Patents by Inventor Norio Yamagata

Norio Yamagata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230083924
    Abstract: A SiC single crystal is produced by impregnating a molten alloy of silicon and a metallic element M that increases carbon solubility into a SiC sintered body to form a SiC crucible, placing silicon and M in the crucible and heating the crucible to melt the silicon and M and form a Si—C solution, dissolving silicon and carbon in the solution from surfaces of the crucible in contact with the solution, contacting a SiC seed crystal with the top of the solution to grow a first SiC single crystal on the SiC seed crystal by a solution process, and bulk growing a second SiC single crystal on a face of the solution-grown first SiC single crystal by a sublimation or gas process. This method enables a low-dislocation, high-quality SiC single crystal to be produced by a vapor phase process.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 16, 2023
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Norio Yamagata, Naofumi Shinya, Yu Hamaguchi, Toshihiro Tsumori, Takehisa Minowa
  • Publication number: 20230042620
    Abstract: In SiC single crystal production by the solution process, an alloy of silicon (Si) and a metallic element M that increases the solubility of carbon (C) is pre-impregnated into a SiC sintered body having a relative density of 50 to 90%, following which Si and M are placed in a SiC crucible made of the SiC sintered body and the Si and M within the SiC crucible are melted, forming a Si—C solution. With heating, SiC from the SiC sintered body dissolves into the Si—C solution, efficiently supplying Si and C to the Si—C solution. As a result, Si and C are supplied uniformly and in the proper amount from all areas of contact between the SiC crucible and the Si—C solution, enabling a high-quality SiC single crystal to be stably produced over a long time at a rapid growth rate.
    Type: Application
    Filed: August 2, 2022
    Publication date: February 9, 2023
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi Shinya, Norio Yamagata, Yu Hamaguchi, Takehisa Minowa
  • Patent number: 11440849
    Abstract: In the present invention, in producing a SiC single crystal in accordance with a solution method, a crucible containing SiC as a main component and having an oxygen content of 100 ppm or less is used as the crucible to be used as a container for a Si—C solution. In another embodiment, a sintered body containing SiC as a main component and having an oxygen content of 100 ppm or less is placed in the crucible to be used as a container for a Si—C solution. The SiC crucible and SiC sintered body are obtained by molding and baking a SiC raw-material powder having an oxygen content of 2000 ppm or less. SiC, which is the main component of these, serves as a source for Si and C and allows Si and C to elute into the Si—C solution by heating.
    Type: Grant
    Filed: July 25, 2016
    Date of Patent: September 13, 2022
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi Shinya, Yu Hamaguchi, Norio Yamagata, Osamu Yamada, Takehisa Minowa
  • Patent number: 10612154
    Abstract: A SiC single crystal is prepared by the solution process of placing a seed crystal in contact with a Si—C solution in a crucible and letting a SiC single crystal to grow from the seed crystal. The method includes the first growth step of conducting crystal growth using (0001) or (000-1) plane of a SiC single crystal of which the seed crystal is composed, as the growth surface, and the second growth step of conducting crystal growth using (1-100) or (11-20) plane of a SiC single crystal resulting from the first growth step as the growth surface. A SiC single crystal of high homogeneity and quality is obtained, which is reduced in threading screw dislocations, threading edge dislocations, basal plane dislocations, micropipes, and stacking faults.
    Type: Grant
    Filed: April 5, 2018
    Date of Patent: April 7, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Naofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
  • Patent number: 10167573
    Abstract: A method of producing a SiC single crystal includes: disposing a SiC seed crystal at a bottom part inside a graphite crucible; causing a solution containing Si, C and R (R is at least one selected from the rare earth elements inclusive of Sc and Y) or X (X is at least one selected from the group consisting of Al, Ge, Sn, and transition metals exclusive of Sc and Y) to be present in the crucible; supercooling the solution so as to cause the SiC single crystal to grow on the seed crystal; and adding powdery or granular Si and/or SiC raw material to the solution from above the graphite crucible while keeping the growth of the SiC single crystal.
    Type: Grant
    Filed: November 21, 2011
    Date of Patent: January 1, 2019
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Tadao Nomura, Norio Yamagata, Takehisa Minowa
  • Publication number: 20180298519
    Abstract: A SiC single crystal is prepared by the solution process of placing a seed crystal in contact with a Si-C solution in a crucible and letting a SiC single crystal to grow from the seed crystal. The method includes the first growth step of conducting crystal growth using (0001) or (000-1) plane of a SiC single crystal of which the seed crystal is composed, as the growth surface, and the second growth step of conducting crystal growth using (1-100) or (11-20) plane of a SiC single crystal resulting from the first growth step as the growth surface. A SiC single crystal of high homogeneity and quality is obtained, which is reduced in threading screw dislocations, threading edge dislocations, basal plane dislocations, micropipes, and stacking faults.
