Patents by Inventor Norihisa Koga
Norihisa Koga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240022693Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: ApplicationFiled: September 27, 2023Publication date: January 18, 2024Applicant: TOKYO ELECTRON LIMITEDInventors: Norihisa KOGA, Tadashi NISHIYAMA, Yasuaki NODA
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Patent number: 11832026Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: GrantFiled: March 2, 2021Date of Patent: November 28, 2023Assignee: Tokyo Electron LimitedInventors: Norihisa Koga, Tadashi Nishiyama, Yasuaki Noda
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Patent number: 11733612Abstract: A substrate processing apparatus includes light source configured to irradiate a substrate having thereon a resist film made of a resist material for EUV lithography with light including vacuum ultraviolet light before an exposure process, and a light amount suppressing member provided in an optical path of the light from the light source and configured to suppress an amount of the light reaching a surface of the substrate such that the light becomes weak light as a whole in an irradiation region, wherein the light including the vacuum ultraviolet light contains a continuous spectral component of at least a portion of a band contained in a wavelength of 10 nm to 200 nm.Type: GrantFiled: March 24, 2022Date of Patent: August 22, 2023Assignee: TOKYO ELECTRON LIMITEDInventors: Kazuya Iwata, Norihisa Koga
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Publication number: 20220317575Abstract: A substrate processing apparatus includes light source configured to irradiate a substrate having thereon a resist film made of a resist material for EUV lithography with light including vacuum ultraviolet light before an exposure process, and a light amount suppressing member provided in an optical path of the light from the light source and configured to suppress an amount of the light reaching a surface of the substrate such that the light becomes weak light as a whole in an irradiation region, wherein the light including the vacuum ultraviolet light contains a continuous spectral component of at least a portion of a band contained in a wavelength of 10 nm to 200 nm.Type: ApplicationFiled: March 24, 2022Publication date: October 6, 2022Inventors: Kazuya IWATA, Norihisa KOGA
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Patent number: 11353792Abstract: A substrate processing apparatus includes: a processing chamber configured to process a substrate; a light source chamber including a light source configured to irradiate vacuum ultraviolet light onto a surface of the substrate; a gas supply configured to supply an inert gas into the light source chamber; and a controller that controls the gas supply to maintain the light source chamber in an inert gas atmosphere.Type: GrantFiled: May 20, 2019Date of Patent: June 7, 2022Assignee: TOKYO ELECTRON LIMITEDInventor: Norihisa Koga
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Patent number: 11256172Abstract: A light irradiating device includes a processing chamber in which a substrate is accommodated; a beam source chamber in which a beam source of an energy beam is accommodated; a partition wall configured to partition the processing chamber and the beam source chamber; multiple window members provided at the partition wall to transmit the energy beam outputted from the beam source toward the substrate within the processing chamber; and multiple gas discharge units respectively disposed around the multiple window members within the processing chamber, and configured to discharge an inert gas along surfaces of the multiple window members.Type: GrantFiled: June 24, 2020Date of Patent: February 22, 2022Assignee: TOKYO ELECTRON LIMITEDInventors: Takaya Kikai, Norihisa Koga, Masaru Tomono
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Publication number: 20210185282Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: ApplicationFiled: March 2, 2021Publication date: June 17, 2021Applicant: Tokyo Electron LimitedInventors: Norihisa KOGA, Tadashi NISHIYAMA, Yasuaki NODA
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Patent number: 10958879Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: GrantFiled: November 12, 2019Date of Patent: March 23, 2021Assignee: Tokyo Electron LimitedInventors: Norihisa Koga, Tadashi Nishiyama, Yasuaki Noda
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Publication number: 20200409269Abstract: A light irradiating device includes a processing chamber in which a substrate is accommodated; a beam source chamber in which a beam source of an energy beam is accommodated; a partition wall configured to partition the processing chamber and the beam source chamber; multiple window members provided at the partition wall to transmit the energy beam outputted from the beam source toward the substrate within the processing chamber; and multiple gas discharge units respectively disposed around the multiple window members within the processing chamber, and configured to discharge an inert gas along surfaces of the multiple window members.Type: ApplicationFiled: June 24, 2020Publication date: December 31, 2020Inventors: Takaya Kikai, Norihisa Koga, Masaru Tomono
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Patent number: 10795265Abstract: There is provided a substrate processing apparatus including: a light radiator configured to radiate a light for processing into an irradiation area which is smaller than a processing target area of a surface of a substrate; a driver configured to move the irradiation area in two directions that cross each other in a plane along the surface of the substrate; and a controller configured to control the driver to move an irradiation position in two directions according to a movement pattern which has been set to radiate the light to an entire area of the processing target area.Type: GrantFiled: July 24, 2019Date of Patent: October 6, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Norihisa Koga, Yoshitaka Konishi, Naruaki Iida, Yuzo Ohishi, Kazuhiro Takeshita
