Abstract: Provided is a charged particle beam source having an emitter that can be replaced easily. The charged particle beam source includes an electron gun chamber; a first unit including both a supportive insulative member mechanically supporting a cable and a first set of terminals electrically connected to the cable; and a second unit including both the emitter that releases charged particles and a second set of terminals electrically connected to the emitter. The chamber has a side wall provided with a through-hole in which the first unit is secured. The second unit can be detachably mounted to the first unit. Within the chamber, the emitter is placed on an optical axis, so that the first and second sets of terminals are brought into contact with each other.

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.

Abstract: An electron gun includes an emitter, an electron gun electrode, and a short-circuiting mechanism for setting the emitter and the electron gun electrode at the same potential. The short-circuiting mechanism includes a first switch member provided with a first switch electrode that is connected to the emitter and a second switch electrode that is connected to the electron gun electrode, a second switch member provided with a third switch electrode, and a drive unit that operates at least one of the first switch member and the second switch member to switch between a state in which the first switch electrode and the second switch electrode are in contact with the third switch electrode and a state in which the first switch electrode and the second switch electrode are separated from the third switch electrode. The short-circuiting mechanism has the same potential as a predetermined voltage.

Abstract: There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.

Abstract: There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.

Abstract: An automatic analyzer, which prevents cross contamination, has a sample dispensing probe washing mechanism 81, a reagent dispensing probe washing mechanism 82 and an agitation mechanism washing mechanism 83 that are individually controlled. A washing liquid discharge quantity for dispensing probes 42 and 52 and a reserved quantity of the washing liquid for a washing bath are acquired on the basis of detection signals fed from corresponding liquid flow detectors 111, 112, 113, 114, 115 and 116 and liquid level detectors 121 and 122. The washing liquid discharge quantity and the reserved liquid quantity are compared with predetermined reference values thereby monitoring whether or not the feed of the washing liquid to the dispensing probes 42 and 52 and the reservation and discharge of the washing liquid in the washing bath are abnormal. An anomaly is reported by a printer 108 or a CRT 106.

Abstract: An automatic analyzer, which prevents cross contamination, has a sample dispensing probe washing mechanism 81, a reagent dispensing probe washing mechanism 82 and an agitation mechanism washing mechanism 83 that are individually controlled. A washing liquid discharge quantity for dispensing probes 42 and 52 and a reserved quantity of the washing liquid for a washing bath are acquired on the basis of detection signals fed from corresponding liquid flow detectors 111, 112, 113, 114, 115 and 116 and liquid level detectors 121 and 122. The washing liquid discharge quantity and the reserved liquid quantity are compared with predetermined reference values thereby monitoring whether or not the feed of the washing liquid to the dispensing probes 42 and 52 and the reservation and discharge of the washing liquid in the washing bath are abnormal. An anomaly is reported by a printer 108 or a CRT 106.

Abstract: A remaining life of a stator coil resulting from galvanic corrosion between different kinds of metals in a rotating machine adopting a water cooling system and remaining life of a stator coil's insulating layer resulting from a wet heat degeneration can be positively and integrally evaluated according to the present invention by sampling a brazing section between the stator coil clip and copper wires, cutting off the sampled brazing section in a copper wire array direction, measuring a joined section brazed with a brazing material as a copper wire direction length and finding an effective sealing length of that brazing section or sampling an insulating layer of the stator coil, finding infrared spectra of the insulating layer, comparing the infrared spectra of the insulating layer of the stator coil with infrared spectra of a healthy stator coil's insulating layer not penetrated by water, finding difference spectra of an ester group of an epoxy resin used as a bonding agent of the insulating layer and predict