Abstract: A search system for efficiently searching for IP information. When a user logs in to the search system, the search system retrieves information, which a group to which a user belongs has privilege to access, to generate a session information database. The search system searches the session information database for information that matches a search query input by the user.

Abstract: A continuous semiconductor substrate processing system is operated by a system control structure in accordance with a predetermined processing program. A wafer conveying mechanism conveys wafers to and from each of plural process stations, each of which performs a corresponding process step on semiconductor wafers, to and from a stocker and to and from an inspection unit. Carriers, movable by manual or mechanical structure other than the wafer conveying mechanism, provide for alternative conveying of wafers to and from each of the process stations, the stocker and the inspection station.