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Patent number: 10707109Abstract: A substrate processing apparatus includes carry in/out station, transfer station, processing station, and image capturing unit. The carry in/out station includes first conveyance device that takes out and conveys substrate from cassette. The transfer station is disposed adjacent to the carry in/out station, and includes substrate placement unit on which the substrate conveyed by the first conveyance device is placed. The processing station is disposed adjacent to the transfer station, and includes second conveyance device that takes out and conveys the substrate from the substrate placement unit, and a plurality of processing units that processes the substrate conveyed by the second conveyance device. The image capturing unit is disposed in the transfer station, and captures an image of the peripheral edge portion of one of the upper and lower surfaces of the substrate and the end surface of the substrate.Type: GrantFiled: September 21, 2018Date of Patent: July 7, 2020Assignee: TOKYO ELECTRON LIMITEDInventors: Satoshi Morita, Ryoji Ikebe, Yasuaki Noda, Norihisa Koga, Keisuke Hamamoto, Masato Hosaka
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Patent number: 10642168Abstract: An auxiliary exposure apparatus is for performing auxiliary exposure of applying light of a predetermined wavelength from a laser light source to a resist film on a wafer, separately from exposure processing of transferring a pattern of a mask to the resist film applied on the wafer. The auxiliary exposure apparatus includes a first total reflection mirror that reflects the light from the laser light source toward the wafer; and an imaging device including a light receiving part that receives light after reflected by the wafer.Type: GrantFiled: September 29, 2017Date of Patent: May 5, 2020Assignee: Tokyo Electron LimitedInventors: Hideaki Kashiwagi, Takafumi Niwa, Norihisa Koga
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Publication number: 20200084422Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: ApplicationFiled: November 12, 2019Publication date: March 12, 2020Applicant: Tokyo Electron LimitedInventors: Norihisa KOGA, Tadashi Nishiyama, Yasuaki Noda
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Publication number: 20200041913Abstract: There is provided a substrate processing apparatus including: a light radiator configured to radiate a light for processing into an irradiation area which is smaller than a processing target area of a surface of a substrate; a driver configured to move the irradiation area in two directions that cross each other in a plane along the surface of the substrate; and a controller configured to control the driver to move an irradiation position in two directions according to a movement pattern which has been set to radiate the light to an entire area of the processing target area.Type: ApplicationFiled: July 24, 2019Publication date: February 6, 2020Inventors: Norihisa KOGA, Yoshitaka KONISHI, Naruaki IIDA, Yuzo OHISHI, Kazuhiro TAKESHITA
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Patent number: 10523905Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: GrantFiled: February 21, 2017Date of Patent: December 31, 2019Assignee: Tokyo Electron LimitedInventors: Norihisa Koga, Tadashi Nishiyama, Yasuaki Noda
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Publication number: 20190361351Abstract: A substrate processing apparatus includes: a processing chamber configured to process a substrate; a light source chamber including a light source configured to irradiate vacuum ultraviolet light onto a surface of the substrate; a gas supply configured to supply an inert gas into the light source chamber; and a controller that controls the gas supply to maintain the light source chamber in an inert gas atmosphere.Type: ApplicationFiled: May 20, 2019Publication date: November 28, 2019Inventor: Norihisa Koga
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Publication number: 20190096730Abstract: A substrate processing apparatus includes carry in/out station, transfer station, processing station, and image capturing unit. The carry in/out station includes first conveyance device that takes out and conveys substrate from cassette. The transfer station is disposed adjacent to the carry in/out station, and includes substrate placement unit on which the substrate conveyed by the first conveyance device is placed. The processing station is disposed adjacent to the transfer station, and includes second conveyance device that takes out and conveys the substrate from the substrate placement unit, and a plurality of processing units that processes the substrate conveyed by the second conveyance device. The image capturing unit is disposed in the transfer station, and captures an image of the peripheral edge portion of one of the upper and lower surfaces of the substrate and the end surface of the substrate.Type: ApplicationFiled: September 21, 2018Publication date: March 28, 2019Inventors: Satoshi Morita, Ryoji Ikebe, Yasuaki Noda, Norihisa Koga, Keisuke Hamamoto, Masato Hosaka
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Publication number: 20180095370Abstract: An auxiliary exposure apparatus is for performing auxiliary exposure of applying light of a predetermined wavelength from a laser light source to a resist film on a wafer, separately from exposure processing of transferring a pattern of a mask to the resist film applied on the wafer, and includes: a first total reflection mirror configured to reflect the light from the laser light source toward the wafer; and an imaging device including a light receiving part configured to receive light after reflected by the wafer.Type: ApplicationFiled: September 29, 2017Publication date: April 5, 2018Inventors: Hideaki KASHIWAGI, Takafumi NIWA, Norihisa KOGA
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Publication number: 20170244936Abstract: In one embodiment, a substrate imaging apparatus includes: a rotary holding unit that holds and rotates a substrate; a mirror member having a reflecting surface that opposes an end face of the substrate and a peripheral portion of a back surface of the substrate held by the rotary holding unit, the reflecting surface being inclined with respect to a rotation axis of the rotary holding unit; and a camera having an imaging device that receives both first light and second light through a lens, the first light coming from a peripheral portion of a front surface of the substrate held by the rotary holding unit, and the second light being a reflected light of second light which comes from the end face of the substrate held by the rotary holding unit and is reflected by the reflecting surface.Type: ApplicationFiled: February 21, 2017Publication date: August 24, 2017Applicant: Tokyo Electron LimitedInventors: Norihisa KOGA, Tadashi NISHIYAMA, Yasuaki NODA
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Patent number: 9025852Abstract: In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.Type: GrantFiled: May 29, 2012Date of Patent: May 5, 2015Assignee: Tokyo Electron LimitedInventors: Kazuya Hisano, Hiroshi Tomita, Norihisa Koga, Tadashi Nishiyama, Makoto Hayakawa