Abstract: A game system is disclosed that comprises a server system and a game parlor connected to the server system through a network, the server system forming and retaining a unit price schedule data that set a unit price for a predetermined unit time, the game parlor including a plurality of game terminals connected to a parlor LAN, and a parlor server, the game parlor retaining corresponding unit price schedule data sent from the server system to the parlor server, the plurality of game terminals accessing the parlor server at a time interval shorter than the predetermined unit time to acquire unit price information in accordance with the unit price schedule.

Abstract: A collective system for billing management of each game machine installed in shops or the like via communication network. A limit is set to the usable number, while the game machine is ensured continuous use as long as it is properly used and the billing is carried out regularly during the continuous use on a pay-per-use basis. The play count is counted up every time one game is played, and when the play count has reached or exceeded a count limit, the use of the game machine is restricted. The game machine is connected to a billing server via a communication network. The billing server includes a count limit renewing unit which renews the count limit of the game machine that has transmitted billing information, and transmits the new count limit back to the game machine every time the billing server receives the billing information from the game machine.

Abstract: A power supply antenna comprises a plurality of coils disposed concentrically. Power supply portions formed at opposite ends of the respective coils are located in different phases on the same plane such that spacing between the adjacent power supply portions is equal. The power supply antenna can generate a uniform electric field and a uniform magnetic field, although it has the plural coils.

Abstract: An apparatus for forming a metal film, including a reaction vessel for housing a substrate, a precursor feeding device for bubbling a carrier gas through a liquid organometallic complex, vaporizing the organometallic complex, producing a precursor from the vaporized organometallic complex, and feeding the precursor into the reaction vessel, a rotating magnetic field generator for creating a rotating magnetic field in a space above the substrate, and a second plasma generator for generating a plasma from a reducing gas fed into the reaction vessel.

Abstract: A collective system for billing management of each game machine installed in shops or the like via communication network. A limit is set to the usable number, while the game machine is ensured continuous use as long as it is properly used and the billing is carried out regularly during the continuous use on a pay-per-use basis. The play count is counted up every time one game is played, and when the play count has reached or exceeded a count limit, the use of the game machine is restricted. The game machine is connected to a billing server via a communication network. The billing server includes a count limit renewing unit which renews the count limit of the game machine that has transmitted billing information, and transmits the new count limit back to the game machine every time the billing server receives the billing information from the game machine.

Abstract: A plasma 10 is generated within a film formation chamber 2, and mainly a nitrogen gas 11 is excited within the film formation chamber 2. Then, the excited nitrogen gas 11 is mixed with a diborane gas 13 diluted with a hydrogen gas to react them, thereby forming a boron nitride film 15 on a substrate 4. At the initial stage of film formation, the nitrogen gas 11 is supplied in excess to suppress the occurrence of an amorphous phase on the interface. As a result, the boron nitride film 15 improved in moisture absorption resistance on the interface with the substrate and maintaining low dielectric constant properties is formed.

Abstract: A game system is disclosed that comprises a server system and a game parlor connected to the server system through a network, the server system forming and retaining a unit price schedule data that set a unit price for a predetermined unit time, the game parlor including a plurality of game terminals connected to a parlor LAN, and a parlor server, the game parlor retaining corresponding unit price schedule data sent from the server system to the parlor server, the plurality of game terminals accessing the parlor server at a time interval shorter than the predetermined unit time to acquire unit price information in accordance with the unit price schedule.

Abstract: [Problems] A player's operation is simplified to the utmost, and player's will is sufficiently confirmed and player's safety is secured. [Means for Solving Problems] A robbery damage of the electronic money storage medium (EDY) is prevented because the electronic money terminal (EDYT1) reads the electronic money storage medium (EDY) when the electronic money storage medium (EDY) is deeply inserted into the insert space 601. The electronic money terminal (EDYT1) is provided with a credit button (602) which is pushed before the game is starts the game machine. Therefore, the player's will can be confirmed.

Abstract: An apparatus for forming a metal film, including a reaction vessel in which a substrate to be treated is placed, a raw material gas feed pipe inserted into the inlet vessel for feeding chlorine or hydrogen chloride, a spiral tube attached to the inner end of the raw material gas feed pipe, having a raw material gas flow passage whose inner surface is made of copper, and equipped with a heating element, an atomic reducing gas producing device for producing an atomic reducing gas within the reaction vessel, at least in the neighborhood of the substrate to be treated, and an evacuation device for evacuating any gas from the reaction vessel and the raw material gas flow passage.

