Abstract: A state detection sensor is provided with a first sensor unit, a second sensor unit, an intermediate insulation sensor disposed between the first sensor unit and the second sensor unit. The first surface of the intermediate insulation layer is joined to the second wiring of the first sensor unit. The second surface of the intermediate insulation layer is joined to the third wiring of the second sensor unit. The first sensor unit and the second sensor unit are electrically connected in series in a state where a polarity of thermoelectrormotive force produced in the first sensor unit and a polarity of thermoelectromotive force produced in the second sensor unit are in mutually opposite polarity relationship when a heat flow passes through the first sensor unit and the second sensor unit in the same direction.

Abstract: A position detection device, for detecting a change in relative position of a detection object with respect to a reference portion, includes: a base portion immovable with respect to the reference portion; a following portion deformable or movable following relative movement of the detection object with respect to the reference portion; an expandable and contractible member; and a heat flux detection section. The expandable and contractible member is provided between the base portion and the following portion, is made of a material expandable and contractible according to deformation or movement of the following portion, and generates heat during contraction and absorbs heat during expansion. The heat flux detection section is provided to be subjected to heat of the expandable and contractible member, and is configured to detect a heat flux that is a flow of heat between an inside and an outside of the expandable and contractible member.

Abstract: A position detection device, for detecting a change in relative position of a detection object with respect to a reference portion, includes: a base portion immovable with respect to the reference portion; a following portion deformable or movable following relative movement of the detection object with respect to the reference portion; an expandable and contractible member; and a heat flux detection section. The expandable and contractible member is provided between the base portion and the following portion, is made of a material expandable and contractible according to deformation or movement of the following portion, and generates heat during contraction and absorbs heat during expansion. The heat flux detection section is provided to be subjected to heat of the expandable and contractible member, and is configured to detect a heat flux that is a flow of heat between an inside and an outside of the expandable and contractible member.

Abstract: A workpiece holding method and holding system able to shorten the workpiece attachment/detachment time, wherein pressurized air is circulated through a nozzle of an ejector unit of a chuck at all times to make the inside of a suction chamber a negative pressure before chucking a workpiece, completion of chucking is detected based on a pressure value detected by a pressure sensor after chucking the workpiece, and the workpiece is unchucked by having a valve close an exhaust port to raise the pressure inside an exhaust chamber and introducing pressurized air from the ejector unit to the suction chamber.

Abstract: A dummy work (DW: a work for printing a reference necessary for subsequent printing) is moved to a printing position while the dummy work is fixed to a work alignment mechanism 2, and solder printing is made. The printed dummy work is then returned to the work alignment position and its image is taken by image processing cameras 7 and an image of position coordinates of a solder bump specified for alignment is stored. Positioning of subsequent works W is conducted on the basis of the image of the dummy work stored and solder printing of the works is subsequently made at the printing position.

Abstract: A workpiece holding method and holding system able to shorten the workpiece attachment/detachment time, wherein pressurized air is circulated through a nozzle of an ejector unit of a chuck at all times to make the inside of a suction chamber a negative pressure before chucking a workpiece, completion of chucking is detected based on a pressure value detected by a pressure sensor after chucking the workpiece, and the workpiece is unchucked by having a valve close an exhaust port to raise the pressure inside an exhaust chamber and introducing pressurized air from the ejector unit to the suction chamber.

Abstract: A dummy work (DW: a work for printing a reference necessary for subsequent printing) is moved to a printing position while the dummy work is fixed to a work alignment mechanism 2, and solder printing is made. The printed dummy work is then returned to the work alignment position and its image is taken by image processing cameras 7 and an image of position coordinates of a solder bump specified for alignment is stored. Positioning of subsequent works W is conducted on the basis of the image of the dummy work stored and solder printing of the works is subsequently made at the printing position.

Abstract: A printing mechanism 6 of a screen printing machine 1 for printing paste P at a printing position to a work W through a screen S includes a packing nozzle 62 coming into contact, at the distal end thereof, with the screen, a packing head 62 to which the paste consumed during printing is packed and a feed tank 63 for supplying the paste to the filling head. Each of the packing head and the feed tank has therein an extrusion mechanism 62b, 63a and can control an extrusion pressure of the paste to the screen. The printing mechanism further includes a packing head supporting mechanism 64 capable of supporting the packing head in such a manner as to be capable of moving up and down and also capable of regulating the pushing force of the packing head onto the screen.