Patents by Inventor Norman Nagel

Norman Nagel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Retainer ring
    Patent number: 9193027
    Abstract: A retainer ring is provided for use in conjunction with Chemical Mechanical Polishing apparatus which polishing is used to polish a substrate. Particularly, the retainer ring includes an inner surface defining a retainer area, an outer surface, a front surface extending between the inner and outer surface, the front surface being in contact with the polishing pad during polishing and a transition region between the outer surface and the front surface. A CMP apparatus which includes at least a ring having the above features is also provided for.
    Type: Grant
    Filed: May 24, 2012
    Date of Patent: November 24, 2015
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: André Loebmann, Norman Nagel
  • RETAINER RING
    Publication number: 20130316620
    Abstract: A retainer ring is provided for use in conjunction with Chemical Mechanical Polishing apparatus which polishing is used to polish a substrate. Particularly, the retainer ring includes an inner surface defining a retainer area, an outer surface, a front surface extending between the inner and outer surface, the front surface being in contact with the polishing pad during polishing and a transition region between the outer surface and the front surface. A CMP apparatus which includes at least a ring having the above features is also provided for.
    Type: Application
    Filed: May 24, 2012
    Publication date: November 28, 2013
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: André Loebmann, Norman Nagel