    Type: Application
    Filed: April 5, 2018
    Publication date: October 18, 2018
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Naofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
  • Publication number: 20180257993
    Abstract: In the present invention, in producing a SiC single crystal in accordance with a solution method, a crucible containing SiC as a main component and having an oxygen content of 100 ppm or less is used as the crucible to be used as a container for a Si—C solution. In another embodiment, a sintered body containing SiC as a main component and having an oxygen content of 100 ppm or less is placed in the crucible to be used as a container for a Si—C solution. The SiC crucible and SiC sintered body are obtained by molding and baking a SiC raw-material powder having an oxygen content of 2000 ppm or less. SiC, which is the main component of these, serves as a source for Si and C and allows Si and C to elute into the Si—C solution by heating.
    Type: Application
    Filed: July 25, 2016
    Publication date: September 13, 2018
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi SHINYA, Yu HAMAGUCHI, Norio YAMAGATA, Osamu YAMADA, Takehisa MINOWA
  • Publication number: 20180230623
    Abstract: In the present invention, in producing a SiC single crystal in accordance with a solution method, a crucible containing SiC as a main component and having an oxygen content of 100 ppm or less is used as the crucible to be used as a container for a Si—C solution. In another embodiment, a sintered body containing SiC as a main component and having an oxygen content of 100 ppm or less is placed in the crucible to be used as a container for a Si—C solution. SiC, which is the main component of these, serves as a source for Si and C and allows Si and C to elute into the Si—C solution by heating. Since the oxygen content of SiC is 100 ppm or less, generation of gas in the Si—C solution is suppressed.
    Type: Application
    Filed: July 25, 2016
    Publication date: August 16, 2018
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi SHINYA, Yu HAMAGUCHI, Norio YAMAGATA, Osamu YAMADA, Takehisa MINOWA
  • Patent number: 9951439
    Abstract: In the present invention, a crucible formed of SiC as a main component is used as a container for a Si—C solution. A metal element M (M is at least one metal element selected from at least one of a first group consisting of La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and Lu, a second group consisting of Ti, V, Cr, Mn, Fe, Co, Ni and Cu and a third group consisting of Al, Ga, Ge, Sn, Pb and Zn) is added to the Si—C solution and the crucible is heated to elute Si and C, which are derived from a main component SiC of the crucible, from a high-temperature surface region of the crucible in contact with the Si—C solution, into the Si—C solution. In this way, precipitation of a SiC polycrystal on a surface of the crucible in contact with the Si—C solution is suppressed.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: April 24, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Naofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
  • Patent number: 9945047
    Abstract: In the present invention, a crucible formed of SiC as a main component is used as a container for a Si—C solution. The SiC crucible is heated such that, for example, an isothermal line representing a temperature distribution within the crucible draws an inverted convex shape; and Si and C, which are derived from a main component SiC of the crucible, are eluted from a high-temperature surface region of the crucible in contact with the Si—C solution, into the Si—C solution, thereby suppressing precipitation of a SiC polycrystal on a surface of the crucible in contact with the Si—C solution. To the Si—C solution of this state, a SiC seed crystal is moved down from the upper portion of the crucible closer to the Si—C solution and brought into contact with the Si—C solution to grow a SiC single crystal on the SiC seed crystal.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: April 17, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Naofumi Shinya, Yu Hamaguchi, Norio Yamagata, Takehisa Minowa
  • Publication number: 20150159297
    Abstract: In the present invention, a crucible formed of SiC as a main component is used as a container for a Si—C solution. A metal element M (M is at least one metal element selected from at least one of a first group consisting of La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and Lu, a second group consisting of Ti, V, Cr, Mn, Fe, Co, Ni and Cu and a third group consisting of Al, Ga, Ge, Sn, Pb and Zn) is added to the Si—C solution and the crucible is heated to elute Si and C, which are derived from a main component SiC of the crucible, from a high-temperature surface region of the crucible in contact with the Si—C solution, into the Si—C solution. In this way, precipitation of a SiC polycrystal on a surface of the crucible in contact with the Si—C solution is suppressed.
    Type: Application
    Filed: December 3, 2014
    Publication date: June 11, 2015
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi SHINYA, Yu HAMAGUCHI, Norio YAMAGATA, Takehisa MINOWA
  • Publication number: 20150159299
    Abstract: In the present invention, a crucible formed of SiC as a main component is used as a container for a Si—C solution. The SiC crucible is heated such that, for example, an isothermal line representing a temperature distribution within the crucible draws an inverted convex shape; and Si and C, which are derived from a main component SiC of the crucible, are eluted from a high-temperature surface region of the crucible in contact with the Si—C solution, into the Si—C solution, thereby suppressing precipitation of a SiC polycrystal on a surface of the crucible in contact with the Si—C solution. To the Si—C solution of this state, a SiC seed crystal is moved down from the upper portion of the crucible closer to the Si—C solution and brought into contact with the Si—C solution to grow a SiC single crystal on the SiC seed crystal.
