Patents by Inventor Norio Miyake
Norio Miyake has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10802258Abstract: A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n1) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n2) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number n1 may be greater than a number n2 with respect to the first objective lens.Type: GrantFiled: April 18, 2018Date of Patent: October 13, 2020Assignee: NIKON CORPORATIONInventors: Norio Miyake, Fumio Suzuki, Hiroaki Nakayama
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Patent number: 10564550Abstract: An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.Type: GrantFiled: January 10, 2019Date of Patent: February 18, 2020Assignee: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Patent number: 10353294Abstract: An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.Type: GrantFiled: December 14, 2016Date of Patent: July 16, 2019Assignee: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Publication number: 20190163068Abstract: An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.Type: ApplicationFiled: January 10, 2019Publication date: May 30, 2019Applicant: NIKON CORPORATIONInventors: Norio MIYAKE, Kinya KATO
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Publication number: 20180231755Abstract: A microscope including an illumination optical system having an objective lens and a fly-eye lens, where: the fly-eye lens having a plurality of lens elements; in the illumination optical system, images of the plurality of lens elements are projected on a pupil of the objective lens; and the number (n1) of the images of the lens elements projected inside the pupil of the objective lens is more than the number (n2) of the images of the lens elements projected on an outer perimeter of the pupil of the objective lens. In the above observation optical system, a first objective lens having a first pupil diameter and a second objective lens having a pupil diameter larger than the first pupil diameter are switchable, and a number n1 may be greater than a number n2 with respect to the first objective lens.Type: ApplicationFiled: April 18, 2018Publication date: August 16, 2018Applicant: NIKON CORPORATIONInventors: Norio MIYAKE, Fumio SUZUKI, Hiroaki NAKAYAMA
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Publication number: 20170090297Abstract: An illumination optical system includes a fly's-eye lens having a back focal plane arranged on a pupil plane of the illumination optical system or in a vicinity of the pupil plane; a first spatial light modulator which is arranged on an incident side of the fly's-eye lens and which includes a plurality of first mirror elements; a first optical system arranged in an optical path between the first spatial light modulator and the fly's-eye lens; a second spatial light modulator arranged in an optical path between the first optical system and the fly's-eye lens and which includes a plurality of second mirror elements; and a polarizing element arranged in the optical path between the first spatial light modulator and the fly's-eye lens.Type: ApplicationFiled: December 14, 2016Publication date: March 30, 2017Applicant: NIKON CORPORATIONInventors: Norio MIYAKE, Kinya KATO
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Patent number: 9523918Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.Type: GrantFiled: November 25, 2011Date of Patent: December 20, 2016Assignee: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Patent number: 8908151Abstract: An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.Type: GrantFiled: February 5, 2009Date of Patent: December 9, 2014Assignee: Nikon CorporationInventors: Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake, Yasushi Mizuno, Ryuji Takaya, Risa Yoshimoto, Hiroyuki Hirota
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Publication number: 20140211174Abstract: There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.Type: ApplicationFiled: November 25, 2011Publication date: July 31, 2014Applicant: NIKON CORPORATIONInventors: Norio Miyake, Kinya Kato
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Publication number: 20090284727Abstract: An illumination optical system is one for illuminating a surface to be illuminated with light from a light source, which has a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator, and an optical attenuator arranged on a predetermined surface in an optical path behind the optical integrator and having an attenuation characteristic of varying an attenuation rate depending upon an angle of incidence to the predetermined surface.Type: ApplicationFiled: February 5, 2009Publication date: November 19, 2009Applicant: NIKON CORPORATIONInventors: Kouji Muramatsu, Osamu Tanitsu, Hirohisa Tanaka, Masaya Yamamoto, Norio Miyake, Yasushi Mizuno, Ryuji Takaya, Risa Yoshimoto, Hiroyuki Hirota
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Patent number: 5376839Abstract: Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.Type: GrantFiled: August 9, 1993Date of Patent: December 27, 1994Assignees: Hitachi Ltd., VLSI Engineering CorporationInventors: Masashi Horiguchi, Masakazu Aoki, Kiyoo Itoh, Yoshinobu Nakagome, Norio Miyake, Takaaki Noda, Jun Etoh, Hitoshi Tanaka, Shin'ichi Ikenaga
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Patent number: 5254880Abstract: Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.Type: GrantFiled: April 3, 1992Date of Patent: October 19, 1993Assignees: Hitachi, Ltd., Hitachi VLSI Engineering CorporationInventors: Masashi Horiguchi, Masakazu Aoki, Kiyoo Itoh, Yoshinobu Nakagome, Norio Miyake, Takaaki Noda, Jun Etoh, Hitoshi Tanaka, Shin ichi Ikenaga
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Patent number: 5179539Abstract: Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16 M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.Type: GrantFiled: April 8, 1992Date of Patent: January 12, 1993Assignee: Hitachi, Ltd., Hitachi Vlsi Engineering CorporationInventors: Masashi Horiguchi, Masakazu Aoki, Kiyoo Itoh, Yoshinobu Nakagome, Norio Miyake, Takaaki Noda, Jun Etoh, Hitoshi Tanaka, Shin'ichi Ikenaga
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Patent number: 4994688Abstract: Practical structures of an ultra large scale semiconductor integrated (ULSI) circuit especially a dynamic random access memory of 16 M bits or more are involved. The ULSI circuit uses internal operating voltages and how to construct a reference voltage generating circuit and a voltage limiter circuit in the ULSI circuit is a matter of importance. The operation of the reference voltage generating circuit and voltage limiter circuit can be stabilized, characteristics of these circuits are improved, and layout of these circuits as applied to memory cell array, peripheral circuits and the like can be improved. Improved methods of testing these circuits are provided.Type: GrantFiled: March 15, 1989Date of Patent: February 19, 1991Assignees: Hitachi Ltd., Hitachi VLSI Engineering CorporationInventors: Masashi Horiguchi, Masakazu Aoki, Kiyoo Itoh, Yoshinobu Nakagome, Norio Miyake, Takaaki Noda, Jun Etoh, Hitoshi Tanaka, Shin'ichi Ikenaga