Abstract: A plasma processing is performed by providing a first and a second electrodes to be relatively parallelly movable, disposing an object to be processed on the second electrode so as to face the first electrode and providing a blocking member to both end portions of the second electrode, so that a plasma processing space is blocked by the blocking member when the first and second electrodes are moved relatively with each other. A voltage is applied to both the first and the second electrodes and a process gas is introduced into the plasma processing space formed between the first and second electrodes, and the plasma is irradiated to the object. The blocking member is provided so as to extend from the second electrode to the first electrode, and an upper surface of the blocking member is raised higher than a surface level of the object to be processed.

Abstract: A plasma processing is performed by using a plasma processing apparatus which includes a first electrode and a second electrode disposed relatively movable to the first electrode between which an object to be processed is disposed, and a solid dielectric material disposed to be continuously connected to at least processing starting and final end sides of the object. A process gas is introduced between the first and second electrodes under a state in which the first electrode abuts on entire surfaces of the object and the solid dielectric material, and a voltage is applied between the first and second electrodes to thereby process the object by plasma discharge generated between the first and second electrodes while moving the second electrode relatively to the first electrode and the object.

Abstract: A main object of the present invention is to provide an EL element in which an inconvenience, resulting from uneven film thickness or generation of small clearances at a boundary in between layers due to a liquid repellent treatment, is prevented. In order to achieve the object, the present invention provides an electroluminescent element comprising: a substrate having at least a first electrode layer; an insulating layer formed so as to cover an edge portion of the first electrode layer; a liquid repellent portion provided on an upper surface of the insulating layer; alight emitting layer formed in a pattern on the first electrode layer; and a second electrode layer formed on the light emitting layer.

Abstract: A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

Abstract: The present invention provides a plasma processing method capable of being used for manufacturing color filters which are substantially free from defects such as white spots and color mixture of inks and color filters manufactured by using the same. A plasma processing device according to the present invention comprises a stage mainly acting also as a lower electrode; and a head electrode in which an upper electrode is stored and from which plasma raw material gas is ejected. By ejecting plasma raw material gas from the head electrode, applying voltage between the stage and the head electrode by an alternate power source to induce plasma electric discharge and by scanning over a workpiece material (glass substrate) by the head electrode, the workpiece material (glass substrate) is subjected to the plasma processing.

Abstract: A plasma processing is performed by using a plasma processing apparatus which includes a first electrode and a second electrode disposed relatively movable to the first electrode between which an object to be processed is disposed, and a solid dielectric material disposed to be continuously connected to at least processing starting and final end sides of the object. A process gas is introduced between the first and second electrodes under a state in which the first electrode abuts on entire surfaces of the object and the solid dielectric material, and a voltage is applied between the first and second electrodes to thereby process the object by plasma discharge generated between the first and second electrodes while moving the second electrode relatively to the first electrode and the object.

Abstract: A plasma processing is performed by providing a first and a second electrodes to be relatively parallelly movable, disposing an object to be processed on the second electrode so as to face the first electrode and providing a blocking member to both end portions of the second electrode, so that a plasma processing space is blocked by the blocking member when the first and second electrodes are moved relatively with each other. A voltage is applied to both the first and the second electrodes and a process gas is introduced into the plasma processing space formed between the first and second electrodes, and the plasma is irradiated to the object. The blocking member is provided so as to extend from the second electrode to the first electrode, and an upper surface of the blocking member is raised higher than a surface level of the object to be processed.

Abstract: The main object of the present invention is to provide a method for manufacturing a color filter, capable of having the surface of the pixel part flatly even in the case a pixel part is formed by an ink discharging method, and the thickness of each pixel part evenly. In order to achieve the above-mentioned object, the present invention provides a method for manufacturing a color filter comprising at least a pixel part forming process of forming a pixel part of a plurality of colors in a predetermined pattern by adhering an ink on a transparent substrate by a discharging method, and the convex pixel part is formed in the pixel part forming process, wherein a pixel part flattening process of flattening the convex pixel part is executed after the pixel part forming process.

Abstract: The main object of the present invention is to provide a method for manufacturing a color filter, capable of having the surface of the pixel part flatly even in the case a pixel part is formed by an ink discharging method, and the thickness of each pixel part evenly. In order to achieve the above-mentioned object, the present invention provides a method for manufacturing a color filter comprising at least a pixel part forming process of forming a pixel part of a plurality of colors in a predetermined pattern by adhering an ink on a transparent substrate by a discharging method, and the convex pixel part is formed in the pixel part forming process, wherein a pixel part flattening process of flattening the convex pixel part is executed after the pixel part forming process.

Abstract: A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

Abstract: A main object of the present invention is to provide an EL element in which an inconvenience, resulting from uneven film thickness or generation of small clearances at a boundary in between layers due to a liquid repellent treatment, is prevented. In order to achieve the object, the present invention provides an electroluminescent element comprising: a substrate having at least a first electrode layer; an insulating layer formed so as to cover an edge portion of the first electrode layer; a liquid repellent portion provided on an upper surface of the insulating layer; alight emitting layer formed in a pattern on the first electrode layer; and a second electrode layer formed on the light emitting layer.

Abstract: The main object of the present invention is to provide a method for manufacturing a color filter, capable of having the surface of the pixel part flatly even in the case a pixel part is formed by an ink discharging method, and the thickness of each pixel part evenly. In order to achieve the above-mentioned object, the present invention provides a method for manufacturing a color filter comprising at least a pixel part forming process of forming a pixel part of a plurality of colors in a predetermined pattern by adhering an ink on a transparent substrate by a discharging method, and the convex pixel part is formed in the pixel part forming process, wherein a pixel part flattening process of flattening the convex pixel part is executed after the pixel part forming process.