Abstract: The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan.

Abstract: An apparatus for inspecting a magnetic head device inspects an effective track width of a write track of each of magnetic head devices formed on a row bar in order to measure a two-dimensional distribution of magnetic fields generated by the magnetic head devices formed on the row bar while the apparatus is not affected by an external environment. The apparatus has a tray unit, a stage unit, a sample receiving and delivering unit, a magnetic field measuring unit and an effective track width measuring unit on a vibration isolation unit that blocks a vibration from the outside of the apparatus. The tray unit, the stage unit, the sample receiving and delivering unit, the magnetic field measuring unit, the effective track width measuring unit and the vibration isolation table are covered with a sound insulation unit that blocks noise from the outside of the apparatus.

Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.

Abstract: A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.