April 2, 2019Assignee: NITTA HAAS INCORPORATEDInventors: Masashi Teramoto, Tatsuya Nakauchi, Noriaki Sugita, Shinichi Haba, Akiko Miyamoto
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Publication number: 20180312725Abstract: A polishing composition capable of suppressing surface defects and reducing haze is provided. The polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; a polyalcohol; and an alkali compound. Preferably, the polishing composition further includes a non-ionic surfactant.Type: ApplicationFiled: October 21, 2016Publication date: November 1, 2018Inventors: Noriaki SUGITA, Shuhei MATSUDA, Takayuki MATSUSHITA, Mika TAZURU
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Publication number: 20180305580Abstract: A polishing composition that can suppress surface defects and reduce haze is provided. A polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; and an alkali compound, where an average particle size of particles in the polishing composition measured by dynamic light scattering is not more than 55 nm. Preferably, the polishing composition further includes a non-ionic surfactant. Preferably, the polishing composition further includes a polyalcohol.Type: ApplicationFiled: October 20, 2016Publication date: October 25, 2018Applicant: NITTA HAAS INCORPORATEDInventors: Noriaki SUGITA, Mika TAZURU, Takayuki MATSUSHITA, Shuhei MATSUDA
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Patent number: 10077380Abstract: Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the mass ratio of the hydroxyethyl cellulose to the abrasive grains is 0.0075 or more and 0.025 or less.Type: GrantFiled: March 30, 2015Date of Patent: September 18, 2018Assignee: NITTA HAAS INCORPORATEDInventors: Masashi Teramoto, Tatsuya Nakauchi, Noriaki Sugita, Shinichi Haba, Akiko Miyamoto
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Publication number: 20170178888Abstract: Proposed is a method for polishing a semiconductor substrate including an intermediate polishing step of polishing in such a way that the number of surface defects having heights of less than 3 nm is 45% or more of the total number of the surface defects on the surface of a semiconductor substrate, and a final polishing step of finish-polishing the semiconductor substrate after the intermediate polishing step.Type: ApplicationFiled: March 30, 2015Publication date: June 22, 2017Applicant: Nitta Haas IncorporatedInventors: Masashi TERAMOTO, Tatsuya NAKAUCHI, Noriaki SUGITA, Shinichi HABA, Akiko MIYAMOTO
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Publication number: 20170174939Abstract: Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the proportion of the hydroxyethyl cellulose adsorbed to the abrasive grains is 30% or more and 90% or less.Type: ApplicationFiled: March 20, 2015Publication date: June 22, 2017Applicant: Nitta Haas IncorporatedInventors: Masashi TERAMOTO, Tatsuya NAKAUCHI, Noriaki SUGITA, Shinichi HABA, Akiko MIYAMOTO
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Publication number: 20170174940Abstract: Proposed is a polishing composition including hydroxyethyl cellulose, water and abrasive grains, wherein the hydroxyethyl cellulose has a molecular weight of 500,000 or more and 1,500,000 or less, and the mass ratio of the hydroxyethyl cellulose to the abrasive grains is 0.0075 or more and 0.025 or less.Type: ApplicationFiled: March 30, 2015Publication date: June 22, 2017Applicant: Nitta Haas IncorporatedInventors: Masashi TERAMOTO, Tatsuya NAKAUCHI, Noriaki SUGITA, Shinichi HABA, Akiko MIYAMOTO
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Patent number: 8709278Abstract: A polishing composition that allows polishing speed to be increased and surface roughness to be reduced is provided. The polishing composition according to the present invention includes a compound including at least an oxyethylene group or an oxypropylene group in a block polyether represented by the following general formula (1), a basic compound, and abrasives: >N—R—N< (1) where R represents an alkylene group expressed as CnH2n and “n” is an integer not less than 1.Type: GrantFiled: July 13, 2009Date of Patent: April 29, 2014Assignee: Nitta Haas IncorporatedInventors: Takayuki Matsushita, Noriaki Sugita
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Publication number: 20110121224Abstract: A polishing composition that allows polishing speed to be increased and surface roughness to be reduced is provided. The polishing composition according to the present invention includes a compound including at least an oxyethylene group or an oxypropylene group in a block polyether represented by the following general formula (1), a basic compound, and abrasives: >N—R—N< (1) where R represents an alkylene group expressed as CnH2n and “n” is an integer not less than 1.Type: ApplicationFiled: July 13, 2009Publication date: May 26, 2011Applicant: NITTA HAAS INCORPORATEDInventors: Takayuki Matsushita, Noriaki Sugita