Abstract: The present invention provides a linear motor device that can reduce a variation in thrust caused by a variation in attractive force. The linear motor device includes a linear motor 1 and a control section 30 that controls the linear motor 1. The linear motor 1 includes a magnet member 2 composed of permanent magnets having respective N poles and S poles alternately arranged in an axial direction, and a coil member 3 which is located orthogonally to the axial direction with respect to the magnet member 2 and through which the magnet member 2 is movable in the axial direction relative to the coil member 3. The control section 30 controls current conducted through the coil member 3 so that a moving one of the magnet member 2 and the coil member 3 reciprocates within a use range L corresponding to a part of a pitch p between the magnetic poles N and S in the magnet member 2.

Abstract: The present invention provides a linear motor 1 that can prevent a magnet member 2 from falling down when a power supply is turned off. A linear motor 1 includes a magnet member 2 composed of permanent magnets having alternately arranged respective N poles and S poles and a coil member 3 which surrounds a periphery of the magnet member 2 and trough which the magnet member 2 is movable in an axial direction relative to the coil member 3. A magnetic substance 3 is provided in the vicinity of one end of the coil member 3 to allow the magnet member 2 to exert a magnetic attractive force.

Abstract: A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

Abstract: The present invention provides a linear motor 1 that can prevent a magnet member 2 from falling down when a power supply is turned off. A linear motor 1 includes a magnet member 2 composed of permanent magnets having alternately arranged respective N poles and S poles and a coil member 3 which surrounds a periphery of the magnet member 2 and trough which the magnet member 2 is movable in an axial direction relative to the coil member 3. A magnetic substance 3 is provided in the vicinity of one end of the coil member 3 to allow the magnet member 2 to exert a magnetic attractive force.

Abstract: The present invention provides a linear motor device that can reduce a variation in thrust caused by a variation in attractive force. The linear motor device includes a linear motor 1 and a control section 30 that controls the linear motor 1. The linear motor 1 includes a magnet member 2 composed of permanent magnets having respective N poles and S poles alternately arranged in an axial direction, and a coil member 3 which is located orthogonally to the axial direction with respect to the magnet member 2 and through which the magnet member 2 is movable in the axial direction relative to the coil member 3. The control section 30 controls current conducted through the coil member 3 so that a moving one of the magnet member 2 and the coil member 3 reciprocates within a use range L corresponding to a part of a pitch p between the magnetic poles N and S in the magnet member 2.

Abstract: A coating apparatus 10 includes a base 11, a substrate support stage unit 2 mounted on the base 11 and capable of fixedly supporting a substrate 1, a coating unit 3 mounted on the base 11 and capable of discharging a coating material onto a substrate 1 fixedly supported on the substrate support stage unit 2, and a motor unit 4 for driving at least either the substrate support stage unit 2 or the coating unit 3 for sliding on the base 11. The motor unit 3 has a stator assembly 22 on the base 11. The stator assembly 22 includes a plurality of magnets 31 linearly arranged such that opposite magnetic polarities of the magnets alternately change, and a pair of magnet holding members 37 and 38 for linearly pressing the magnets 31 together from both the ends of the magnets.

Abstract: A stator in a linear motor includes a plurality of cylindrical permanent magnets and a center shaft made of non-magnetic material and inserted in the permanent magnets. The permanent magnets are tightened from both sides thereof so that the adjacent permanent magnets may be close to each other.

Abstract: A magnetoresistance-effect magnetic sensor provides an effective output even in atmospheres higher in temperature than those relevant to prior art sensors. The invented sensor has magnetoresistance-effect devices each connected to a constant current circuit. The voltage across each device is output as a magnetic sensitive output. With this structure, a temperature rise induced decrease in magnetoresistivity of the device is compensated for by an increase in intrinsic resistance thereof attributable to temperature rise. Thus, the sensor provides a reliable output even in high temperature atmospheres.

Abstract: A magnetic resistance element which contains a substrate, a ferromagnetic thin film containing a member of Fe--Ni alloys series formed on said substrate, a first protective film containing silicon oxide formed on said ferromagnetic thin film and a second protective film containing a synthetic resin formed on said first protective film.

Abstract: A printing machine for printing at printing positions along a line, and for performing a positional control by linear encoder. The printing machine comprises a linear encoder memory and detecting means. The linear encoder memory has a line-shaped magnetic recording medium formed of an alloy consisting essentially of iron, chromium, cobalt, no more than 0.03 weight % of carbon, and optionally 0.05 to 3 weight % of at least one element selected from the group consisting of titanium, vanadium, molybdenum and tungsten. The linear encoder memory extends parallel along a line of printing positions. The detecting means is coupled to the magnetic recording medium and is movable relative to the magnetic recording medium. The decting means detects a magnetic record on the magnetic recording medium. The detecting means comprises a magnetic head which includes a magnetic sensor element and a supporting mount.

Abstract: This invention relates to a YAG laser working machine, and an object thereof is to enable highly precise processing such as one required for processing of a photomask which is used at, for example, a step of manufacturing semiconductors. The YAG laser working machine according to this invention is such that a machine body is provided with restriction means for reducing a beam diameter of a laser beam, is provided with shutter means for executing ON.multidot.OFF control of application of the laser beam at a location on the outside of the oscillator, and is provided with highly harmonizing means for the laser beam. A base disk on which the machine body is mounted is formed of solid stone, and is mounted on a plurality of legs through interposition of respective pneumatic springs. Pulse signals regarding the X-movement and the Y-movement of an XY-table are processed by an OR circuit. Pulse application of the laser beam is controlled on the basis of the signals processed by the OR circuit.

Abstract: There is disclosed a reflection light preventive device comprising a cylinder-like transparent glass body being included many granulated permanent magnets therein to be possessed of the Faraday effect and a .lambda./4 polarizer disposed at the front and rear of said glass body respectively in a shifted relation each other in their planes of polarization.