Abstract: An output circuit may be provided with: input and output terminals; a ground terminal shared by both an input side and an output side; a first switching element of n-channel type having first positive and negative electrodes, and a first gate; a second switching element of the n-channel type having second positive and negative electrodes, and a second gate; a diode; and a resistive element; in which the first positive electrode is connected with a power source, the first negative electrode is connected with the output terminal, anode of the diode is connected with the first negative electrode, cathode of the diode is connected with the first gate, the resistive element is connected between the source and the first gate, the second positive electrode is connected with the first gate, the second negative electrode is connected with the ground terminal, and the second gate is connected with the input terminal.

Abstract: An output circuit may be provided with: input and output terminals; a ground terminal shared by both an input side and an output side; a first switching element of n-channel type having first positive and negative electrodes, and a first gate; a second switching element of the n-channel type having second positive and negative electrodes, and a second gate; a diode; and a resistive element; in which the first positive electrode is connected with a power source, the first negative electrode is connected with the output terminal, anode of the diode is connected with the first negative electrode, cathode of the diode is connected with the first gate, the resistive element is connected between the source and the first gate, the second positive electrode is connected with the first gate, the second negative electrode is connected with the ground terminal, and the second gate is connected with the input terminal.

Abstract: The MEMS device includes MEMS units and a circuit board. Each MEMS unit includes a substrate, a movable part with a movable electrode, a driving electrode, a diagnosis electrode, a plurality of through electrodes, and a plurality of MEMS side electrical contacts. The circuit board includes a plurality of circuit side electrical contacts, a drive circuit that is connected electrically with the driving electrode and the movable electrode through the circuit side electrical contact, the MEMS side electrical contact, and the through electrode, and a diagnosis circuit that is connected electrically with the diagnosis electrode and the movable electrode through the circuit side electrical contact, the MEMS side electrical contact, and the through electrode. The diagnosis electrodes of at least two MEMS units are connected electrically with each other, and are connected to a same MEMS side electrical contact through a same through electrode.

Abstract: A method for cleaning a web-like object to be cleaned, comprising the steps of: a cleaning solution spraying step for spraying a cleaning solution to a surface of a fed web-like object to be cleaned; and a cleaning solution removing step for removing the liquid film left on the surface of the object to be cleaned by ejecting a gas so that at least an ejected gas flow is formed in a direction opposite to the feeding direction of the object to be cleaned, wherein among the air induced by the gas ejection, the air induced from the side of the cleaning solution spraying position to the side of the gas ejection position is shielded.