Abstract: A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target includes a correction element housing, and first and second piezo elements. The correction element is fixedly mounted in the housing and moveable therewith. The piezo elements are supported by a member having a first portion and a second portion. The first piezo element is mounted to the first portion of the member and to said housing, and moves the housing in a first direction. The second piezo element is mounted to the second portion of the member and to a base, and moves the housing in a second direction substantially perpendicular to the first direction.

Abstract: A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, includes a housing having a correction element fixedly mounted therein. A flexure is attached to the housing and at least two drive devices are disposed radially around the housing. Each of the drive devices is operable to apply a force to the housing to thereby deflect the flexure causing the housing to move such that said correction element moves in a cyclic fashion about its beam axis.

Abstract: A scanning system for scanning an imaging surface includes a radiation emitter configured to emit a beam of radiation directed towards a deflector for scanning the beam onto the imaging surface. A detector detects any misalignment of the beam with respect to the deflector. A driver moves a correction element substantially perpendicular to the beam axis of the correction element to correct for the detected misalignment during scanning of the imaging surface.