    Type: Application
    Filed: December 3, 2014
    Publication date: June 11, 2015
    Applicant: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi SHINYA, Yu HAMAGUCHI, Norio YAMAGATA, Takehisa MINOWA
  • Publication number: 20120132130
    Abstract: A method of producing a SiC single crystal includes: disposing a SiC seed crystal at a bottom part inside a graphite crucible; causing a solution containing Si, C and R (R is at least one selected from the rare earth elements inclusive of Sc and Y) or X (X is at least one selected from the group consisting of Al, Ge, Sn, and transition metals exclusive of Sc and Y) to be present in the crucible; supercooling the solution so as to cause the SiC single crystal to grow on the seed crystal; and adding powdery or granular Si and/or SiC raw material to the solution from above the graphite crucible while keeping the growth of the SiC single crystal.
    Type: Application
    Filed: November 21, 2011
    Publication date: May 31, 2012
    Applicant: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Tadao Nomura, Norio Yamagata, Takehisa Minowa
  • Publication number: 20090139959
    Abstract: Provided is a surface-treated substrate in which the roughness of the surface of the substrate is controlled. The surface-treated substrate can form a magnetic recording medium in which head flying stability is maintained and which has a magnetic film that can achieve high recording densities. Also provided is a method for roughening the surface of the substrate. More specifically, provided is a surface-treated silicon substrate for a magnetic recording medium in which a surface used for forming a recording layer has 40 to 1000 protrusions per 1 ?m2 with a maximum height of 10 nm or less and an average roughness of 0.3 to 2.0 nm, and in which there are no defects or spots on any of the surface. Furthermore, provided is a method for manufacturing the surface-treated silicon substrate for the magnetic recording medium, comprising a step of etching a surface of a silicon substrate, wherein ultrasound is applied to the surface of the silicon substrate with the substrate shaken or rotated.
    Type: Application
    Filed: November 13, 2008
    Publication date: June 4, 2009
    Inventors: Naofumi Shinya, Norio Yamagata
  • Patent number: 7476454
    Abstract: Provided is a surface-treated substrate in which the roughness of the surface of the substrate is controlled. The surface-treated substrate can form a magnetic recording medium in which head flying stability is maintained and which has a magnetic film that can achieve high recording densities. Also provided is a method for roughening the surface of the substrate. More specifically, provided is a surface-treated silicon substrate for a magnetic recording medium in which a surface used for forming a recording layer has 40 to 1000 protrusions per 1 ?m2 with a maximum height of 10 nm or less and an average roughness of 0.3 to 2.0 nm, and in which there are no defects or spots on any of the surface. Furthermore, provided is a method for manufacturing the surface-treated silicon substrate for the magnetic recording medium, comprising a step of etching a surface of a silicon substrate, wherein ultrasound is applied to the surface of the silicon substrate with the substrate shaken or rotated.
    Type: Grant
    Filed: February 25, 2005
    Date of Patent: January 13, 2009
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Naofumi Shinya, Norio Yamagata
  • Publication number: 20050196587
    Abstract: Provided is a surface-treated substrate in which the roughness of the surface of the substrate is controlled. The surface-treated substrate can form a magnetic recording medium in which head flying stability is maintained and which has a magnetic film that can achieve high recording densities. Also provided is a method for roughening the surface of the substrate. More specifically, provided is a surface-treated silicon substrate for a magnetic recording medium in which a surface used for forming a recording layer has 40 to 1000 protrusions per 1 ?m2 with a maximum height of 10 nm or less and an average roughness of 0.3 to 2.0 nm, and in which there are no defects or spots on any of the surface. Furthermore, provided is a method for manufacturing the surface-treated silicon substrate for the magnetic recording medium, comprising a step of etching a surface of a silicon substrate, wherein ultrasound is applied to the surface of the silicon substrate with the substrate shaken or rotated.
    Type: Application
    Filed: February 25, 2005
    Publication date: September 8, 2005
    Inventors: Naofumi Shinya, Norio Yamagata
  • Patent number: 4449517
    Abstract: A solar heat plant comprises a first system including a high temperature heat collector for changing solar energy to high temperature heat energy under usual sunshine and to low temperature heat energy under poor sunshine to supply the heat energy to a high temperature heat medium, a high temperature heat load which works under usual sunshine using the heat energy supplied to the high temperature heat medium, a second system including a low temperature heat collector for changing solar energy to low temperature heat energy under usual or poor sunshine to supply the heat energy to a low temperature heat medium, and a low temperature heat load which works under usual sunshine using the heat energy supplied to the low temperature heat medium and also works under poor sunshine using the heat energies supplied to the high and low temperature heat media.
    Type: Grant
    Filed: March 5, 1982
    Date of Patent: May 22, 1984
    Assignees: Agency of Industrial Science and Technology, Tokyo Shibaura Denki Kabushiki Kaisha
    Inventors: Tatsuo Tani, Sinji Sawata, Tadayoshi Tanaka, Koichi Sakuta, Yasunobu Nakamoto, Hideshi Sekiya, Masanobu Morita, Norio Yamagata