Patents by Inventor Norihide Saho
Norihide Saho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20170076902Abstract: An ion beam device according to the present invention includes a gas field ion source including an emitter tip supported by an emitter base mount, a ionization chamber including an extraction electrode and being configured to surround the emitter tip, and a gas supply tube. A center axis line of the extraction electrode overlaps or is parallel to a center axis line of the ion irradiation light system, and a center axis line passing the emitter tip and the emitter base mount is inclinable with respect to a center axis line of the ionization chamber. Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.Type: ApplicationFiled: November 28, 2016Publication date: March 16, 2017Inventors: Hiroyasu SHICHI, Shinichi MATSUBARA, Norihide SAHO, Masahiro YAMAOKA, Noriaki ARAI
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Patent number: 9508521Abstract: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.Type: GrantFiled: July 11, 2014Date of Patent: November 29, 2016Assignee: Hitachi High-Technologies CorporationInventors: Hiroyasu Shichi, Shinichi Matsubara, Norihide Saho, Masahiro Yamaoka, Noriaki Arai
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Publication number: 20140319370Abstract: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.Type: ApplicationFiled: July 11, 2014Publication date: October 30, 2014Inventors: Hiroyasu SHICHI, Shinichi MATSUBARA, Norihide SAHO, Masahiro YAMAOKA, Noriaki ARAI
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Patent number: 8847173Abstract: To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more.Type: GrantFiled: July 13, 2011Date of Patent: September 30, 2014Assignee: Hitachi High-Technologies CorporationInventors: Yoshimi Kawanami, Shinichi Matsubara, Hironori Moritani, Noriaki Arai, Hiroyasu Shichi, Tomihiro Hashizume, Hiroyasu Kaga, Norihide Saho, Hiroyuki Muto, Yoichi Ose
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Patent number: 8779380Abstract: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.Type: GrantFiled: March 30, 2009Date of Patent: July 15, 2014Assignee: Hitachi High-Technologies CorporationInventors: Hiroyasu Shichi, Shinichi Matsubara, Norihide Saho, Masahiro Yamaoka, Noriaki Arai
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Patent number: 8563944Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.Type: GrantFiled: August 27, 2012Date of Patent: October 22, 2013Assignee: Hitachi High-Technologies CorporationInventors: Hiroyasu Shichi, Shinichi Matsubara, Norihide Saho, Noriaki Arai, Tohru Ishitani
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Patent number: 8455841Abstract: Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.Type: GrantFiled: June 4, 2010Date of Patent: June 4, 2013Assignee: Hitachi High-Technologies CorporationInventors: Norihide Saho, Hiroyuki Tanaka, Noriaki Arai, Hiroyasu Shichi, Yoichi Ose
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Publication number: 20130119252Abstract: To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more.Type: ApplicationFiled: July 13, 2011Publication date: May 16, 2013Inventors: Yoshimi Kawanami, Shinichi Matsubara, Hironori Moritani, Noriaki Arai, Hiroyasu Shichi, Tomihiro Hashizume, Hiroyasu Kaga, Norihide Saho, Hiroyuki Muto, Yoichi Ose
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Publication number: 20120319003Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.Type: ApplicationFiled: August 27, 2012Publication date: December 20, 2012Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyasu SHICHI, Shinichi MATSUBARA, Norihide SAHO, Noriaki ARAI, Tohru ISHITANI
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Patent number: 8263943Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.Type: GrantFiled: January 8, 2010Date of Patent: September 11, 2012Assignee: Hitachi High-Technologies CorporationInventors: Hiroyasu Shichi, Shinichi Matsubara, Norihide Saho, Noriaki Arai, Tohru Ishitani
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Patent number: 8179218Abstract: A magnet magnetizing system and a superconducting magnet to be magnetized, for magnetizing a superconducting magnet to be magnetized, comprises: a magnetizing magnetic field generating means for generating and distinguishing a static magnetic field; a cooling means having an electromotive motor within the static magnetic field, which is generated from the magnetizing magnet generating means; and a bulk superconductor to be magnetized, which is thermally connected with a low-temperature portion of the cooling means, wherein the magnetizing magnetic field generating means is made up with a magnetizing superconducting bulk magnet, building other magnetizing bulk superconductor therein, the bulk superconductor to be magnetized before magnetization thereof is inserted within a space of the static magnetic field, which is generated by the magnetizing superconducting bulk magnet magnetized, and the magnetic field of the magnetizing superconducting bulk magnet is distinguished by the means for cooling the bulk supercType: GrantFiled: January 14, 2009Date of Patent: May 15, 2012Assignee: Hitachi, Ltd.Inventors: Norihide Saho, Hisashi Isogami, Hiroyuki Tanaka
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Publication number: 20120097863Abstract: Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.Type: ApplicationFiled: June 4, 2010Publication date: April 26, 2012Inventors: Norihide Saho, Hiroyuki Tanaka, Noriaki Arai, Hiroyasu Shichi, Yoichi Ose
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Patent number: 8077001Abstract: A persistent current switch in a superconducting magnet, includes: a winding part in which a superconducting wire is noninductively wound; a winding-heating heater provided around the winding part; a vessel provided around the winding part with a space; and an anti-convective material provided in the space between the vessel and the winding part.Type: GrantFiled: February 20, 2009Date of Patent: December 13, 2011Assignee: Hitachi, Ltd.Inventors: Hiroyuki Tanaka, Norihide Saho, Hisashi Isogami, Masaya Takahashi, Michiya Okada
