Patents by Inventor Norio TOSHIMA

Norio TOSHIMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pulsed electron beam current probe and methods of operating the same
    Patent number: 10114065
    Abstract: An electron beam absorbed current measurement method includes connecting a conductive probe to a conductive structure of a sample, irradiating a pulsed electron beam along the conductive structure to generate an alternating current in the conductive probe, and determining a presence of a high resistance defect in the conductive structure based on at least one of a delay of a rising edge of the alternating current waveform and a decrease in amplitude of the alternating current waveform.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: October 30, 2018
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventor: Norio Toshima
  • PULSED ELECTRON BEAM CURRENT PROBE AND METHODS OF OPERATING THE SAME
    Publication number: 20170176513
    Abstract: An electron beam absorbed current measurement method includes connecting a conductive probe to a conductive structure of a sample, irradiating a pulsed electron beam along the conductive structure to generate an alternating current in the conductive probe, and determining a presence of a high resistance defect in the conductive structure based on at least one of a delay of a rising edge of the alternating current waveform and a decrease in amplitude of the alternating current waveform.
    Type: Application
    Filed: September 15, 2016
    Publication date: June 22, 2017
    Inventor: Norio TOSHIMA