Abstract: An apparatus for forming a metal film, including a reaction vessel for housing a substrate, a precursor feeding device for bubbling a carrier gas through a liquid organometallic complex, vaporizing the organometallic complex, producing a precursor from the vaporized organometallic complex, and feeding the precursor into the reaction vessel, a rotating magnetic field generator for creating a rotating magnetic field in a space above the substrate, and a second plasma generator for generating a plasma from a reducing gas fed into the reaction vessel.

Abstract: A method for forming a metal film, including bringing a raw material gas containing a halogen into contact with a hot metallic filament, thereby etching the filament with the raw material gas to produce a precursor composed of a metallic component contained in the filament and the halogen contained in the raw material gas, producing an atomic reducing gas by heating a reducing gas to a high temperature, passing the precursor through the atomic reducing gas to remove the halogen from the precursor, and directing the resulting metallic ion or neutral metal onto a substrate to form a thin metal film on the substrate.

Abstract: A power supply antenna comprises a plurality of coils disposed concentrically. Power supply portions formed at opposite ends of the respective coils are located in different phases on the same plane such that spacing between the adjacent power supply portions is equal. The power supply antenna can generate a uniform electric field and a uniform magnetic field, although it has the plural coils.

Abstract: A plasma 10 is generated within a film formation chamber 2, and mainly a nitrogen gas 11 is excited within the film formation chamber 2. Then, the excited nitrogen gas 11 is reacted with a diborane gas 13 diluted with a hydrogen gas, thereby forming a boron nitride film 15 on a substrate 4. Thus, the boron nitride film 15 excellent in mechanical and chemical resistance, high in thermal conductivity, and having a low relative dielectric constant ? can be formed speedily.

Abstract: A plasma 10 is generated within a film formation chamber 2, and mainly a nitrogen gas 11 is excited within the film formation chamber 2. Then, the excited nitrogen gas 11 is mixed with a diborane gas 13 diluted with a hydrogen gas to react them, thereby forming a boron nitride film 15 on a substrate 4. At the initial stage of film formation, the nitrogen gas 11 is supplied in excess to suppress the occurrence of an amorphous phase on the interface. As a result, the boron nitride film 15 improved in moisture absorption resistance on the interface with the substrate and maintaining low dielectric constant properties is formed.

Abstract: An interlayer dielectric multilayer film is formed by providing a boron nitride film as a protective film 34 between interlayer dielectric films 33 with a low relative dielectric constant which comprise organic coated films or porous films. The interlayer dielectric films 34 having a low relative dielectric constant are combined with the boron nitride film excellent in mechanical and chemical resistance, high in thermal conductivity and having a low relative dielectric constant, thereby achieving a low relative dielectric constant, while maintaining adhesion and moisture absorption resistance.

Abstract: A plasma 10 is generated within a film formation chamber 2, and mainly a nitrogen gas 11 is excited within the film formation chamber 2. Then, the excited nitrogen gas 11 is mixed with a diborane gas 13 diluted with a hydrogen gas, and evaporated carbon obtained by controlled heating of a winding-shaped carbon heater 14a, to react them, thereby forming a boron carbonitride film 15 on a substrate 4. Thus, the boron carbonitride film 15 excellent in moisture absorption resistance, excellent in mechanical and chemical resistance, high in thermal conductivity, and having a low relative dielectric constant &kgr; can be formed stably with good adhesion, and speedily over a uniform large area, regardless of the type of the film.

Abstract: The present invention provides methods and apparatus for the formation of a thin noble metal film which can achieve a high rate of film growth, can use inexpensive raw materials, and do not allow any impurities to remain in the thin film.

Abstract: A plasma 10 is generated within a film formation chamber 2, and mainly a nitrogen gas 11 is excited within the film formation chamber 2. Then, the excited nitrogen gas 11 is reacted with a diborane gas 13 diluted with a hydrogen gas, thereby forming a boron nitride film 15 on a substrate 4. Thus, the boron nitride film 15 excellent in mechanical and chemical resistance, high in thermal conductivity, and having a low relative dielectric constant &kgr; can be formed speedily.

Abstract: The present invention provides methods and apparatus for the formation of a thin noble metal film which can achieve a high rate of film growth, can use inexpensive raw materials, and do not allow any impurities to remain in the thin film.

Abstract: The present invention aims to reverse and transport a card in an automated card game machine, and relates to a card reversing device that reverses and transports each card, with no one touching the card. The present invention also relates to such a card game machine and a card reversing method. Each card placed on a card placement unit of a table is pulled by the magnetic force of a magnetic circuit having three electromagnet units. Accordingly, when a slider that supports the magnetic circuit is moved by a card transportation mechanism, the card slides on the upper surface of the card placement unit as if to follow the movement of the magnetic circuit. With one end portion of the card being attracted to the center electromagnet unit, the card is reversed by 180 degrees by the repulsive force generated between the other end portion of the card and the left-side electromagnet unit.