Patents by Inventor Norihiko Kataoka

Norihiko Kataoka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Control system of substrate processing apparatus, collecting unit, substrate processing apparatus and control method of the substrate processing apparatus
    Patent number: 8712730
    Abstract: There is provided a control system of a substrate processing apparatus, comprising: a collecting unit for collecting data from each component that constitutes a substrate processing apparatus, the collecting unit further comprising at least: a buffer for temporarily storing collected data; and a sorting part for rearranging the collected data, based on time data attached to the collected data.
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: April 29, 2014
    Assignee: Hitachi Kokusai Electric Inc.
    Inventors: Norihiko Kataoka, Shinichiro Mori
  • Substrate processing system
    Patent number: 8359117
    Abstract: Provided is a substrate processing system configured to provide proper data. The substrate processing system comprises a substrate processing apparatus comprising a plurality of components, a controller configured to control the substrate processing apparatus by setting a sequence prescribing time and components, and a collection unit configured to collect data from the components. The collection unit is configured to match data collected from the components via the controller with data collected directly from the components.
    Type: Grant
    Filed: December 28, 2009
    Date of Patent: January 22, 2013
    Assignee: Hitachi Kokusai Electric Inc.
    Inventors: Norihiko Kataoka, Shinichiro Mori
  • CONTROL SYSTEM OF SUBSTRATE PROCESSING APPARATUS, COLLECTING UNIT, SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF THE SUBSTRATE PROCESSING APPARATUS
    Publication number: 20110301739
    Abstract: There is provided a control system of a substrate processing apparatus, comprising: a collecting unit for collecting data from each component that constitutes a substrate processing apparatus, the collecting unit further comprising at least: a buffer for temporarily storing collected data; and a sorting part for rearranging the collected data, based on time data attached to the collected data.
    Type: Application
    Filed: June 7, 2011
    Publication date: December 8, 2011
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Norihiko KATAOKA, Shinichiro MORI
  • SUBSTRATE PROCESSING SYSTEM
    Publication number: 20100199001
    Abstract: Provided is a substrate processing system configured to provide proper data. The substrate processing system comprises a substrate processing apparatus comprising a plurality of components, a controller configured to control the substrate processing apparatus by setting a sequence prescribing time and components, and a collection unit configured to collect data from the components. The collection unit is configured to match data collected from the components via the controller with data collected directly from the components.
    Type: Application
    Filed: December 28, 2009
    Publication date: August 5, 2010
    Applicant: HITACHI-KOKUSAI ELECTRIC, INC.
    Inventors: Norihiko KATAOKA, Shinichiro MORI