Patents by Inventor Norihira MITSUMURA

Norihira MITSUMURA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230357010
    Abstract: The present invention provides a silicon nitride sintered substrate capable of reducing contamination caused by a boron nitride powder or the like used as a releasing agent and problems in bonding strength and dielectric strength at the time of laminating metal layers or the like, where the contamination is caused by a network structure provided by a silicon nitride crystal formed on the surface of the substrate in an unpolished state after sintering a silicon nitride powder. The silicon nitride substrate in an unpolished state after sintering is a silicon nitride sintered substrate where a cumulative volume of pores having a diameter in a range of 1 to 10 ?m is not more than 7.0'10?5 mL/cm2 in a measurement by a mercury porosimetry. Preferably, Ra of the surface is not more than 0.6 ?m and arithmetic mean peak curvature (Spc) of a peak is not more than 4.5 [l/mm].
    Type: Application
    Filed: June 29, 2021
    Publication date: November 9, 2023
    Applicant: TOKUYAMA CORPORATION
    Inventors: Norihira MITSUMURA, Dai KUSANO, Hideaki KAWAI