Patents by Inventor Noritaka Nishioka

Noritaka Nishioka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle detecting method and storage medium storing program for implementing the method
    Patent number: 7352461
    Abstract: A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.
    Type: Grant
    Filed: November 30, 2005
    Date of Patent: April 1, 2008
    Assignees: Tokyo Electron Limited, Kabushiki Kaisha TOPCON
    Inventors: Susumu Saito, Hisashi Isozaki, Takashi Kakinuma, Noritaka Nishioka, Akira Noda
  • Particle detecting method and storage medium storing program for implementing the method
    Publication number: 20060132771
    Abstract: A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.
    Type: Application
    Filed: November 30, 2005
    Publication date: June 22, 2006
    Applicants: TOKYO ELECTRON LIMITED, Kabushiki Kaisha TOPCON
    Inventors: Susumu Saito, Hisashi Isozaki, Takashi Kakinuma, Noritaka Nishioka, Akira Noda