Abstract: The mass spectrometer includes a sample stage, an irradiation unit that irradiates the sample with an energy beam and ionizes a component of the sample, an extraction electrode that extracts the ionized sample from the surface of the sample by a potential difference from the sample stage, an MCP that emits electrons in accordance with the ionized sample, an imaging part that acquires an image based on the electrons emitted by the MCP, and a control unit that controls operations of the irradiation unit, the extraction electrode, and the imaging part. The control unit changes the potential of the extraction electrode at a timing in accordance with the detection target component after the irradiation of the energy beam by the irradiation unit, and causes the imaging part to acquire an image as an analysis target in a period in accordance with the detection target component.

Abstract: In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is sandwiched between a filament and an electric field control electrode to each of which a negative high voltage is applied. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and enables stable operation to be maintained, without occurrence of a trouble of failure in maintaining a desired X-ray amount.

Abstract: In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is arranged opposite to a high-voltage region VH of a power supply unit including a high-voltage generation module which generates a negative high voltage to be applied to a filament. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and prevents occurrence of a trouble of failure in maintaining a desired X-ray amount, thus enabling stable operation to be maintained.

Abstract: An X-ray radiation device comprises a plurality of X-ray radiation units, each having an X-ray tube for generating an X-ray, a drive circuit for driving the X-ray tube, and a trunk line connected to the drive circuit, and a controller having a control circuit for controlling the X-ray radiation units. The trunk lines of the plurality of X-ray radiation units are connected in series to the control circuit so that the drive circuits of the plurality of X-ray radiation units are connected in parallel to the control circuit. Since the trunk lines of the plurality of X-ray radiation units are connected in series to the control circuit, the X-ray radiation units can be connected to each other and are not required to be connected one by one to the controller. This makes it possible to increase and decrease the number of units without complicating their wiring.

Abstract: In an X-ray radiation source, a lid part is fastened to a main part with screws, so that an X-ray tube is secured to a housing while being pressed against an inner surface of the wall part a by a first circuit board. The X-ray tube can be secured stably within the housing by thus being held between the first circuit board and the wall part. The X-ray radiation source uses the first circuit board incorporated in the housing itself for pressing the X-ray tube. This makes it unnecessary to provide new members for pressing the X-ray tube and can prevent the device structure from becoming complicated.

Abstract: In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is arranged opposite to a high-voltage region VH of a power supply unit including a high-voltage generation module which generates a negative high voltage to be applied to a filament. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and prevents occurrence of a trouble of failure in maintaining a desired X-ray amount, thus enabling stable operation to be maintained.

Abstract: In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is sandwiched between a filament and an electric field control electrode to each of which a negative high voltage is applied. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and enables stable operation to be maintained, without occurrence of a trouble of failure in maintaining a desired X-ray amount.

Abstract: In an X-ray radiation source, a lid part is fastened to a main part with screws, so that an X-ray tube is secured to a housing while being pressed against an inner surface of the wall part a by a first circuit board. The X-ray tube can be secured stably within the housing by thus being held between the first circuit board and the wall part. The X-ray radiation source uses the first circuit board incorporated in the housing itself for pressing the X-ray tube. This makes it unnecessary to provide new members for pressing the X-ray tube and can prevent the device structure from becoming complicated.

Abstract: An X-ray radiation device comprises a plurality of X-ray radiation units, each having an X-ray tube for generating an X-ray, a drive circuit for driving the X-ray tube, and a trunk line connected to the drive circuit, and a controller having a control circuit for controlling the X-ray radiation units. The trunk lines of the plurality of X-ray radiation units are connected in series to the control circuit so that the drive circuits of the plurality of X-ray radiation units are connected in parallel to the control circuit. Since the trunk lines of the plurality of X-ray radiation units are connected in series to the control circuit, the X-ray radiation units can be connected to each other and are not required to be connected one by one to the controller. This makes it possible to increase and decrease the number of units without complicating their wiring.