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Publication number: 20110266465Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.Type: ApplicationFiled: January 8, 2010Publication date: November 3, 2011Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyasu Shichi, Shinichi Matsubara, Norihide Saho, Noriaki Arai, Tohru Ishitani
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Patent number: 8002976Abstract: A magnetic separation filtering and cleaning apparatus for adding flocculant and magnetic powder to raw water containing pollutant particles to form magnetic floc in treated fluid and separating and removing the magnetic floc from the treated fluid, comprising: a magnetic field generation device being provided in a rotating body for suctioning the magnetic floc on a surface of the rotating body from the treated fluid containing the magnetic floc, a magnetic field rotating device for rotating the magnetic field generation device, a sludge recovery device for separating sludge including the magnetic floc mechanically from the surface of the rotating body of the magnetic field generation device; and a filtering device having a rotating net for filtering out the magnetic floc from the treated fluid including the magnetic floc and flowing down the treated fluid filtered through the rotating net.Type: GrantFiled: January 25, 2008Date of Patent: August 23, 2011Assignee: Hitachi, Ltd.Inventors: Norihide Saho, Hisashi Isogami, Akira Mochizuki, Tomoko Akiyama
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Patent number: 7993529Abstract: A treatment method of organic compounds included in waste water, comprising the steps of: supplying waste water to an adsorber 2 filled with an adsorbent 3 therein for adsorbing the organic compounds in the waste water by the adsorbent 3 in the adsorber 2, supplying a current between an anode 9 and a cathode 8 in water including an electrolyte in an electrolyzer 6 for electrolyzing the water including an electrolyte, and supplying an electrolyte resulting from electrolysis in the electrolyzer 6 to the adsorbent 3 in the adsorber 2 for contacting the electrolyte with the adsorbent 3, so that the organic compounds adsorbed by the adsorbent 3 are desorbed or decomposed.Type: GrantFiled: March 25, 2010Date of Patent: August 9, 2011Assignees: Hitachi, Ltd., Hitachi Kyowa Engineering Co., Ltd.Inventors: Akio Honji, Hayahito Ishii, Akira Mochizuki, Norihide Saho, Tsutomu Tsuyama, Hisashi Isogami
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Publication number: 20110147609Abstract: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.Type: ApplicationFiled: March 30, 2009Publication date: June 23, 2011Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyasu Shichi, Shinichi Matsubara, Norihide Saho, Masahiro Yamaoka, Noriaki Arai
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Publication number: 20110073603Abstract: The storage case has a structure in which a sample storage case (S) contained in a storage case is cooled and held at a low temperature by a Stirling refrigerator. A detection element is disposed in a room-temperature area of the storage case. The chemical or physical property of the detection element varies when a contaminant adheres to the detection element. Entrance of a contaminant into the storage case can be checked by contactlessly checking the detection element from the outside of the storage case. The storage case includes a server for receiving the result of the check from the detection device, storing the result, and setting up connection via a communication line to at least two out of a terminal operable by the forwarder, a terminal operable by the carrier, and a terminal operable by the recipient to transmit the result to the two.Type: ApplicationFiled: April 20, 2009Publication date: March 31, 2011Applicant: HITACHI, LTD.Inventors: Norihide Saho, Mami Hakari, Hiroyuki Tanaka, Sachi Tanaka, Yoshihito Yasukawa, Akira Nomiyama, Shinjiro Saito, Azusa Amino, Daisuke Matsuka, Kohtaro Chiba, Hiroyuki Toyoda, Naoko Nakayama, Isao Kitagawa, Isao Hagiya
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Patent number: 7785475Abstract: A magnetic separation purifying apparatus includes a cylindrical-shaped sludge recovery rotating body rotating to place sludge and a magnetic substance on a surface thereof to convey the same; a magnetic rotating body, which has an axis in the sludge recovery rotating body and includes a rotating body and a plurality of magnets mounted on its circumference, at least a side of which is arranged close to an inner peripheral surface of the sludge recovery rotating body, by which a magnetic substance is magnetically attracted to a surface of the sludge recovery rotating body whereby sludge is transported onto the surface of the sludge recovery rotating body; and a scraping device that scrapes sludge and a magnetic substance being transported on the surface of the sludge recovery rotating body.Type: GrantFiled: April 28, 2005Date of Patent: August 31, 2010Assignee: Hitachi, Ltd.Inventors: Norihide Saho, Hisashi Isogami, Takashi Mizumori, Akira Mochizuki, Susumu Harada
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Patent number: 7764153Abstract: A magnetic field generator comprises a superconducting bulk body, which generates a superconducting magnetic field, a refrigerant vessel for storing solid nitrogen, a vacuum container, which accommodates therein the superconducting bulk body and the refrigerant vessel, and a refrigerator having a cooling head for cooling the refrigerant vessel. The superconducting bulk body is arranged along a wall of the vacuum container. The cooling head of the refrigerator and the refrigerant vessel are in thermal contact with each other. The refrigerant vessel and the superconducting bulk body are in thermal contact with each other.Type: GrantFiled: January 23, 2008Date of Patent: July 27, 2010Assignee: Hitachi, Ltd.Inventors: Hisashi Isogami, Norihide Saho, Hiroyuki Tanaka