Abstract: A tool member includes a tungsten carbide based cemented carbide substrate and a diamond coating deposited on the substrate. The substrate has two diffraction peaks K.alpha..sub.1 and K.alpha..sub.2 indexed by index of pane (211) for tungsten carbide in X-ray diffraction. The peaks satisfy the relationship of 1.sub.1 /1.sub.2 .ltoreq.35, where 1.sub.1 and 1.sub.2 are heights of the peaks K.alpha..sub.1 and K.alpha..sub.2 measured from a base of a trough between the two diffraction peaks. For manufacturing the tool member, a green compact is first sintered to provide a tungsten carbide based cemented carbide substrate. Subsequently the substrate is ground and subsequently heat-treated at a temperature between 1000.degree. C. and 1600.degree. C. in a vacuum or in a non-oxidizing atmosphere. Thereafter, a diamond coating is formed on the substrate by vapor-deposition method.

Abstract: A diamond-coated tungsten carbide-base sintered hard alloy material for inserts of cutting tools, which has greatly improved bond strength or degree of bonding of the diamond coating layer to the matrix and therefore is capable of exhibiting excellent cutting performance over a long period of time.The sintered hard alloy material comprises:(1) a matrix of a sintered hard alloy consisting essentially of 1-4 percent by weight cobalt, and the balance of tungsten carbide and inevitable impurities, the tungsten carbide having a coarse grain structure having an average grain size of 2-10 microns; and(2) a diamond coating layer formed over surfaces of the matrix by forming an etching layer over the matrix surfaces and then forming the diamond coating layer over the matrix surfaces via the etching layer by a low pressure vapor-phase synthesization method.If required, the matrix may further contain CO1-CO8 (ISO) free carbon.

Abstract: A cutting tool or a wear-resistant mechanical part comprises: a substrate of WC, Co, TiC, and TaC with or without an inner coating layer of TiC, TiN or TiCN; an intermediate layer of a titanium oxycarbide formed on the surface of the substrate or the inner coating layer by carrying out a reaction thereon at a temperature of 800.degree. to 1,200.degree. C. of a halide of titanium, hydrogen, and carbon monoxide or carbon dioxide or a mixture thereof; and an outer coating layer of aluminum oxide formed on the outer surface of the intermediate layer. The thicknesses of the inner layer, the intermediate layer, and the outer coating layer are of the order of 0.5 to 20 microns, 0.5 to 20 microns, and 0.5 to 10 microns, respectively.

Abstract: A sputtering apparatus for coating by the use of a target cathode within a vacuum chamber an article to be treated which is held on an article holding means within the vacuum chamber. The target cathode is of a tubular skeleton structure and is disposed so as to surround the article holding means.

Abstract: A cutting tool or a wear-resistant mechanical part comprises: a substrate of WC, Co, TiC, and TaC with or without an inner coating layer of TiC, TiN or TiCN; an intermediate layer of a titanium oxycarbide formed on the surface of the substrate or the inner coating layer by carrying out a reaction thereon at a temperature of 800.degree. to 1,200.degree. C. of a halide of titanium, hydrogen, and carbon monoxide or carbon dioxide or a mixture thereof; and an outer coating layer of aluminum oxide formed on the outer surface of the intermediate layer. The thicknesses of the inner layer, the intermediate layer , and the outer coating layer are of the order of 0.5 to 20 microns, 0.5 to 20 microns, and 0.5 to 10 microns, respectively.