Abstract: To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.

Abstract: Provided is a microwave resonator of a both-end-opened type including: a first end and a second end; a conductor line; a ground conductor; and a measurement unit for measuring an amount associated with a complex dielectric constant of a sample while the measurement unit is brought close to the sample, in which the measurement unit is connected to the conductor line in a central portion joining the first end and the second end of the microwave resonator, and protrudes to an outside of the microwave resonator at a state estranged from the ground conductor.

Abstract: To be able to measure a value with regard to a dissipation, or a value in proportion to a dissipation energy without making a premise by being brought into a steady state. Exciting means 12 for carrying out an excitation by following a resonance frequency of a cantilever 2, a displacement detector 10 for detecting a displacement of a stylus at a tip of the cantilever 2, an amplitude detector 20 for successively providing an amplitude from a signal from the displacement detector 10, a difference value detector 21 for providing a time difference value of the amplitude, a divider 22 for providing a value of a quotient between the time difference values, a logarithmic converter 23 for providing a logarithmic value of the value of the quotient, and a second divider 24 for providing a value with regard to a dissipation by calculating a value constituted by dividing the logarithmic value by a difference time period are provided.

Abstract: To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.

Abstract: To be able to measure a value with regard to a dissipation, or a value in proportion to a dissipation energy without making a premise by being brought into a steady state. Exciting means 12 for carrying out an excitation by following a resonance frequency of a cantilever 2, a displacement detector 10 for detecting a displacement of a stylus at a tip of the cantilever 2, an amplitude detector 20 for successively providing an amplitude from a signal from the displacement detector 10, a difference value detector 21 for providing a time difference value of the amplitude, a divider 22 for providing a value of a quotient between the time difference values, a logarithmic converter 23 for providing a logarithmic value of the value of the quotient, and a second divider 24 for providing a value with regard to a dissipation by calculating a value constituted by dividing the logarithmic value by a difference time period are provided.

Abstract: In a scanning probe microscope a probe associated with its sharp end includes a single conductive material.

Abstract: A coaxial probe includes a coaxial cable including an electrical conductor extending therethrough and projecting therefrom at an end thereof, a planar waveguide on which the electrical conductor projecting from the coaxial cable is mounted, and a sensor electrically connected to the electrical conductor through the planar waveguide. The planar waveguide may be comprised of a substrate, and a strip line formed on the substrate, the strip line being electrically connected at one end to the sensor and at the other end to the electrical conductor. The sensor may be comprised of a cantilever supported at a distal end thereof on the planar waveguide, and a probe mounted on a free end of the cantilever.

Abstract: In a scanning microwave microscope including a microwave resonator, an exciting unit for exciting the microwave resonator, a first detecting unit for detecting a first detection amount relating to a resonant state of the microwave resonator, a sharp end coupled to a center conductor of the microwave resonator, and a display unit for displaying the first detection amount while a sample is scanned by the sharp end, a distance changing unit causes a differential change in a distance between the sharp end and the sample. A second detecting unit detects a second detection amount relating to a change of the first detection amount. A control unit controls the distance between the sharp end and the sample in accordance with the second detection amount, so that an average value of the distance between the sharp end and the sample is brought close to a definite value.

Abstract: A coaxial probe includes a coaxial cable including an electrical conductor extending therethrough and projecting therefrom at an end thereof, a planar waveguide on which the electrical conductor projecting from the coaxial cable is mounted, and a sensor electrically connected to the electrical conductor through the planar waveguide. The planar waveguide may be comprised of a substrate, and a strip line formed on the substrate, the strip line being electrically connected at one end to the sensor and at the other end to the electrical conductor. The sensor may be comprised of a cantilever supported at a distal end thereof on the planar waveguide, and a probe mounted on a free end of the cantilever.

Abstract: An object-displacement detector includes a mirror having a curved surface, the mirror being fixed to an object; a light emitting device for emitting a light; a photo-detector having plural light-receiving regions which are divided in two-dimensional space; and a single optical system having a single optical axis for guiding the emitted light to the mirror and guiding a refracted light from the mirror to the photo-detector for detecting an intensity distribution of the reflected light.

Abstract: A scanning probe microscope includes (a) a first device which causes a relative displacement between an object and a probe, (b) a detector which detects a change in interaction caused by the first device between the probe and the object, (c) a second device which feeds the detected change back to the relative displacement to keep the interaction equal to a constant, (d) an adder which adds the detected change to the constant while the interaction is fed back to a distance between the probe and the object, to thereby temporarily vary the constant, (e) a collector which collects signals relating to a displacement which signals are varied as the constant is varied, and calculates a relation among the signals, and (f) a third device which returns the temporarily varied constant back to the constant for scanning the object, calculates products of the relation with each of the signals in real-time, and sums the products, which products indicate a profile of a surface of the object.

Abstract: In a scanning microwave microscope including a microwave resonator, an exciting unit for exciting the microwave resonator, a first detecting unit for detecting a first detection amount relating to a resonant state of the microwave resonator, a sharp end coupled to a center conductor of the microwave resonator, and a display unit for displaying the first detection amount while a sample is scanned by the sharp end, a distance changing unit causes a differential change in a distance between the sharp end and the sample. A second detecting unit detects a second detection amount relating to a change of the first detection amount. A control unit controls the distance between the sharp end and the sample in accordance with the second detection amount, so that an average value of the distance between the sharp end and the sample is brought close to a definite value.

Abstract: In a scanning probe microscope a probe associated with its sharp end includes a single conductive material.

Abstract: A scanning probe microscope includes (a) a first device which causes a relative displacement between an object and a probe, (b) a detector which detects a change in interaction caused by the first device between the probe and the object, (c) a second device which feeds the detected change back to the relative displacement to keep the interaction equal to a constant, (d) an adder which adds the detected change to the constant while the interaction is fed back to a distance between the probe and the object, to thereby temporarily vary the constant, (e) a collector which collects signals relating to a displacement which signals are varied as the constant is varied, and calculates a relation among the signals, and (f) a third device which returns the temporarily varied constant back to the constant for scanning the object, calculates products of the relation with each of the signals in real-time, and sums the products, which products indicate a profile of a surface of the object.

Abstract: An object-displacement detector comprises: a mirror having a curved surface, and said mirror being fixed to an object; a light emitting device for emitting a light; a photo-detector having plural light-receiving regions which are divided in two-dimensional space; and a single optical system having a single optical axis for guiding said emitted light to said mirror and guiding a refracted light from said mirror to said photo-detector for detecting an intensity distribution of said reflected light.