Abstract: A semi-transmissive type liquid-crystal display device suppresses the reduction and corrosion of the transmission or common electrode due to the cell corrosion reaction with a simple method. In each pixel region, the reflection electrode is formed over the glass plate, where the interlayer insulating film and the barrier metal film intervene between them. The reflection electrode is electrically connected to the transmission electrode by way of the barrier metal film. The transmission electrode and the corresponding scanning line thereto are apart from each other at a distance of 2 ?m (preferably, 3 ?m) or greater. A developer solution penetrating through the crack formed in the barrier metal film does not reach the transmission electrode (or common electrode), preventing the reduction and corrosion of the transmission or common electrode.

Abstract: A projection aligner includes an illumination optical system which irradiates a mask pattern with an exposure light, an exposure optical system which irradiates a substrate on a stage with the exposure light passed by the illumination optical system, and a correction optical system including two correction filters for correcting the illuminance irregularity of the exposure light. The correction filters have a light transmission irregularity which is opposite to the illuminance irregularity of the projection aligner. The two correction filters are shifted from each other so that the transmittance distributions of both the correction filters are shifted from one another.

Abstract: A semi-transmissive type liquid-crystal display device suppresses the reduction and corrosion of the transmission or common electrode due to the cell corrosion reaction with a simple method. In each pixel region, the reflection electrode is formed over the glass plate, where the interlayer insulating film and the barrier metal film intervene between them. The reflection electrode is electrically connected to the transmission electrode by way of the barrier metal film. The transmission electrode and the corresponding scanning line thereto are apart from each other at a distance of 2 ?m (preferably, 3 ?m) or greater. A developer solution penetrating through the crack formed in the barrier metal film does not reach the transmission electrode (or common electrode), preventing the reduction and corrosion of the transmission or common electrode.